KR100423716B1 - 레이저발진기 - Google Patents

레이저발진기 Download PDF

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Publication number
KR100423716B1
KR100423716B1 KR10-2001-0016950A KR20010016950A KR100423716B1 KR 100423716 B1 KR100423716 B1 KR 100423716B1 KR 20010016950 A KR20010016950 A KR 20010016950A KR 100423716 B1 KR100423716 B1 KR 100423716B1
Authority
KR
South Korea
Prior art keywords
laser
box
discharge
laser oscillator
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2001-0016950A
Other languages
English (en)
Korean (ko)
Other versions
KR20010095173A (ko
Inventor
다무라모토히데
니시다사토시
아오야마마사노리
Original Assignee
미쓰비시덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시덴키 가부시키가이샤 filed Critical 미쓰비시덴키 가부시키가이샤
Publication of KR20010095173A publication Critical patent/KR20010095173A/ko
Application granted granted Critical
Publication of KR100423716B1 publication Critical patent/KR100423716B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
KR10-2001-0016950A 2000-03-31 2001-03-30 레이저발진기 Expired - Fee Related KR100423716B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-096157 2000-03-31
JP2000096157A JP3884213B2 (ja) 2000-03-31 2000-03-31 レーザ発振器

Publications (2)

Publication Number Publication Date
KR20010095173A KR20010095173A (ko) 2001-11-03
KR100423716B1 true KR100423716B1 (ko) 2004-03-18

Family

ID=18610958

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0016950A Expired - Fee Related KR100423716B1 (ko) 2000-03-31 2001-03-30 레이저발진기

Country Status (4)

Country Link
US (1) US6940886B2 (https=)
JP (1) JP3884213B2 (https=)
KR (1) KR100423716B1 (https=)
TW (1) TW480791B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788724B2 (en) * 2001-07-06 2004-09-07 Intel Corporation Hermetically sealed external cavity laser system and method
US6816536B2 (en) * 2001-11-30 2004-11-09 Spectra Physics, Inc. Method and apparatus for in situ protection of sensitive optical materials
JP3746243B2 (ja) * 2002-03-25 2006-02-15 ファナック株式会社 レーザ発振器
CA2430608C (en) * 2002-06-03 2012-01-10 Praxair Technology, Inc. Carbon dioxide laser resonator gas
US7522650B2 (en) * 2004-03-31 2009-04-21 Cymer, Inc. Gas discharge laser chamber improvements
CN111801854B (zh) * 2018-04-23 2022-10-21 极光先进雷射株式会社 激光腔、密封部件的制造方法和电子器件的制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR850005033A (ko) * 1983-12-29 1985-08-19 히데노리 오사다 고속 축 유동방식의 가스레이저 발진기
US4651324A (en) * 1981-12-08 1987-03-17 Franz Prein Method and apparatus for operating a CO2 gas laser
JPS6324685A (ja) * 1986-07-17 1988-02-02 Komatsu Ltd 炭酸ガスレ−ザ装置
KR950013650A (ko) * 1993-11-09 1995-06-15 완다케이. 덴슨-로우 펄스된 레이저 및 레이저 아킹 제거 방법
US5841804A (en) * 1991-03-14 1998-11-24 Jgc Corporation Method and apparatus for regenerating gas used in carbon dioxide laser generator

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261753A (en) * 1980-01-22 1981-04-14 The United States Of America As Represented By The United States Department Of Energy Lanthanum-hexaboride carbon composition for use in corrosive hydrogen-fluorine environments
FR2575869B1 (fr) * 1984-11-23 1987-07-10 Telecommunications Sa Generateur laser a catalyseur pour le gaz laser
US4897848A (en) * 1988-01-29 1990-01-30 John Macken Discharge driven precious metal catalyst with application to carbon monoxide lasers
US4905249A (en) * 1989-01-06 1990-02-27 Applied Photonics, Inc. Catalytic converter
US5337329A (en) * 1992-07-07 1994-08-09 Jack Foster Fluid laser having a roughened, catalytic inner surface
JPH0832151A (ja) * 1994-07-20 1996-02-02 Toshiba Corp ガスレーザ装置
US5550851A (en) * 1994-09-15 1996-08-27 Litton Systems, Inc. Laser system decontamination method and apparatus
JPH08231444A (ja) * 1995-02-28 1996-09-10 Daikin Ind Ltd １，１，１，３，３−ペンタフルオロプロパンの製造方法
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4651324A (en) * 1981-12-08 1987-03-17 Franz Prein Method and apparatus for operating a CO2 gas laser
KR850005033A (ko) * 1983-12-29 1985-08-19 히데노리 오사다 고속 축 유동방식의 가스레이저 발진기
JPS6324685A (ja) * 1986-07-17 1988-02-02 Komatsu Ltd 炭酸ガスレ−ザ装置
US5841804A (en) * 1991-03-14 1998-11-24 Jgc Corporation Method and apparatus for regenerating gas used in carbon dioxide laser generator
KR950013650A (ko) * 1993-11-09 1995-06-15 완다케이. 덴슨-로우 펄스된 레이저 및 레이저 아킹 제거 방법

Also Published As

Publication number Publication date
JP2001284685A (ja) 2001-10-12
TW480791B (en) 2002-03-21
US20010028670A1 (en) 2001-10-11
US6940886B2 (en) 2005-09-06
JP3884213B2 (ja) 2007-02-21
KR20010095173A (ko) 2001-11-03

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