JP2005510015A - Manufacturing equipment for mass production of organic electroluminescent light emitting devices - Google Patents

Abstract

  The present invention relates to an apparatus for manufacturing an organic electroluminescent device, and more particularly to an apparatus for manufacturing an organic electroluminescent device having a thin film of at least one layer. The organic electroluminescence device manufacturing apparatus according to the present invention includes a substrate transport chain bar 100 in which a plurality of openings 110 for mounting a process chain bar are formed and a pump port is mounted, and the substrate transport chain bar 100. The substrate transfer means 200 for transferring the substrate processed in the plurality of openings to the next opening in the substrate transfer chain bar 100, and the plurality of chain bars 300 attached to the openings 110 of the substrate transfer chain bar 100, respectively. Consists of. Accordingly, the substrate is transported in the substrate transport chain bar, and each process such as substrate cleaning, mask alignment and cleaning, and vapor deposition can be performed simultaneously in the plurality of chain bars.

Description

  The present invention relates to a manufacturing apparatus for mass production of an organic electroluminescence light emitting device, and more particularly, a substrate or a substrate assembly and a mask integrated with each other are transferred into a substrate transfer chain bar, and the substrate is loaded and cleaned, mask alignment. The present invention relates to an apparatus for producing a multilayer thin film of an organic electroluminescence light-emitting device, in which steps of vapor deposition and substrate extraction are simultaneously performed in several process chains.

  When manufacturing a semiconductor device or a light emitting device, a process consisting of many manufacturing steps is generally required. In order to perform a multi-stage manufacturing process, a chain bar for each process is usually configured, and the substrate is transported to the chain bar and goes through various different processes.

  Up to now, the chain bars are arranged in a ring shape, and a substrate is transferred to each chain bar by providing a bar magnet in the center of the chain bar or using a robot arm. That is, a specific process is performed on each substrate in one chain bar, and thereafter, the substrate is transferred from the chain bar to another chain bar, and another process is performed in the other chain bar. The device was manufactured by repeating these steps.

  However, when the substrate is transported by using the bar magnet as described above, the length of the bar magnet is limited, and the substrate can be transported only between two chain bars. Therefore, there is a problem that it is difficult to perform a continuous process through a plurality of vacuum chains.

  Furthermore, the robot arm is generally used when processing a small substrate. For this reason, when the robot arm is used for a large substrate, a further transfer means is required.

  Further, when a substrate is transferred using a robot arm in a vacuum state, the robot arm cannot hold the substrate using a means such as a vacuum lift. Accordingly, the substrates are arranged on the robot arm only by their own weight, and their positions are shifted when the acceleration of the operation of the robot arm increases. Therefore, there is a problem that it is not easy to keep the substrate in the correct position in the next mask alignment and vacuum deposition process.

  Therefore, when a substrate is transported using such a robot arm, the robot arm must be used while reducing its operating acceleration while transporting the substrate. As a result, there is another problem that the transfer time required to transfer the substrate increases.

  Furthermore, as the size of the substrate increases, the transfer time further increases, and the size of the transfer chain bar arranged in the center of the transfer system also increases. Therefore, the substrate transport path becomes longer, and the burden on the vacuum pump increases.

  Further, in such a transfer system using a robot arm, a substrate placed in one chain bar is transferred into another chain bar, and then transferred and installed in another empty chain bar. Must be configured. Therefore, in order to complete the transport operation, the substrate must be transported twice, and the two transport operations must be similarly performed in each chain bar.

  Also, if the vapor deposition source runs out during the vapor deposition process, the process must be terminated and the vacuum state in the chain bar must be changed to an atmospheric pressure state. Thereafter, a new deposition source must be supplied. Such a case is disadvantageous in that it takes a lot of time to manufacture the thin film.

  On the other hand, when a multilayer thin film manufacturing process is performed in one chain bar in which a plurality of vapor deposition cells are arranged, there is a risk of contamination of each layer of the thin film during the layer manufacturing process. Therefore, there is a need for additional equipment that prevents contamination. In particular, for organic thin films, there is a great need for such devices.

