KR100540314B1 - 광학 검사 모듈, 및 통합 처리 도구 내에서 기판 상의 입자 및 결함을 검출하기 위한 방법 - Google Patents

광학 검사 모듈, 및 통합 처리 도구 내에서 기판 상의 입자 및 결함을 검출하기 위한 방법 Download PDF

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KR100540314B1
KR100540314B1 KR1019997008951A KR19997008951A KR100540314B1 KR 100540314 B1 KR100540314 B1 KR 100540314B1 KR 1019997008951 A KR1019997008951 A KR 1019997008951A KR 19997008951 A KR19997008951 A KR 19997008951A KR 100540314 B1 KR100540314 B1 KR 100540314B1
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substrate
inspection
pixels
light beam
module
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KR20010005875A (ko
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키니패트릭디
라오나가라자피
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마이크로썸, 엘엘씨
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Image Processing (AREA)
KR1019997008951A 1997-03-31 1998-03-30 광학 검사 모듈, 및 통합 처리 도구 내에서 기판 상의 입자 및 결함을 검출하기 위한 방법 Expired - Fee Related KR100540314B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4220297P 1997-03-31 1997-03-31
US60/042,202 1997-03-31
PCT/US1998/006222 WO1998044330A2 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

Publications (2)

Publication Number Publication Date
KR20010005875A KR20010005875A (ko) 2001-01-15
KR100540314B1 true KR100540314B1 (ko) 2006-01-10

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KR1019997008951A Expired - Fee Related KR100540314B1 (ko) 1997-03-31 1998-03-30 광학 검사 모듈, 및 통합 처리 도구 내에서 기판 상의 입자 및 결함을 검출하기 위한 방법

Country Status (6)

Country Link
US (1) US5909276A (https=)
EP (1) EP1016126B1 (https=)
JP (1) JP4527205B2 (https=)
KR (1) KR100540314B1 (https=)
AU (1) AU6942998A (https=)
WO (1) WO1998044330A2 (https=)

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KR101020046B1 (ko) 2008-08-22 2011-03-09 주식회사 티엔텍 기판 표면 검사장치
KR101302710B1 (ko) * 2005-03-18 2013-09-03 덴마크스 텍니스케 유니버시테트 복수의 광 트랩을 사용하는 광 조작 시스템

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WO1998044330A3 (en) 1998-12-23
KR20010005875A (ko) 2001-01-15
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