KR100430336B1 - Apparatus for manufacturing organic electro-luminescent light emitting devices for mass production - Google Patents

Abstract

The present invention relates to a manufacturing apparatus for an organic electroluminescent device, and more particularly, to a manufacturing apparatus for manufacturing an organic electroluminescent device including one or more thin films, wherein a plurality of openings 110 are formed for installing a process chamber. A substrate transfer chamber 100 in which the pump port 120 is installed; Substrate transfer means is installed in the substrate transfer chamber 100, the substrate transfer means for moving the substrates that have completed the process in each of the plurality of openings 110 to the next opening 110 in the substrate transfer chamber 100 200; It consists of a plurality of chambers 300 attached to the opening 110 of the substrate transfer chamber 100, to transfer the substrates in the substrate transfer chamber, substrate cleaning, mask alignment (align) and cleaning in several chambers at the same time And a corresponding process such as vapor deposition.

Description

Apparatus for manufacturing organic electro-luminescent light emitting devices for mass production}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing apparatus for manufacturing an organic electroluminescent light emitting device for mass production, wherein a substrate or an assembly in which a substrate and a mask are integrated in a substrate transfer chamber is transferred, and various processes are performed. The present invention relates to an apparatus for manufacturing a multilayer thin film of an organic light emitting diode for mass production, which can simultaneously perform processes such as substrate loading, substrate cleaning, mask alignment and cleaning, deposition, and unloading in a chamber.

In general, when fabricating a semiconductor device or a light emitting device, many steps of the manufacturing process are required. In order to perform these various stages of manufacturing process, the chambers are usually configured for separate processes, and substrates are transferred between the chambers to perform various processes.

In the conventional case, the chambers are arranged to form a circle, the magnetic bar (Magnetic Bar) is installed in the chamber at the center side, or the transfer of the substrate using a robot arm (Robot Arm) is made. That is, after the process is performed in one chamber, it is taken out, transferred to another chamber to perform the process, and the process is repeated to manufacture the device.

However, as described above, when the substrate is transferred using the magnetic bar, the length of the magnetic bar is limited, and only the transfer between the two chambers is possible, making it difficult to perform a continuous process through several vacuum chambers. have.

In addition, the robot arm can be used mainly when processing a small substrate, if you want to apply to a large substrate requires a separate transfer means.

In the case of transferring the substrate in a vacuum state using such a robot arm, the substrate cannot be fixed by a method such as vacuum adsorption, so that the robot arm is placed using only its weight. As the position is shaken, there is a problem that it is not easy to position the correct position in the next step of mask alignment and vacuum deposition.

Therefore, in the case of transferring the substrate using the robot arm as described above, it is inevitable to use the reduced acceleration in the process of transferring the substrate, in this case there is a disadvantage that the transfer time of the substrate increases.

In addition, as the size of the substrate increases, the transfer time increases not only, but also the size of the transfer chamber located in the middle also increases proportionally, thus increasing the transfer path of the substrate, and thus, the burden on the vacuum pump. Will increase.

Most of all, the transfer system using the robotic arm transfers the substrate in one chamber to another chamber, and then transfers the substrate back to the empty chamber so that the transfer system is placed twice. In addition to the transfer of the substrate, there is a problem that the same two transfer operations are required in each chamber.

In addition, when the deposition source is exhausted during the deposition process, the process must be stopped and the vacuum state is made at atmospheric pressure and then supplied to a new deposition source. In this case, the manufacturing time of the thin film was very long.

On the other hand, when a multi-layer thin film process by installing a plurality of deposition cells in one chamber, there is a possibility of contamination between the manufacturing process of each thin film, an apparatus for preventing this is required. In particular, in the case of an organic thin film, the necessity becomes large.

The present invention is to solve the above drawbacks, in order to form organic and inorganic multilayer thin films on the substrate, in order to manufacture the organic and inorganic multilayer thin film, by efficiently transporting the substrate, it is possible to shorten the manufacturing time, mutual An object of the present invention is to provide an apparatus for manufacturing an organic light emitting device for mass production, which can effectively grow a thin film on a substrate without contamination.

Another object of the present invention is to provide a rotary deposition cell exchange apparatus capable of exchanging deposition cells without breaking the vacuum of the deposition chamber in the production apparatus of the organic electroluminescent device for mass production of the present invention.