  The present invention is intended to solve the above problems. The purpose of the present invention is to reduce the manufacturing time by efficiently transporting the substrate when forming an organic or inorganic multilayer thin film and manufacturing the organic electroluminescent device on the substrate, and contaminating the thin film with each other. An object of the present invention is to provide a manufacturing apparatus for mass production of an organic electroluminescence device, which can be efficiently grown on a substrate without performing the above process.

  Another object of the present invention is to provide a rotary evaporation cell exchange apparatus capable of exchanging an evaporation cell without breaking a vacuum state in an evaporation chain of a manufacturing apparatus for mass production of an organic electroluminescence device. Is to provide.

  In order to achieve the above object of the present invention, a plurality of openings are formed and a pump port is attached to a chain bar for performing substrate loading, substrate cleaning, mask alignment, substrate removal, and a plurality of vapor deposition processes. A substrate transport chain attached to the substrate transport chain bar, a substrate transport means mounted on the substrate transport chain bar and transporting a substrate processed in a plurality of openings to the next opening in the substrate transport chain bar, and a substrate transport chain A manufacturing apparatus for mass production of an organic electroluminescence device is provided, which includes a plurality of chain bars each attached to an opening of a bar.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is an exploded perspective view of a manufacturing apparatus for mass production of an organic electroluminescence device according to a preferred embodiment of the present invention, and FIG. 2 is a production for mass production of an organic electroluminescence device according to a preferred embodiment of the present invention. FIG. 3 is a sectional side view of an apparatus for mass production of an organic electroluminescence device according to a preferred embodiment of the present invention. As shown in these drawings, the present invention includes a substrate transport chain bar 100 in which a plurality of openings 110 for mounting a process chain bar are formed and a pump port 120 is mounted, and the substrate transport chain bar 100. The substrate transport means 200 for transporting the substrate that has undergone each step through one of the plurality of openings 110 to the next opening 110 in the substrate transport chain 100 and the opening of the substrate chain bar 100 are respectively attached. The plurality of chain bars 300 are provided.

  The substrate transfer chain bar 100 is formed in the shape of an elongated box, and a plurality of openings 110 to which a chain bar for performing processes such as substrate cleaning, mask mounting and mask alignment, vapor deposition, substrate loading, and substrate removal can be mounted. Formed with. Further, the lid 130 is attached to the substrate transfer chain bar 100, and the substrate transfer means 200 can be easily attached thereto.

  The plurality of chain bars 300 as a whole include an input chain bar 310, a process chain bar 330 for vapor deposition and other processes, and an extraction chain bar 320. The input chain bar 310 is attached to the opening 111 at one end in the longitudinal direction of the substrate transport chain bar 100, and includes a pump port 311 and a door 312.

  The take-out chain bar 320 is attached to the opening 112 formed at the other end in the longitudinal direction of the substrate transport chain bar 100, and includes a pump port 321 and a door 322. The plurality of process chains 330 are located between the input chain and the extraction chain bar, and are attached to the opening 110 of the substrate transfer chain bar 100, and each process chain includes a pump port 331 and a deposition cell port 332.

  The process chain bar 330 is attached to the opening 110 of the substrate transfer chain bar 100, and processes such as substrate cleaning, mask attachment, mask alignment, and vapor deposition are performed. Depending on the function, the process chain bar is attached to the substrate cleaning chain bar with the pump port and door, or the mask alignment chain bar with the pump port and door attached to the opening of the substrate transfer chain bar. Are categorized into a plurality of deposition chains having a pump port and a deposition cell port.

  Each process chamber has an insertion port 330a at the top, a deposition port 332 for attaching a substrate cleaning device, a mask alignment device, or a deposition cell for deposition processing, and a vacuum pump pump port 331. Is configured to be attached to the rear end.

  The number of openings 110 and process chain bars 330 provided on the substrate transfer chain bar 100 varies depending on the number of devices to be manufactured. For example, in the case of an organic electroluminescent device, the number of openings and chain bars each reach about 20. Thus, when the number of openings and chain bars is large, the length of the substrate transport chain bar 100 becomes long. Therefore, from the viewpoint of effective use of space, the substrate transport chain bar is preferably a straight line, a donut, or a U-shape.

