KR100527085B1 - 프린지 필드 스위칭 액정표시장치의 제조방법 - Google Patents
프린지 필드 스위칭 액정표시장치의 제조방법 Download PDFInfo
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- KR100527085B1 KR100527085B1 KR10-2001-0030133A KR20010030133A KR100527085B1 KR 100527085 B1 KR100527085 B1 KR 100527085B1 KR 20010030133 A KR20010030133 A KR 20010030133A KR 100527085 B1 KR100527085 B1 KR 100527085B1
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- Prior art keywords
- metal layer
- region
- gate metal
- pixel electrode
- gate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134345—Subdivided pixels, e.g. for grey scale or redundancy
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134372—Electrodes characterised by their geometrical arrangement for fringe field switching [FFS] where the common electrode is not patterned
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
Abstract
Description
Claims (4)
- 두께가 상대적으로 큰 제1영역과 두께가 상대적으로 작은 제2영역으로 구분된 게이트 라인과, 화소전극부로 각각 정의된 기판을 제공하는 단계;상기 기판상의 제1영역과 제2영역 및 화소전극부에 화소전극층과 제1게이트 메탈층을 순차적으로 형성하는 단계;상기 제1영역과 화소전극부 상에 형성된 제1게이트 메탈층 상에 제1감광막 패턴을 형성하는 단계;상기 제1감광막 패턴을 마스크로 하여 상기 제1게이트 메탈층과 화소전극층을 일정 패턴으로 식각함과 동시에 상기 제2영역의 제1게이트 메탈층과 화소전극층을 식각하여 제거하는 단계;상기 제1영역과 제2영역 및 화소전극부에 제2게이트 메탈층을 형성하는 단계;상기 제1영역과 제2영역상에 형성된 제2게이트 메탈층 상에 제2감광막 패턴을 형성하는 단계; 및상기 제2감광막 패턴을 마스크로 하여 상기 제2게이트 메탈층을 선택적으로 식각함과 동시에 상기 화소전극부에 형성된 제2게이트 메탈층과 제1게이트 메탈층을 식각하여 제거하는 단계를 포함하는 것을 특징으로 하는 프린지 필드 스위칭 액정표시장치의 제조방법.
- 삭제
- 제 1 항에 있어서, 상기 제1게이트 메탈층은 MoW, Al, Mo, Cr 및 이들의 합금으로 구성된 그룹으로부터 선택된 어느 하나를 사용하여 형성하는 것을 특징으로 하는 프린지 필드 스위칭 액정표시장치의 제조방법.
- 제 1 항에 있어서, 상기 제2게이트 메탈층은 MoW, Al, Mo, Cr 및 이들의 합금으로 구성된 그룹으로부터 선택된 어느 하나를 사용하여 형성하는 것을 특징으로 하는 프린지 필드 스위칭 액정표시장치의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR10-2001-0030133A KR100527085B1 (ko) | 2001-05-30 | 2001-05-30 | 프린지 필드 스위칭 액정표시장치의 제조방법 |
Applications Claiming Priority (1)
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KR10-2001-0030133A KR100527085B1 (ko) | 2001-05-30 | 2001-05-30 | 프린지 필드 스위칭 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20020091456A KR20020091456A (ko) | 2002-12-06 |
KR100527085B1 true KR100527085B1 (ko) | 2005-11-09 |
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KR10-2001-0030133A KR100527085B1 (ko) | 2001-05-30 | 2001-05-30 | 프린지 필드 스위칭 액정표시장치의 제조방법 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100566612B1 (ko) | 2003-09-23 | 2006-03-31 | 엘지.필립스 엘시디 주식회사 | 다결정 실리콘 박막 트랜지스터 및 그 제조 방법 |
JP2013115097A (ja) * | 2011-11-25 | 2013-06-10 | Japan Display West Co Ltd | 半導体装置およびその製造方法ならびに表示装置および電子機器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR930013809A (ko) * | 1991-12-27 | 1993-07-22 | 김광호 | 액정표시장치의 제조방법 |
KR19980014881A (ko) * | 1996-08-17 | 1998-05-25 | 구자홍 | 액정 표시 소자 및 그의 제조 방법 |
KR19990074559A (ko) * | 1998-03-12 | 1999-10-05 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 |
KR20000031473A (ko) * | 1998-11-06 | 2000-06-05 | 구본준 | 액정표시장치 및 그 제조방법 |
KR20010001449U (ko) * | 1999-06-29 | 2001-01-15 | 김영환 | 액정 표시 장치 |
-
2001
- 2001-05-30 KR KR10-2001-0030133A patent/KR100527085B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR930013809A (ko) * | 1991-12-27 | 1993-07-22 | 김광호 | 액정표시장치의 제조방법 |
KR19980014881A (ko) * | 1996-08-17 | 1998-05-25 | 구자홍 | 액정 표시 소자 및 그의 제조 방법 |
KR19990074559A (ko) * | 1998-03-12 | 1999-10-05 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 |
KR20000031473A (ko) * | 1998-11-06 | 2000-06-05 | 구본준 | 액정표시장치 및 그 제조방법 |
KR20010001449U (ko) * | 1999-06-29 | 2001-01-15 | 김영환 | 액정 표시 장치 |
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KR20020091456A (ko) | 2002-12-06 |
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