JP3884213B2 - レーザ発振器 - Google Patents

レーザ発振器 Download PDF

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Publication number
JP3884213B2
JP3884213B2 JP2000096157A JP2000096157A JP3884213B2 JP 3884213 B2 JP3884213 B2 JP 3884213B2 JP 2000096157 A JP2000096157 A JP 2000096157A JP 2000096157 A JP2000096157 A JP 2000096157A JP 3884213 B2 JP3884213 B2 JP 3884213B2
Authority
JP
Japan
Prior art keywords
laser
housing
gas
discharge
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000096157A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001284685A5 (https=
JP2001284685A (ja
Inventor
東英 田村
聡 西田
真式 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Engineering Co Ltd
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Engineering Co Ltd
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Engineering Co Ltd, Mitsubishi Electric Corp filed Critical Mitsubishi Electric Engineering Co Ltd
Priority to JP2000096157A priority Critical patent/JP3884213B2/ja
Priority to TW090107322A priority patent/TW480791B/zh
Priority to KR10-2001-0016950A priority patent/KR100423716B1/ko
Priority to US09/820,970 priority patent/US6940886B2/en
Publication of JP2001284685A publication Critical patent/JP2001284685A/ja
Publication of JP2001284685A5 publication Critical patent/JP2001284685A5/ja
Application granted granted Critical
Publication of JP3884213B2 publication Critical patent/JP3884213B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP2000096157A 2000-03-31 2000-03-31 レーザ発振器 Expired - Fee Related JP3884213B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000096157A JP3884213B2 (ja) 2000-03-31 2000-03-31 レーザ発振器
TW090107322A TW480791B (en) 2000-03-31 2001-03-28 Laser oscillator
KR10-2001-0016950A KR100423716B1 (ko) 2000-03-31 2001-03-30 레이저발진기
US09/820,970 US6940886B2 (en) 2000-03-31 2001-03-30 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000096157A JP3884213B2 (ja) 2000-03-31 2000-03-31 レーザ発振器

Publications (3)

Publication Number Publication Date
JP2001284685A JP2001284685A (ja) 2001-10-12
JP2001284685A5 JP2001284685A5 (https=) 2004-12-09
JP3884213B2 true JP3884213B2 (ja) 2007-02-21

Family

ID=18610958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000096157A Expired - Fee Related JP3884213B2 (ja) 2000-03-31 2000-03-31 レーザ発振器

Country Status (4)

Country Link
US (1) US6940886B2 (https=)
JP (1) JP3884213B2 (https=)
KR (1) KR100423716B1 (https=)
TW (1) TW480791B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788724B2 (en) * 2001-07-06 2004-09-07 Intel Corporation Hermetically sealed external cavity laser system and method
US6816536B2 (en) * 2001-11-30 2004-11-09 Spectra Physics, Inc. Method and apparatus for in situ protection of sensitive optical materials
JP3746243B2 (ja) * 2002-03-25 2006-02-15 ファナック株式会社 レーザ発振器
CA2430608C (en) * 2002-06-03 2012-01-10 Praxair Technology, Inc. Carbon dioxide laser resonator gas
US7522650B2 (en) * 2004-03-31 2009-04-21 Cymer, Inc. Gas discharge laser chamber improvements
CN111801854B (zh) * 2018-04-23 2022-10-21 极光先进雷射株式会社 激光腔、密封部件的制造方法和电子器件的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261753A (en) * 1980-01-22 1981-04-14 The United States Of America As Represented By The United States Department Of Energy Lanthanum-hexaboride carbon composition for use in corrosive hydrogen-fluorine environments
DE3148570C2 (de) * 1981-12-08 1991-02-14 Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg Elektrisch angeregter CO↓↓2↓↓-Laser
CH667556A5 (de) * 1983-12-29 1988-10-14 Amada Eng & Service Hochgeschwindigkeits gaslaser-oszillator.
FR2575869B1 (fr) * 1984-11-23 1987-07-10 Telecommunications Sa Generateur laser a catalyseur pour le gaz laser
JPS6324685A (ja) * 1986-07-17 1988-02-02 Komatsu Ltd 炭酸ガスレ−ザ装置
US4897848A (en) * 1988-01-29 1990-01-30 John Macken Discharge driven precious metal catalyst with application to carbon monoxide lasers
US4905249A (en) * 1989-01-06 1990-02-27 Applied Photonics, Inc. Catalytic converter
US5841804A (en) * 1991-03-14 1998-11-24 Jgc Corporation Method and apparatus for regenerating gas used in carbon dioxide laser generator
US5337329A (en) * 1992-07-07 1994-08-09 Jack Foster Fluid laser having a roughened, catalytic inner surface
US5426661A (en) * 1993-11-09 1995-06-20 Hughes Aircraft Company Pulsed laser discharge stabilization
JPH0832151A (ja) * 1994-07-20 1996-02-02 Toshiba Corp ガスレーザ装置
US5550851A (en) * 1994-09-15 1996-08-27 Litton Systems, Inc. Laser system decontamination method and apparatus
JPH08231444A (ja) * 1995-02-28 1996-09-10 Daikin Ind Ltd １，１，１，３，３−ペンタフルオロプロパンの製造方法
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers

Also Published As

Publication number Publication date
JP2001284685A (ja) 2001-10-12
KR100423716B1 (ko) 2004-03-18
TW480791B (en) 2002-03-21
US20010028670A1 (en) 2001-10-11
US6940886B2 (en) 2005-09-06
KR20010095173A (ko) 2001-11-03

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