  Further, the substrate transport means 200 includes a rail 210, a moving unit 220 that moves in one direction on the rail 210, and a substrate holder 230 that is attached to the moving unit and holds the substrate. In such a case, the substrate is preferably transported while being attached to a conveyor belt type moving means.

  After each process is completed in the chain bar, the plurality of moving units 220 are continuously moved along the process chain bars 330. The moving unit 220 to which the completed substrate is attached is sequentially accumulated or collected in one of the substrate transport chain bars (not shown).

  In some cases, each moving unit 220 further includes a cover valve 240 for closing the opening 110 of the substrate transport chain bar 100, and the substrate transport chain bar 100 is lowered when the substrate holder 230 is lowered to the process chain bar 330. The opening 110 at the bottom of the cover may be closed with a cover valve via the sealing means 10.

It is preferable to use a generally used O-ring as the sealing means.
As described above, since the substrate transfer chain 100 is separated from the process chain 330 during the deposition of the substrate, it is possible to prevent contamination by evaporating gas from the process chain and maintain a high degree of vacuum.

  As another example, the substrate transport means 200 may include a pair of chains and a plurality of substrate holders attached to the chains at a predetermined interval, and as a result, an equivalent advantageous effect can be obtained. (Not shown).

  As described above, the substrate transport chain bar 100 and the plurality of chain bars 300 can be configured by attaching the plurality of chain bars 300 to the substrate transport chain bar 100. However, even when a plurality of unit structures 150 including a substrate transfer chain bar integrated with a single chain bar are continuously connected as shown in FIGS. 4 and 5, as a whole, A structure as shown in FIG. 2 can be obtained.

  That is, when unit structures 150 in which a part of one chain bar and a part of the substrate transport chain bar are integrally formed as a lower part 152 and an upper part 151 are connected to each other continuously, adjacent unit structures are formed. The upper portion 151 of the 150 is communicated with each other through the open communication portion 151a, so that the substrate transfer chain bar 100 for accommodating the substrate transfer means 200 is defined, and the lower portion 152 of the adjacent unit structure 150 is passed through the wall. As a result, each chain bar 300 is defined for performing deposition, substrate loading and substrate removal.

Furthermore, as shown in FIG. 6, the unit structure 150 can be configured by connecting separate upper and lower portions 151 and 152 to each other.
A two-stage substrate transport means 200 is shown in FIG. FIG. 7 is a schematic view seen from the direction of arrow a in FIG. As shown in the figure, the substrate transfer means 200 is configured in a two-stage structure in the upper portion 151 of the unit structure 150, and is along a pair of rails 210 and a rail 210 including an upper rail 211 and a lower rail 212. It consists of a moving unit 220 that moves.

  In a preferred embodiment of the present invention, the moving part 220 moves in one direction along the lower rail 212, and deposition is performed in a chain bar defined by a continuous unit structure 150. When a series of vapor deposition processes are completed and the moving part arrives at the longitudinal end of the continuous unit structure, the moving part 220 is transported to the upper rail 211 in the further chain bar and then returns to the opposite direction.

  As shown in FIG. 7, the substrate 221 and the mask 222 used for vapor deposition are integrated and attached to each moving unit 220, and vapor deposition is performed while moving together with the respective moving units 220. It is clear that the mask 222 can be replaced in a separate chain bar by each process.

  On the other hand, when manufacturing an organic electroluminescent device composed of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electrode, etc., processing necessary for manufacturing each organic thin film of the device The pressure is the same as each other. Therefore, it is not necessary to separate each unit process chain bar from each other using a valve. Therefore, as shown in FIG. 7, each process chamber has an uneven shape formed between the upper and lower portions 151 and 152 instead of using the cover valve 240 and the sealing means 10 of the preferred embodiment described above. The baffle 153 is preferably sealed. Similarly, the path | route (refer the dotted line arrow in FIG. 7) which the particle | grains produced from the rail 210, the moving part 220, the inner wall etc. of the unit structure 150 etc. can move to the board | substrate 221 and the mask 222 to be vapor-deposited. It is preferable to prevent the large flow of particles by making it complicated.