The present invention includes a substrate transfer chamber in which a plurality of openings are formed and a pump port is installed so that chambers for loading, substrate cleaning, mask alignment, unloading and a plurality of deposition processes can be installed; A substrate transfer means installed in the substrate transfer chamber to move the substrates which have been finished in the plurality of openings to the next opening in the substrate transfer chamber; A plurality of chambers attached to an opening of the substrate transfer chamber is achieved.

1 illustrates an embodiment of a manufacturing apparatus of an organic electroluminescent device for mass production of the present invention.

Exploded perspective indicating,

Figure 2 is an embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Front section showing,

Figure 3 is an embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Side cross section showing,

Figure 4 is a single constituting the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Perspective view showing a structure,

5 is a cross-sectional view showing a state in which the unitary structure of FIG. 4 is connected;

Figure 6 is a substrate transfer means of the production apparatus of the organic electroluminescent device for mass production of the present invention

A schematic representation of one embodiment,

7 is a schematic view seen from the a direction of FIG. 6,

8 is another embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Floor plan indicating,

9 is another embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Side view,

10 is another of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

An exploded perspective view showing an example,

11 is another of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Bottom view showing an embodiment,

12 is yet another embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention

Cross section showing an embodiment,

13 is used in the production apparatus of the organic electroluminescent device for mass production of the present invention

Cross-sectional view showing a rotary deposition cell exchange device,

14 is used in the production apparatus of the organic electroluminescent device for mass production of the present invention

A perspective view showing the inner surface of a rotary deposition cell exchange device.

<Explanation of symbols for the main parts of the drawings>

100: substrate transfer chamber 110: opening

120: pump port 150: single structure

160: Shanghai Song Chamber 170: mask replacement chamber

200: substrate transfer means 210: rail

230: substrate holder 240: cover valve

300: chamber 310: loading chamber

320: unloading chamber 330: process chamber

400: rotary deposition cell exchange device 410: upper chamber

420: lower chamber

An embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is an exploded perspective view showing an embodiment of a production apparatus of the organic electroluminescent device for mass production of the present invention, Figure 2 is a front sectional view showing an embodiment of the manufacturing apparatus of the organic electroluminescent device for mass production of the present invention, Figure 3 is a side cross-sectional view showing an embodiment of the production apparatus of the organic electroluminescent device for mass production of the present invention, the present invention is a plurality of openings 110 for the process chamber installation, the pump port 120 is A substrate transfer chamber 100 installed; Substrate transfer means is installed in the substrate transfer chamber 100, the substrate transfer means for moving the substrates that have completed the process in each of the plurality of openings 110 to the next opening 110 in the substrate transfer chamber 100 200; Technical features of the present invention include a plurality of chambers 300 attached to the opening 110 of the substrate transfer chamber 100.

The substrate transfer chamber 100 is formed in a long cylindrical shape, and a plurality of openings 110 are provided so that chambers for performing substrate cleaning, mask injection and alignment, deposition, loading, and unloading may be installed. The cover 130 may be formed for the convenience of mounting the substrate transfer means 200.

The plurality of chambers 300 is generally composed of a loading chamber 310, a process chamber 330 and an unloading chamber 320 for deposition and other processes, the loading chamber 310 is a substrate transfer chamber 100 It is installed in the opening 111 formed at one end of the), and has a pump port 311 and the door 312.

The unloading chamber 320 is installed at the other end opening 112 of the substrate transfer chamber 100 and has a pump port 321 and a door 322. Between the two chambers, a plurality of process chambers 330 are installed in the opening 110 of the substrate transfer chamber 100, and each has a pump port 331 and a deposition cell port 332.

The process chamber 330 is installed in the opening 110 of the substrate transfer chamber 100 to perform substrate cleaning, mask injection and alignment, deposition, and the like. A plurality of depositions having a substrate cleaning chamber, a mask alignment chamber having a pump port and a door, and an opening of the substrate transfer chamber, each having a pump port and a deposition cell port. It consists of a chamber.

An inlet 330a is formed at the upper part to perform various processes on the substrate, and a deposition cell port 332 is formed at the bottom of the substrate cleaning device, a mask aligning device, and a deposition cell in the deposition process. The rear end is provided with a pump port 331 in which a vacuum pump is installed.

The number of the openings 110 and the process chambers 330 formed in the substrate transfer chamber 100 may be increased or decreased depending on the fabricated device, but the organic electroluminescent device may be, for example, about 20 units. This leads to. Therefore, when the number increases as described above, since the length of the substrate transfer chamber 100 becomes long, it may be convenient to use not only the straight shape but also the donut shape or the U shape to make the space useful. have.

