KR100444655B1 - 반도체장치의결정성규소막의형성방법 - Google Patents
반도체장치의결정성규소막의형성방법 Download PDFInfo
- Publication number
- KR100444655B1 KR100444655B1 KR1019950047680A KR19950047680A KR100444655B1 KR 100444655 B1 KR100444655 B1 KR 100444655B1 KR 1019950047680 A KR1019950047680 A KR 1019950047680A KR 19950047680 A KR19950047680 A KR 19950047680A KR 100444655 B1 KR100444655 B1 KR 100444655B1
- Authority
- KR
- South Korea
- Prior art keywords
- film
- metal element
- surfactant
- forming
- crystalline silicon
- Prior art date
Links
Landscapes
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP94-331608 | 1994-12-09 | ||
JP33160894A JP3418647B2 (ja) | 1994-12-09 | 1994-12-09 | 半導体装置作製方法および結晶成長促進剤 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100444655B1 true KR100444655B1 (ko) | 2004-11-26 |
Family
ID=18245564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950047680A KR100444655B1 (ko) | 1994-12-09 | 1995-12-08 | 반도체장치의결정성규소막의형성방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3418647B2 (zh) |
KR (1) | KR100444655B1 (zh) |
CN (1) | CN1090813C (zh) |
TW (1) | TW285778B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0144643B1 (ko) * | 1994-12-28 | 1998-08-17 | 심상철 | 금속흡착법에 의한 다결정 규소박막의 제조방법 |
JPH10228248A (ja) | 1996-12-09 | 1998-08-25 | Semiconductor Energy Lab Co Ltd | アクティブマトリクス表示装置およびその作製方法 |
US6794229B2 (en) | 2000-04-28 | 2004-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device |
CN100337304C (zh) * | 2003-08-22 | 2007-09-12 | 友达光电股份有限公司 | 形成多晶硅层的方法 |
JP2007108785A (ja) * | 2006-12-25 | 2007-04-26 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
CN105632923B (zh) * | 2014-10-28 | 2018-11-16 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW226478B (en) * | 1992-12-04 | 1994-07-11 | Semiconductor Energy Res Co Ltd | Semiconductor device and method for manufacturing the same |
US5639698A (en) * | 1993-02-15 | 1997-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor, semiconductor device, and method for fabricating the same |
-
1994
- 1994-12-09 JP JP33160894A patent/JP3418647B2/ja not_active Expired - Fee Related
-
1995
- 1995-11-30 TW TW84112780A patent/TW285778B/zh not_active IP Right Cessation
- 1995-12-08 KR KR1019950047680A patent/KR100444655B1/ko not_active IP Right Cessation
- 1995-12-09 CN CN95121314A patent/CN1090813C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1132409A (zh) | 1996-10-02 |
CN1090813C (zh) | 2002-09-11 |
TW285778B (zh) | 1996-09-11 |
JPH08167572A (ja) | 1996-06-25 |
JP3418647B2 (ja) | 2003-06-23 |
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