  Further, the above-described process of returning the moving unit 220 to the upper rail 211 and the process of exchanging the mask 222 in the separated chain bar include the vertical transfer chain 160 and the mask as shown in FIGS. This can be done using the exchange chain 170.

  That is, the vertical transfer chain 160 includes a vertical transfer panel 161 that is movable in the vertical direction and a replacement rail 213 that is disposed above in the vertical direction with a predetermined height difference from the rail 210. The exchange rail 213 is configured to connect to the mask exchange chain 170.

  The mask change chain 170 is arranged on both sides of the vertical transfer chain 160 with respect to the direction in which the continuous unit structures 150 are connected to each other (that is, on both sides perpendicular to the direction), and the used mask is on one side. And a new mask is placed on the other side.

  FIG. 10 is an exploded perspective view of an apparatus for mass production of an organic electroluminescence device according to a further preferred embodiment of the present invention, and FIG. 11 is a mass production of an organic electroluminescence device according to a further preferred embodiment of the present invention. FIG. 12 is a cross-sectional view of a manufacturing apparatus for mass production of an organic electroluminescence device according to a further preferred embodiment of the present invention. In the preferred embodiment of the present invention shown in the figure, the pump port is provided on one surface of the substrate transfer chain 100, the substrate transfer chain 100 has a cylindrical or polygonal box shape, and a plurality of openings. The part 110 has a technical feature in which the bottom surface of the substrate transport chain bar 100 is formed at equal intervals from the central axis of the box.

  Further, the substrate transfer means 200 of this embodiment includes a center shaft 250 attached to the center of the substrate transfer chain bar 100 in the shape of a cylinder or a polygonal box, and a plurality of rods 260 branched from the center shaft 250. And a plurality of substrate holders 230 respectively attached to the plurality of rods 260, and each substrate is conveyed by rotating the central shaft 250.

  At this time, the substrate transport chain bar 100 may include a lid 140. In this case, the lid 140 preferably includes a lid main portion 141 in which the center shaft 250 can be disposed.

  Therefore, after each vapor deposition process is completed, the central shaft 250 is rotated by a predetermined angle by using a rotating means (not shown). As a result, vapor deposition on the substrate is performed in the next process chain bar 330. .

  On the other hand, if the deposition source of the deposition cell disappears during mass production of the multilayer thin film substrate, it is necessary to replace the deposition source with a new one. FIG. 13 and FIG. 14 show rotations in which the deposition cell A can be continuously put into the process chain bar 330 without breaking the vacuum state in the manufacturing apparatus for mass production of the organic electroluminescence device of the present invention. The vapor deposition cell exchange means 400 is shown.

  The rotary deposition cell replacement means 400 includes an upper chain bar 410 having a connection port 411 connected to the deposition cell port 332 of the process chain 330, and an upper chain bar 410 rotatably connected to the plurality of deposition cells. The lower chain bar 420 in which A is arranged, and a rotating means (not shown) for rotating the lower chain bar 420 are included. As described above, even when the vapor deposition source runs out during each vapor deposition process, the vapor deposition cell A can be efficiently replaced without breaking the vacuum state in each chain bar 300.

  As shown in FIG. 14, since the plurality of vapor deposition cells A are arranged along the circumference on the bottom surface of the lower chain bar 420, the processing is continued until the vapor deposition cells A are completely eliminated.

Next, the operation and effect of the present invention will be described in detail based on FIG. 1 to FIG.
The substrate to be thin-film processed is attached to the substrate holder 230 by the input chain bar 310. The substrate attached to the substrate holder 230 is transferred to the next process chain bar 330, where substrate cleaning and mask alignment processing are performed in order. Thereafter, the multilayer thin film is formed on the substrate assembly and the mask integrated with each other by various deposition processes of the process chamber. Further, the substrate to be processed next is attached to the substrate holder 230 by the input chain bar 310 at the same time.

  At this time, the input chain bar 310 is separated from the substrate transport chain bar 100 in a vacuum state by the cover valve 240 or a further valve. As a result, only the input chain bar is destroyed without destroying the vacuum state in the substrate transport chain bar 100. Are exposed to the atmosphere.