In addition, the substrate transfer means 200 and the rail (210); A moving body 220 moving in one direction on the rail 210; The substrate holder 230 is attached to the movable body 220 to fix the substrate, and the substrate is attached to the moving means of the conveyor belt system so that the substrate is attached and transported.

The movable body 220 is used to move continuously on each process chamber 330 after each process using a plurality of, the movable body 220 attached to the substrate after all the deposition process is stacked on one side in turn or It may also be possible to recover (not shown).

In addition, in some cases, the cover valve 240 may be further configured to seal the opening 110 of the substrate transfer chamber 100, and the substrate holder 230 may be lowered to each process chamber 330. The opening 110 in the lower portion of the transfer chamber 100 is sealed through the sealing means 10.

As the sealing means 10, it is preferable to use an O-ring generally used.

As described above, by separating the substrate transfer chamber 100 and the process chamber 330 during deposition, it is possible to prevent contamination by the gas evaporated in the process chamber 330, it is possible to maintain a high degree of vacuum.

As another example of the substrate transfer means 200, the same operation effect can be obtained by attaching a pair of chains and a plurality of the substrate holders at regular intervals to the chains (not shown).

As described above, the substrate transfer chamber 100 and the plurality of chambers 300 may be formed by attaching the plurality of chambers 300 to the substrate transfer chamber 100, but may have the same structure as described above with reference to FIGS. 4 and 5. As shown in FIG. 2, the structure illustrated in FIG. 2 may be formed as a whole by repeatedly joining a single structure 150 in which one chamber and a substrate transfer chamber are integrated.

That is, after the one chamber and a portion of the substrate transfer chamber are repeatedly bonded to each other by repeatedly joining the single structure 150 formed integrally as the upper portion 151 and the lower portion 152, respectively, the adjacent single structure 150 is adjacent to each other. The upper portion 151 of the) is connected to the open connection portion 151a so that the substrate transfer chamber 100 is formed so that the substrate transfer means 200 is located, and the lower portion of the single structure 150 adjacent to each other. 152 is formed by being separated from each other by a wall to form a chamber 300 to perform the role of deposition, loading and unloading.

In addition, as shown in FIG. 6, the unitary structure 150 may be configured such that the upper portion 151 and the lower portion 152 are not continuous but are separated and combined.

6 shows a substrate transfer means 200 having a two-layer structure. FIG. 7 is a schematic view seen from the direction a of FIG. 6, wherein the substrate transfer means 200 has a two-layer structure on the upper portion 151 of the unitary structure 150, and an upper rail 211 and a lower rail 212. Rail 210 is composed of, and the movable body 220 is moved on the rail (210).

In this embodiment, in the lower rail 212, the movable body 220 moves in one direction, and the deposition is performed in a chamber in which the single structure 150 is continuously formed, and reaches the end thereof so that a series of processes are performed. When finished, it is transferred to the upper rail 211 in a separate chamber, so that the movable body 220 is returned in the opposite direction.

In addition, as illustrated in FIG. 7, the substrate 221 and the mask 222 for deposition are integrally attached to the movable body 220 to be deposited while moving together with the movable body 220. The mask 222 may be replaced in a separate chamber according to each process, of course.

On the other hand, in the fabrication of organic electroluminescent devices in the form of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electrode, the process pressure for producing each organic thin film is the same, so that each unit process chamber is valved. There is no need to isolate using. Therefore, instead of using the cover valve 240 and the sealing means 10 as in the embodiment between the upper portion 151 and the lower portion 152, as shown in Figure 7, dustproof to form an uneven structure By forming a baffle 153, the particles generated at the rail 210, the moving body 220, and the inner wall of the unitary structure 150 are directed toward the substrate 221 and the mask 222 where the deposition process is performed. It is desirable to prevent the movement of the actual particles by complicating the path of movement (see arrows in FIG. 7).

On the other hand, as described above, the moving body 220 is transferred to the upper rail 211 and recovered, or the configuration for forming the process of replacing the mask 222 in a separate chamber is shown in Figures 8 and 9 As described above, this may be accomplished by configuring the shanghai song chamber 160 and the mask exchange chamber 170.

That is, the shanghai song chamber 160 is composed of a shanghai song panel 161 that can be transferred in the vertical direction, and an exchange rail 213 configured to have a predetermined height difference perpendicular to the rails 210: 211 and 212. The exchange rail 213 is connected to the mask exchange chamber 170.

