KR100567299B1 - 반도체 장치 및 반도체 장치의 게이트 구조 제조 방법 - Google Patents
반도체 장치 및 반도체 장치의 게이트 구조 제조 방법 Download PDFInfo
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- KR100567299B1 KR100567299B1 KR1019990006710A KR19990006710A KR100567299B1 KR 100567299 B1 KR100567299 B1 KR 100567299B1 KR 1019990006710 A KR1019990006710 A KR 1019990006710A KR 19990006710 A KR19990006710 A KR 19990006710A KR 100567299 B1 KR100567299 B1 KR 100567299B1
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- silicon nitride
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 20
- 239000003989 dielectric material Substances 0.000 title description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 40
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 9
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000004408 titanium dioxide Substances 0.000 claims abstract 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 17
- 229910052796 boron Inorganic materials 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 5
- 230000005641 tunneling Effects 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 239000010408 film Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 229910052785 arsenic Inorganic materials 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005549 size reduction Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 208000012868 Overgrowth Diseases 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
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Abstract
Description
Si(100) 기판 상의 실리콘 2산화물 유전체가 갖는 다른 문제는 붕소 도핑된 폴리실리콘 게이트 구조로부터 붕소가 실리콘 2산화물을 통해 확산될 수 있다는 것이고, 이 문제는 게이트 산화물 두께 외형이 감소되면서 증대되어, 이에 의해 특히 채널 영역에서 장치의 특성을 열화시킨다. 반면에, 실리콘 질화물을 통해서는 붕소가 확산되지 않지만, 실리콘 질화물과 Si(100) 간의 계면이 비결정 실리콘 질화물이 되어 액티브 반도체 장치의 채널 내에서 전자 흐름의 중단을 야기함으로써 실리콘 2산화물 갖는 구조보다 열등한 구조를 제공한다.
실리콘 2산화물 유전체가 갖는 또다른 문제는, 두께가 매우 얇아지면, 트랜지스터의 게이트로부터 드레인까지의 전자 터널링의 결과로서 허용될 수 없는 누설 전류가 발생된다는 것이다. 실리콘 질화물은 실리콘 2산화물보다 큰 벌크(bulk) 유전율(약 3.9와 비교하여 ~7)을 갖기 때문에, 얇은 실리콘 2산화물층과 동일한 정전 용량 밀도를 갖는 두꺼운 실리콘 질화물층이 사용될 수 있다. 전자 터널링 전류가 층 두께에 지수함수적으로 의존하기 때문에, 약 10 내지 20Å의 유전체 두께의 증가에도 몇 자릿수만큼 누설 전류를 감소시킬 수 있다.
이와 같은 에피택셜층과 연관된 계면 상태 밀도는 댕글링 결합(dangling bonds)이 에피택셜 성장 공정으로 소비되기 때문에 낮다. 더욱이, Si(111) 표면 준비에 의해 제공될 수 있는 매끄러운 계면은 또한 원자적으로 평탄한 질화물층이 된다. 이와 같이 뚜렷한 매끄러운 계면은 우수한 도핑 확산 장벽뿐만 아니라 향상된 전자 이동 특성(적은 계면 스캐터링(scattering))이 된다. 임의의 잔류 댕글링 결합은 H2 또는 D2 소결 공정으로부터 충분히 만족될 수 있다.
본 발명에 따르면, 종래 기술의 상술한 문제는 이에 따라 최소화되고, 배재적이지는 않지만 반도체 장치용 게이트 유전체 및 반도체 메모리 장치 내의 캐패시터 유전체로서 주로 사용하기 위해 Si(111) 상의 초박 결정 실리콘 질화물층이 제공된다.
요약해서, Si(111) 상에 결정 실리콘 질화물을 성장시킴으로써 붕소 확산에 대한 장벽이 유지되고, 게다가 Si(100) 기판 위의 비결정 실리콘 질화물의 경우에서와 같이 채널이 중단되지 않는다.
본 발명에 따라 최소화된 종래 기술의 다른 문제는 구동 전류가 게이트 전극과 기판 간의 정전 용량에 비례한다는 사실에 근거한다. 그러므로, 유전체의 접촉 영역이 감소함에 따라서, 주어진 구동 전류에 대해서, 유전체 두께도 감소되어야만 한다. 이 결과는 게이트 전극으로부터의 전자가 유전체를 통해서 터널링 가능하고 채널 또는 드레인 전류에 추가되어, 장치 제어가 결여된다는 것이다. 실리콘 2산화물의 유전율이 약 3.9이고 실리콘 질화물의 유전율이 약 7이기 때문에, 실리콘 질화물의 두꺼운 층은 동일한 정전 용량 및 구동 전류 특성을 제공받을 수 있고, 게다가 유전체를 통한 전자 터널링을 방지할 수 있다.