  As with the input chain bar, the take-out chain bar 320 is separated from the substrate transfer chain bar 100 using a valve, and the completed substrate can be used without breaking the vacuum state of the substrate transfer chain bar 100 and the process chain bar 330. It is taken out from the take-out chain bar 320.

  Since the substrate loading and unloading steps and several vapor deposition processes can be performed simultaneously in this way, the multilayer thin film substrate can be mass-produced and the manufacturing time can be shortened.

On the other hand, the manufacturing process of the organic electroluminescent device composed of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electrode and the like will be described below.
The organic electroluminescence device includes substrate cleaning, UV ozone treatment or plasma treatment, alignment of a substrate and a mask for an organic thin film, manufacture of a thin film comprising a hole injection layer, a hole transport layer, a light emitting layer and an electron transport layer, a substrate and It is manufactured by performing alignment of the electrode mask, thin film processing of the electrode, sealing processing for protecting the manufactured device from moisture and oxygen, and the like.

  Since the process of performing UV ozone treatment or plasma treatment on the cleaned substrate is performed under a pressure different from that of the manufacturing process of the organic thin film, an additional valve must be attached to perform this process. The stage on which the substrate and the mask are aligned with each other is outside the area where the deposition takes place.

  With the aligned substrate and mask, a thin film is manufactured using organic substances evaporated from a deposition source. If a single furnace is used, the substrate is rotated to improve thin film uniformity. When a linear deposition source is used, the substrate, mask or linear deposition source is scanned linearly to produce a film. The subsequent steps for producing the organic thin film are repeated in the same manner.

  After the above-described process for producing the organic thin film is completed, the organic thin film mask is removed and the electrode mask is aligned with the substrate. Thereafter, the substrate is transported to a stage for manufacturing an electrode.

  In the process of manufacturing an electrode, for example, a transparent electrode or a metal electrode is manufactured using vapor deposition or sputtering.

  Once the electrode production is complete, the substrate is transported to the protective layer manufacturing process platform, and the multi-layer structure is organic thin film, oxide thin film, Manufactured by nitride films and combinations thereof.

  The above process is performed simultaneously on a plurality of substrates 221 in the manufacturing apparatus for mass production of the organic electroluminescence device of the present invention, and also on the substrates transferred to each chain bar 300 by the substrate transfer means 200. Done.

  When the manufacturing process of such an organic electroluminescent device is applied to the manufacture of multicolored or natural color devices, a hole injection layer, a hole transport layer, a light emitting layer, The organic thin film comprised of an electron transport layer or the like is arranged to match each color, and the process is repeated after the substrate processing.

  When manufacturing such an organic electroluminescent device, the processing pressures required for manufacturing each organic thin film are the same. Thus, the unit process chambers need not be separated from one another by valves. Since the entire length of the apparatus can be extremely increased, as shown in FIGS. 6 to 9, the same unit structure 150 is continuously connected to each other, and the two-stage structure rail 210 and the vertical transfer chain bar 160 are It is preferable that the moving unit 220 can be collected, and the mask exchange chamber 170 is preferably configured so that the mask 222 to be removed after each deposition process is returned to the original position.

In such a configuration, the procedure of the vapor deposition process is as follows.
That is, while the substrate 221 and the mask 222 are attached to the moving unit 220 of the substrate transfer means 200, the substrate 221 and the mask 222 move along each chain bar 300, and each deposition process is performed.

  When the process of one unit is completed, the moving unit 220 to which the substrate 221 and the mask 222 are attached arrives at the transfer chain bar 160.

  At this time, the different types of masks 222 in the next process are arranged on the mask exchange chain 170 arranged on one side of the vertical transfer chain 160 (for example, the upper side in FIG. 8). First, the moving unit 220 moves to the exchange rail 213 through the vertical conveyance chain bar 160 and moves to the mask exchange chain bar 170 located on the other side of the vertical conveyance chain bar (for example, the lower side in FIG. 8). As a result, the mask 222 already used in the previous process is separated and collected.

  Then, the moving unit 220 moves to a mask exchange chain 170 located on one side of the vertical transfer chain bar, where a different type of mask 222 is attached. Thereafter, the moving unit 220 moves to the vertical transfer chain bar via the replacement rail 213 and starts the next vapor deposition process.