The mask exchanging chamber 170 is configured on both sides of the shanghai song chamber 160 (ie, perpendicular to the line direction) with respect to the direction of the line formed by the unitary structure 150, and is already used on one side. Position the mask 222 and the new mask 222 on the other side.

FIG. 10 is an exploded perspective view showing still another embodiment of an apparatus for manufacturing an organic electroluminescent device for mass production of the present invention, and FIG. 11 is a bottom view showing another embodiment of an apparatus for manufacturing an organic electroluminescent device for mass production of the present invention. 12 is a cross-sectional view showing still another embodiment of the apparatus for manufacturing an organic electroluminescent device for mass production according to the present invention. In this embodiment, a pump port is installed at one side of the substrate transfer chamber 100, and is cylindrical or polygonal. It is formed in a tubular shape, so that a plurality of openings 110 on the lower side to be formed at the same distance from the center of the tube is characterized by the technical features.

In addition, in the present embodiment, the substrate transfer means 200 includes a central axis 250 installed at the center of the cylindrical or polygonal cylindrical substrate transfer chamber 100; The substrate holder 230 is branched from the central axis 250 to the rod 260. The substrate holder 230 is preferably rotated along the central axis 250 to transfer the substrate.

In this case, the cover 140 may be formed in the substrate transfer chamber 100. In this case, the main cover part 141 may be formed so that the central axis 250 may be positioned.

Thus, when the deposition process is completed, the central axis 250 may be rotated at an appropriate angle by using a rotating device (not shown), so that the deposition process may occur on the substrate in the next process chamber 330. .

When mass-producing a substrate of a multi-layer thin film, the deposition source of the deposition cell is depleted and there is a time to replace it. 13 and 14 illustrate a rotary deposition cell exchange device 400 capable of continuously injecting a deposition cell A without breaking the vacuum of the process chamber 330 in the apparatus for manufacturing an organic electroluminescent device for mass production of the present invention. It is shown.

The rotary deposition cell exchange apparatus 400 includes an upper chamber 410 having a connection port 411 and a pump port 412 connected to the deposition cell port 332 of the process chamber 330; A lower chamber 420 rotatably coupled to the upper chamber 410 and having a plurality of deposition cells A disposed thereon; The lower chamber 420 is rotated to rotate the lower chamber 420 so that the deposition cell A can be efficiently removed without breaking the vacuum of each chamber 300 when the deposition source is exhausted during each deposition operation. Can be exchanged.

As shown in FIG. 14, a plurality of deposition cells A are disposed on the lower chamber 420 along the circumference of the lower chamber 420, and thus, until all the deposition cells A are exhausted. The process can be carried out without.

Hereinafter, the operation and effects of the present invention will be described in detail with reference to FIGS. 1 to 14.

In the loading chamber 310, a substrate to be a thin film process is attached to the substrate holder 230. The substrate attached to the substrate holder 230 is transferred to the next process chamber 330 so that the assembly of the substrate and the mask is moved together after the substrate cleaning and mask alignment process to form thin films by various deposition processes. At the same time, the next substrate to be thin filmed in the loading chamber 310 is attached to the substrate holder 230.

At this time, the loading chamber 310 is separated from the substrate transfer chamber 100 which is a vacuum by the cover valve 240 or an additional valve to expose only the loading chamber to the atmosphere without breaking the vacuum of the substrate transfer chamber 100. To be able.

The unloading chamber 320 is also blocked by the substrate transfer chamber 100 and the valve in the same manner, and then the unloaded substrate is unloaded without breaking the vacuum of the substrate transfer chamber 100 and the process chamber 330. May be taken out of chamber 320.

In this way, loading, unloading and multiple deposition processes can be performed simultaneously, enabling mass production of multilayer thin film substrates and shortening manufacturing times.

On the other hand, the manufacturing process of the organic electroluminescent device formed in the form of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electrode are as follows.

Fabrication of organic electroluminescent devices includes cleaning substrates, UV-zone or plasma treatment, alignment of masks for substrates and organic thin films, hole injection layers, hole transport layers, light emitting layers, thin film fabrication of electron transport layers, alignment of substrates and electrodes masks. And a thin film process, such as an electrode, and the sealing process which protects the produced element from moisture and oxygen.

UV-zone or plasma treatment of the cleaned substrate is performed under a different pressure from the organic thin film manufacturing process, so that a separate valve is installed. The part of aligning the mask with the substrate is in a separate area from the part where the deposition is made.