본 발명에 따른 반도체 장치를 형성하기 위해서, 클리닝되고 상기 규정된 바와 같이 원자적으로 평탄한 Si(111)의 표면이 초기에 제공된다. Si(111) 표면은 표준 반응 챔버 내에 놓여지고 이 챔버는 분순물 제거 처리되어 약 5초 내지 약 5분동안 약 850℃ 내지 약 1000℃의 온도에서 약 1x10-7 내지 1x10-5 Torr의 암모니아 부분 압력으로 암모니아(NH3)로 채워져서 Si(111) 상에 약 0.3nm 내지 약 3nm의 결정 실리콘 질화물의 박층을 제공한다. 다음으로 반도체 장치의 나머지는 예를 들어, 폴리실리콘층으로 도핑된 층 또는 실리콘 질화물층 위의 금속층을 피착하는 표준 방식으로 제조된다. 붕소가 도핑된 폴리실리콘 전극의 경우에, 붕소는 유전체로서 실리콘 질화물을 사용하기 때문에 유전체를 통한 확산이 방지될 것이다.
실리콘 질화물이 유전체 재료로서 상술되었지만, 보다 높은 유전율을 갖고 실리콘 질화물과 호환가능한 다른 재료가 사용될 수 있다는 것을 인정하여야만 한다. 실리콘 호환성의 결여로, 예를 들어 탄탈륨 5산화물(Ta2O5), 티타늄 2산화물(TiO2) 또는 페로브스카이트 재료와의 계면에서 SiOX를 형성하게 되는 경우, 실리콘 질화물의 매우 얇은 층을 사용하여 유전 재료를 Si(111) 기판 및/또는 유전체 위의 전극으로부터 분리시킬 수 있으며, 이와 같은 층은 약 2 모노층(monolayers)의 두께를 갖는다.
먼저 도 1을 참고하면, 본 발명의 제1 실시예에 따라서 제조된 반도체 장치가 도시되어 있다. 반도체 장치는 결정 실리콘 질화물(Si3N4)(3)의 유전체층이 위에 형성된 Si(111) 기판(1)을 포함한다. 붕소 또는 인 또는 비소 도핑된 다결정 실리콘의 전극층(5)이 유전체층 위에 형성되어 완전한 반도체 액티브 트랜지스터 구조를 형성한다.
Claims (21)
- 반도체 장치를 위한 게이트 구조의 제조 방법에 있어서,(a) 표면을 갖는 실리콘(111)의 기판을 제공하는 단계,(b) 상기 실리콘(111)의 표면 상에 결정 실리콘 질화물의 유전체 게이트 층을 형성하는 단계, 및(c) 상기 결정 실리콘 질화물의 유전체층 상에 게이트 전극층을 형성하는 단계를 포함하는 반도체 장치를 위한 게이트 구조의 제조 방법.
- 제1항에 있어서, 상기 표면을 클리닝하고 상기 표면을 원자적으로 평탄하게 하는 단계를 더 포함하는 반도체 장치를 위한 게이트 구조의 제조 방법.
- 제1항에 있어서, 상기 결정 실리콘 질화물의 유전체층을 형성하는 상기 단계가 약 850℃ 내지 약 1000℃의 온도에서 약 1x10-7 내지 약 1x10-5 Torr의 압력의 암모니아 분위기에 상기 표면을 위치시키는 단계를 포함하는 반도체 장치를 위한 게이트 구조의 제조 방법.
- 제2항에 있어서, 상기 결정 실리콘 질화물의 유전체층을 형성하는 상기 단계가 약 850℃ 내지 약 1000℃의 온도에서 약 1x10-7 내지 약 1x10-5 Torr의 압력의 암모니아 분위기에 상기 표면을 위치시키는 단계를 포함하는 반도체 장치를 위한 게이트 구조의 제조 방법.
- 제3항에 있어서, 상기 전극층은 붕소 도핑된 실리콘인 반도체 장치를 위한 게이트 구조의 제조 방법.
- 제4항에 있어서, 상기 전극층은 붕소 도핑된 실리콘인 반도체 장치를 위한 게이트 구조의 제조 방법.
- 반도체 장치에 있어서,(a) 실리콘(111) 표면,(b) 상기 표면 상의 결정 실리콘 질화물의 유전체층, 및(c) 상기 실리콘 질화물의 유전체층 상의 전극층을 포함하는 반도체 장치.