  When the deposition process is completed, the moving unit 220 and the mask 222 are collected in the reverse order of the mask replacement order.

  That is, the moving unit 220 is transferred from the vertical transfer panel 161 of the vertical transfer chain 16 to the upper rail 211 and then moves along the upper rail 211 in the direction opposite to the moving unit during the vapor deposition process.

  At this time, the mask 222 attached to the moving unit 220 is returned to the original position and collected. That is, the masks are collected in the reverse order of the mask exchange order.

  First, each moving part 220 moves to a mask exchange chain bar 170 (the lower side in FIG. 8) arranged on the other side, and the used mask 222 is separated from the moving part 220. Then, the moving unit 220 moves to the mask exchange chamber 170 (on the upper side in FIG. 8) arranged on one side, and the mask 222 released in the previous vapor deposition process is attached to the moving unit 220. Thereafter, the moving unit 220 moves to the original position. Such a procedure is repeated the same number of times as the number of masks 222.

  The basic functions of the input chain 310, the extraction chain bar 320, and the process chain bar 330 in the preferred embodiment shown in FIGS. 10 to 12 are the same as those in the above embodiment. Further, the number of process chain bars 330 can be adjusted.

  According to this embodiment, the thin film manufacturing apparatus is particularly simple, and the pump port is attached to the rear end (ie, the inside) of the process chain bar 330, thus reducing the space required to install the apparatus. be able to.

  Further, the rotary deposition cell exchange means 400 performs deposition together with each deposition cell using the lower chain bar 420 in which a plurality of deposition cells are arranged. It is comprised so that it may rotate the angle.

  Further, since the new vapor deposition cell A is arranged at a position near the connection port 411, the vapor deposition process is continuously performed using the new vapor deposition cell A.

  At this time, as described above, the upper and lower chain bars 410 and 420 are rotated with respect to each other. However, since an O-ring is inserted between the two chain bars, a space defined by the two chain bars. Is sealed. Thus, the deposition cell is replaced without any effect on the vacuum conditions in the process chamber and the deposition process.

  According to the present invention, the substrate can be continuously transferred to each process chamber in a vacuum state, and by performing substrate loading, substrate cleaning, mask attachment and mask alignment, substrate removal, and a plurality of vapor deposition processes simultaneously, There is an advantage that a multilayer thin film can be mass-produced.

  Furthermore, since a deposition cell having a different type of deposition source is installed in each deposition chain, it is possible to manufacture a multilayer thin film without causing contamination.

Moreover, since the rotary deposition cell replacement means is used in the present invention, it is possible to replace the deposition cell without destroying the vacuum state of the deposition chamber.
Therefore, there is a further advantage that the manufacturing time can be shortened.

The disassembled perspective view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of suitable embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS The front sectional view of the manufacturing apparatus for mass production of the organic electroluminescence device of a preferred embodiment of the present invention. The sectional side view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of suitable embodiment of this invention. The perspective view of the unit structure which comprises the manufacturing apparatus for mass production of the organic electroluminescent apparatus of this invention. Sectional drawing which shows the state in which the several unit structure is mutually connected. Schematic of the board | substrate conveyance means of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of this invention. FIG. 7 is a schematic view of a substrate transport unit viewed from the direction of arrow a in FIG. 6. The top view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of other suitable embodiment of this invention. The sectional side view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of other suitable embodiment of this invention. The disassembled perspective view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of the further preferable embodiment of this invention. The bottom view of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of the further preferable embodiment of this invention. Sectional drawing of the manufacturing apparatus for mass production of the organic electroluminescent apparatus of the further preferable embodiment of this invention. Sectional drawing of the rotary vapor deposition cell replacement | exchange means used within the manufacturing apparatus for mass production of the organic electroluminescent apparatus of this invention. The perspective view which shows the inside of the rotation type vapor deposition cell exchange means used in the manufacturing apparatus for mass production of the organic electroluminescent apparatus of this invention.