The aligned substrate and mask produce a thin film using organic materials evaporated from the evaporation source. In the case of using a single crucible, the substrate is rotated to improve the uniformity of the thin film. Alternatively, a thin film is produced by linearly scanning a linear evaporation source. Subsequently, the manufacturing process of the organic thin film is repeated in the same process.

After the manufacturing process of the organic thin film as described above, the organic thin film mask is removed, the electrode mask is aligned with the substrate and then transferred to the electrode manufacturing process.

In the electrode manufacturing process, electrode materials such as metal and transparent electrodes are manufactured using methods such as vacuum deposition and sputtering.

When the electrode fabrication is completed, it is transferred to the protective layer fabrication process, where the organic thin film, the oxide thin film, the nitride thin film, or a combination thereof, which can protect the device from deterioration sources such as moisture and oxygen, is formed to form a multilayer structure.

The above process is carried out simultaneously to a plurality of substrates 221 in the production apparatus of the organic electroluminescent device for mass production of the present invention, it is also carried out by being transferred to each chamber 300 by the substrate transfer means 200. .

When the fabrication process of the organic electroluminescent device is applied to fabrication of a multicolored or natural color device, organic thin films such as mask alignment, hole injection layer, hole transport layer, light emitting layer, and electron transport layer are disposed in accordance with each color after processing of the substrate. It is achieved by repeating the process.

In the case of manufacturing the organic electroluminescent device as described above, the process pressure for producing each organic thin film is the same, so it is not necessary to isolate each unit process chamber using a valve, and the length of the entire equipment is excessive. As illustrated in FIGS. 6 to 9, the rail 210 and the shank of the two-layer structure can be continuously connected to the single structure 150 having the same shape and the mobile body 220 can be recovered. It is preferable to configure the mask exchange chamber 170 so as to configure the delivery chamber 160 and to position the mask 222 discharged after each deposition process to the initial position.

In the above configuration, the order of the deposition process is as follows.

That is, the substrate 221 and the mask 222 are attached to the moving body 220 of the substrate transfer means 200 of the present invention, each chamber 300 is moved and the respective deposition processes are performed.

Then, when one unit process is completed, the movable body 220 to which the substrate 221 and the mask 222 are attached reaches the shanghai transport chamber 160.

At this time, one side (upper side of Fig. 8) mask exchange chamber 170 of the shanghai transport chamber 160 is located in the mask 222 of the other type required for the next process, the movable body 220 is the shanghai transport chamber The exchange rail 213 is mounted through the 160 to be positioned as the mask exchange chamber 170 on the other side (lower side of FIG. 8 for convenience) to separate the mask 222 used in the previous process.

Thereafter, the movable body 220 is moved to the one side mask exchange chamber 170 through the exchange rail 213, and then attaches the mask 222 of the other type, and then through the exchange rail 213 again. After being located in the song chamber 160, the next deposition process is to be entered.

When the above deposition process is completed, the movable body 220 and the mask 222 are recovered in the reverse order.

That is, the movable body 220 is moved to the upper rail 211 from the shanghai copper panel 161 of the shanghai transport chamber 160, and is recovered in the opposite direction to the deposition progress through the upper rail 211.

At this time, the mask 222 attached to the movable body 220 is recovered to the original position, that is, the reverse order of the mask replacement.

First, the mask 222, which is positioned and used as the mask exchange chamber 170 on the other side (lower side in FIG. 8), is separated, and then moved to the mask exchange chamber 170 on one side (upper side in FIG. 8), and is deposited first. After attaching the mask 222 separated in the process, it is moved to the original position, and the process is repeated as many times as the number of the masks 222.

10 to 12, the basic functions of the loading chamber 310, the unloading chamber 320 and the process chamber 330 are the same as in the above embodiment, and the number of process chambers 330 is Adjustable

In this embodiment, in particular, the shape of the thin film manufacturing apparatus is simple, and the pump port is attached to the rear end of the process chamber 330, which is the inside of the equipment, it is possible to reduce the installation space.

The rotary deposition cell exchange apparatus 400 executes a deposition process to a corresponding deposition cell using a lower chamber 420 on which a plurality of deposition cells A are placed, and when the deposition source is exhausted, the lower chamber 420 is fixed. Rotate the angle.

Then, a new deposition cell A is positioned at the connection port 411, and the deposition process can be continued using the new deposition cell A. FIG.

At this time, the upper chamber 410 and the lower chamber 420, as described above, can be rotated with each other, between them is sealed with an O-ring (O-ring). That is, it is possible to exchange the deposition cells without affecting the vacuum and the deposition process of the process chamber 330.