- 제7항에 있어서, 상기 표면이 클리닝되고 원자적으로 평탄한 반도체 장치.
- 제7항에 있어서, 상기 전극층이 붕소 도핑된 실리콘인 반도체 장치.
- 제8항에 있어서, 상기 전극층이 붕소 도핑된 실리콘인 반도체 장치.
- 반도체 장치를 제조하는 방법에 있어서,(a) 실리콘(111) 표면을 제공하는 단계,(b) 약 2 모노층(monolayers)의 두께를 갖는 결정 실리콘 질화물의 제1 유전체층을 상기 표면 상에 형성하는 단계,(c) 실리콘 질화물과 호환가능하고 실리콘 질화물보다 높은 유전율을 갖는 제2 유전체층을 상기 제1 유전체층 상에 형성하는 단계, 및(d) 상기 제2 유전체층 위에 전극층을 형성하는 단계를 포함하는 반도체 장치의 제조 방법.
- 제11항에 있어서, 상기 제2 유전체층과 상기 전극층간에 약 2 모노층의 두께를 갖는 실리콘 질화물의 제3 유전체층을 형성하는 단계를 더 포함하는 반도체 장치의 제조 방법.
- 제11항에 있어서, 상기 제2 유전체층은 탄탈륨 5산화물, 티타늄 2산화물 및 페로브스카이트(perovskite) 재료로 이루어진 클래스로부터 취해지는 반도체 장치의 제조 방법.
- 제12항에 있어서, 상기 제2 유전체층은 탄탈륨 5산화물, 티타늄 2산화물 및 페로브스카이트 재료로 이루어진 클래스로부터 취해지는 반도체 장치의 제조 방법.
- 제11항에 있어서, 상기 결정 실리콘 질화물의 제1 유전체층을 형성하는 상기 단계는 약 850℃ 내지 약 1000℃의 온도에서 약 1x10-7 내지 약 1x10-5 Torr의 압력의 암모니아 분위기에 상기 표면을 위치시키는 단계를 포함하는 반도체 장치의 제조 방법.
- 제14항에 있어서, 상기 결정 실리콘 질화물의 유전체층을 형성하는 상기 단계는 약 850℃ 내지 약 1000℃의 온도에서 약 1x10-7 내지 약 1x10-5 Torr의 압력의 암모니아 분위기에 상기 표면을 위치시키는 단계를 포함하는 반도체 장치의 제조 방법.
- 제16항에 있어서, 상기 전극층은 붕소 도핑된 실리콘인 반도체 장치의 제조 방법.
- 반도체 장치에 있어서,(a) 실리콘(111) 표면,(b) 약 2 모노층의 두께를 갖는 상기 표면 상의 결정 실리콘 질화물의 제1 유전체층,(c) 실리콘 질화물과 호환가능하고 실리콘 질화물보다 높은 유전율을 갖는 상기 제1 유전체층 상의 제2 유전체층, 및(d) 상기 제2 유전체층 위의 전극층을 포함하는 반도체 장치.
- 제18항에 있어서, 상기 제2 유전체층과 상기 전극층 간에 약 2 모노층의 두께를 갖는 실리콘 질화물의 제3 유전체층을 더 포함하는 반도체 장치.
- 제19항에 있어서, 상기 제2 유전체층은 탄탈륨 5산화물, 티타늄 2산화물 및 페로브스카이트 재료로 이루어진 클래스로부터 취해지는 반도체 장치.
- 제20항에 있어서, 상기 전극층이 붕소 도핑된 실리콘인 반도체 장치.
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CA2360312A1 (en) | 2000-10-30 | 2002-04-30 | National Research Council Of Canada | Novel gate dielectric |
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JP3792589B2 (ja) * | 2001-03-29 | 2006-07-05 | 富士通株式会社 | 半導体装置の製造方法 |
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JP4712292B2 (ja) * | 2003-09-02 | 2011-06-29 | 財団法人国際科学振興財団 | 半導体装置及びその製造方法 |
US20050054156A1 (en) * | 2003-09-10 | 2005-03-10 | International Business Machines Corporation | Capacitor and fabrication method using ultra-high vacuum cvd of silicon nitride |
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1999
- 1999-02-27 KR KR1019990006710A patent/KR100567299B1/ko not_active IP Right Cessation
- 1999-03-16 US US09/270,173 patent/US6277681B1/en not_active Expired - Lifetime
- 1999-03-19 JP JP7472899A patent/JP2000004018A/ja active Pending
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Publication number | Publication date |
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KR19990077506A (ko) | 1999-10-25 |
US6277681B1 (en) | 2001-08-21 |
JP2000004018A (ja) | 2000-01-07 |
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