Claims (14)

A linear substrate transport chain bar in which a plurality of openings are formed, a pump port is attached, and a chain bar for performing substrate loading, substrate cleaning, mask alignment, substrate removal, and a plurality of deposition processes is attached;
A substrate or substrate assembly attached to the substrate transport chain and processed in a plurality of openings, and a substrate transport means for transporting a mask integrated with each other to a next opening of the substrate transport chain; ,
A plurality of chain bars each attached to an opening of the substrate transport chain bar;
Manufacturing equipment for mass production of organic electroluminescence devices.   The substrate transport chain bar and the plurality of chain bars are configured by continuously connecting unit structures in which one chain bar and the substrate transport chain bar are integrated with each other. One substrate transfer chain bar is connected to an adjacent unit structure substrate transfer chain bar through an opening passage portion, and one unit structure of the chain structure is connected to an adjacent unit structure chain bar and a wall. The apparatus of claim 1, connected together.   The apparatus of claim 1, wherein the substrate board transfer chain is generally in the form of an elongated box of a straight, polygonal, donut or curved shape. The plurality of chambers are
An input chain bar disposed at one end in the longitudinal direction of the substrate transport chain bar, and having a pump port and a door;
An extraction chain bar which is disposed at the other end in the longitudinal direction of the substrate transfer chain bar and includes a pump port and a door;
A substrate cleaning chain bar attached to the opening and having a pump port and a door, a mask alignment chain bar attached to the opening and having a pump port and a door, and attached to the opening, respectively. Comprising a process chamber including a plurality of deposition chambers with deposition cell ports;
The apparatus of claim 1.   Each of the deposition chains further includes an upper chain bar having a connection port connected to a deposition cell port of the deposition chain bar and a pump port, and is rotatably connected to the upper chain bar, and a plurality of deposition cells are disposed. 5. The apparatus according to claim 4, further comprising: a rotary deposition cell changing means comprising a lower chain bar and a rotating means for rotating the lower chain bar.   The process chain bar includes a plurality of chain bars attached to the opening of the substrate transfer chain bar, and the chain bar performs processes such as substrate loading, substrate cleaning, mask mounting, mask cleaning, and substrate removal. 5. The apparatus of claim 4, wherein the apparatus is alternately vacuum and atmospheric and is attached to the deposition chain bar separately, linearly or side by side.   The substrate transport means comprises a rail, a moving portion that moves along the rail, and a substrate holder that holds the substrate, and the substrate is attached to a conveyor belt type moving means. The apparatus of claim 1, transported in a state.   The substrate transport means includes a pair of rails having a two-stage structure of an upper rail and a lower rail, and a moving unit that moves along the rails and that has a substrate and a mask attached to the lower portion. The apparatus of claim 1, wherein a vapor deposition process is performed while the moving unit moves, and then the moving unit returns along the other rail.   An uneven baffle that exposes only the deposition surface of the substrate to the deposition chain bar and prevents particles from being generated due to friction of the rail is further provided between the substrate transport chain bar and the deposition chain bar. The apparatus of claim 8.   The apparatus according to claim 6 or 8, wherein a vertical transfer chain bar having a vertical transfer panel for transferring the moving part up and down is further provided between the process chain bars performing a series of unit processes.   A mask exchange chain bar in which a mask is disposed or a mask mounted away from the moving unit is accommodated, and a mask cleaning chain bar for cleaning a mask that has been subjected to a predetermined vapor deposition process, includes the vertical transfer chain bar. The apparatus of claim 10, wherein the vertical transfer chain bar and the mask exchange chain bar are connected to each other through an exchange rail.   The apparatus of claim 1, further comprising a cover valve for closing the opening between the substrate transport chain bar and each of the deposition chain bars.   The substrate transport chain bar is configured such that a pump port is attached to one side, and the substrate transport chain bar is formed in a cylindrical or polygonal box shape and is equidistant from the central axis of the box. The apparatus of claim 1, comprising a plurality of openings formed in the bottom surface. The substrate transport means comprises a central shaft attached to the center of the substrate transport chain bar (in the shape of a cylinder or a polygonal box), and a plurality of substrate holders branched from the central shaft, 14. The apparatus of claim 13, wherein the substrate is transported by rotating the central shaft.

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