As described above, the present invention can continuously transfer substrates to respective process chambers in a vacuum, and simultaneously execute loading, substrate cleaning, mask injection and alignment, unloading, and multiple deposition processes to mass-produce substrates of multilayer thin films. It is effective.

Each deposition chamber is provided with a deposition cell containing a different type of deposition source to perform a deposition process, thereby manufacturing a substrate of a multilayer thin film that is not contaminated with each other.

By using the rotary deposition cell exchange device described above, deposition cells can be exchanged without breaking the vacuum of the deposition chamber, thereby reducing the production time.

Claims (14)

A linear substrate transfer chamber in which a plurality of openings are formed and a pump port is installed so that chambers for loading, substrate cleaning, mask alignment, unloading and a plurality of deposition processes can be installed; It is installed in the substrate transfer chamber to move the substrates that have completed each process in one of the plurality of openings to the next opening in the assembly state in which the substrate or the substrate and the mask are integrated in the substrate transfer chamber. A substrate transfer means comprising a rail having a two-layer structure of an upper rail and a lower rail, and a moving body moving on the rail and having a substrate and a mask attached to the lower side thereof; It comprises a plurality of chambers attached to the opening of the substrate transfer chamber, An assembly in which the substrate or the substrate and the mask are integrally attached to the substrate transfer means is transferred to the respective openings integrally in the substrate transfer chamber, and the substrate or the substrate and the mask are integrated in each chamber connected to the openings. In the state in which the assembly is attached, the movable body moves in any one of the upper rail and the lower rail to perform the process, the mass production organic field characterized in that the movable body is returned through the other rail Device for manufacturing a light emitting device. delete delete delete delete delete delete delete The method of claim 1, Production of multilayer thin film of organic electroluminescent device for mass production between the substrate transfer chamber and the deposition chamber is provided with a dustproof device having an uneven structure to prevent particle generation due to friction of the moving rail while only the deposition surface is exposed to the deposition chamber. Device. The organic electroluminescent device for mass production according to claim 1, wherein a shanghai song chamber is further provided with a shanghai song panel for transferring the moving body in the vertical direction between the process chambers which are combined to form a series of unit processes. Production equipment. delete A linear substrate transfer chamber in which a plurality of openings are formed and a pump port is installed so that chambers for loading, substrate cleaning, mask alignment, unloading and a plurality of deposition processes can be installed; A substrate installed inside the substrate transfer chamber to move the substrates after each process in one of the plurality of openings to the next opening in the substrate transfer chamber in an assembly state in which the substrate or the substrate is integrated with the mask; Transfer means; A plurality of chambers attached to the opening of the substrate transfer chamber; It is installed between the substrate transfer chamber and the plurality of chambers, and is composed of a dustproof device forming a concave-convex structure that can prevent the generation of particles by friction of the substrate transfer means while exposing only the deposition surface to the chamber during the deposition process, An assembly in which the substrate or the substrate and the mask are integrally attached to the substrate transfer means is transferred to the respective openings integrally in the substrate transfer chamber, and the substrate or the substrate and the mask are integrated in each chamber connected to the openings. Apparatus for manufacturing a mass-produced organic electroluminescent device, characterized in that to perform the process with the assembly attached. A linear substrate transfer chamber in which a plurality of openings are formed and a pump port is installed so that chambers for loading, substrate cleaning, mask alignment, unloading and a plurality of deposition processes can be installed; A substrate installed inside the substrate transfer chamber to move the substrates after each process in one of the plurality of openings to the next opening in the substrate transfer chamber in an assembly state in which the substrate or the substrate is integrated with the mask; Transfer means; A plurality of chambers attached to the opening of the substrate transfer chamber; It is installed between the chambers to be combined by making a series of unit processes, consisting of a shanghai conveying chamber is provided with a shanghai conveying panel for transporting the moving body for transporting the substrate of the substrate transfer means in the vertical direction, An assembly in which the substrate or the substrate and the mask are integrally attached to the substrate transfer means is transferred to the respective openings integrally in the substrate transfer chamber, and the substrate or the substrate and the mask are integrated in each chamber connected to the openings. Apparatus for manufacturing a mass-produced organic electroluminescent device, characterized in that to perform the process with the assembly attached. According to claim 10 or 13, On both sides of the shanghai Song Chamber, A mask exchange chamber for separating and storing a mask in which a mask is positioned or previously attached to the movable body; A mask cleaning chamber for cleaning a mask after a predetermined deposition process; And an exchange rail configured to connect the shanghai song chamber and the mask exchange tamper.