KR100372770B1 - A method of manufacturing self align contact of semiconductor device - Google Patents

A method of manufacturing self align contact of semiconductor device Download PDF

Info

Publication number
KR100372770B1
KR100372770B1 KR10-1999-0021770A KR19990021770A KR100372770B1 KR 100372770 B1 KR100372770 B1 KR 100372770B1 KR 19990021770 A KR19990021770 A KR 19990021770A KR 100372770 B1 KR100372770 B1 KR 100372770B1
Authority
KR
South Korea
Prior art keywords
self
silicon
film
silicon oxynitride
insulating film
Prior art date
Application number
KR10-1999-0021770A
Other languages
Korean (ko)
Other versions
KR20010002130A (en
Inventor
김진웅
Original Assignee
주식회사 하이닉스반도체
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 하이닉스반도체 filed Critical 주식회사 하이닉스반도체
Priority to KR10-1999-0021770A priority Critical patent/KR100372770B1/en
Priority to JP31969699A priority patent/JP4776747B2/en
Priority to US09/438,048 priority patent/US6316349B1/en
Priority to TW088119815A priority patent/TW449872B/en
Publication of KR20010002130A publication Critical patent/KR20010002130A/en
Application granted granted Critical
Publication of KR100372770B1 publication Critical patent/KR100372770B1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/30—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a fluidised bed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/001—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals for sludges or waste products from water treatment installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2203/00—Furnace arrangements
    • F23G2203/50—Fluidised bed furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/12—Sludge, slurries or mixtures of liquids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00—Technologies for wastewater treatment
    • Y02W10/20—Sludge processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

본 발명은 반도체소자의 자기정렬적인 콘택방법에 관한 것으로,The present invention relates to a self-aligned contact method of a semiconductor device,

반도체기판 상부에 도전체, 제1 절연막 및 제1실리콘리치 실리콘산화질화막을 일정두께 형성하고 이들을 패터닝하여 도전배선을 형성하고 상기 도전배선 측벽에 제2 절연막과 제2실리콘리치 실리콘산화질화막 적층구조의 스페이서를 형성한 다음, 전체표면상부를 평탄화시키는 층간절연막을 형성하고 상기 반도체기판의 예정된 부분을 노출시키는 콘택홀을 자기정렬적으로 형성하는 공정으로 반도체소자의 고집적화를 가능하게 하는 기술이다.A conductor, a first insulating film, and a first silicon rich silicon oxynitride film are formed on the semiconductor substrate to have a predetermined thickness, and then patterned to form a conductive wiring, and a second insulating film and a second silicon rich silicon oxynitride film stacked structure are formed on the sidewalls of the conductive wiring. After forming the spacer, the interlayer insulating film is formed to planarize the entire upper surface, and the contact hole exposing a predetermined portion of the semiconductor substrate is formed in a self-aligned manner.

Description

반도체소자의 자기정렬적인 콘택방법{A method of manufacturing self align contact of semiconductor device}A method of manufacturing self align contact of semiconductor device

본 발명은 반도체소자의 자기정렬적인 콘택방법에 관한 것으로, 특히 실리콘 리치 실리콘산화질화막 ( Si-rich SiON ) 을 식각장벽으로 하여 자기정렬적인 콘택홀을 형성하는 기술에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a self-aligned contact method of a semiconductor device, and more particularly, to a technology for forming a self-aligned contact hole using a silicon rich silicon oxynitride layer (Si-rich SiON) as an etch barrier.

현재 사용되고 있는 노광기술로는 16 M DRAM 까지 콘택홀을 형성할 때 콘택홀 측벽에 인접한 도전층과 절연불량이 발생하지 않고 소자를 형성할 수 있으나, 소자가 고집적화됨에 따라 단위셀의 크기가 축소되고, 그에 따라서 콘택홀과 도전층의 간격이 좁아지게 된다.Currently, the exposure technology used to form a contact hole up to 16 M DRAM without forming a defective insulation with the conductive layer adjacent to the sidewall of the contact hole, but as the device is highly integrated, the size of the unit cell is reduced Therefore, the gap between the contact hole and the conductive layer is narrowed.

상기와 같이 좁아진 콘택홀을 형성하기 위하여 콘택의 크기를 축소시켜야 하고, 이를 위하여 노광방식을 바꾸거나, 마스크를 바꾸어서 어느 정도는 해결할 수 있었다. 또한, 자기정렬적인 콘택 ( self-aligned contact, 이하에서 SAC 라 함 ) 으로 이를 해결하기도 하였다.In order to form a narrowed contact hole as described above, the size of the contact should be reduced, and for this purpose, it was solved to some extent by changing the exposure method or changing the mask. In addition, self-aligned contact (hereafter referred to as SAC) was solved.

한편, SAC 공정중 가장 각광받는 것으로 산화막 식각공정시 식각장벽으로 질화막을 사용하는 자기정렬적인 콘택 ( nitride barrier SAC, 이하에서 NBSAC 이라 함 ) 공정을 사용한다.On the other hand, the most popular among the SAC process is a self-aligned contact (nitride barrier SAC, hereinafter referred to as NBSAC) process using a nitride film as an etching barrier during the oxide film etching process.

도 1 은 종래기술에 따른 반도체소자의 자기정렬적인 콘택방법을 도시한 단면도이다.1 is a cross-sectional view showing a self-aligned contact method of a semiconductor device according to the prior art.

먼저, 반도체기판(31) 상부에 게이트전극용 도전체(33)를 형성하고 그 상부에 마스크절연막인 제1실리콘질화막(35)을 형성한다.First, a gate electrode conductor 33 is formed on the semiconductor substrate 31, and a first silicon nitride film 35, which is a mask insulating film, is formed on the semiconductor substrate 31.

그리고, 상기 제1실리콘질화막(35) 상부에 반사방지막으로실리콘산화질화막(39)을 형성한다.In addition, a silicon oxynitride layer 39 is formed on the first silicon nitride layer 35 as an anti-reflection layer.

그리고, 게이트전극 마스크를 이용한 식각공정으로 상기 반사방지막인 실리콘산화질화막(39), 마스크절연막인 제1실리콘질화막(35) 및 게이트전극용 도전체(33)를 식각하여 게이트전극을 형성한다.In addition, the gate electrode is formed by etching the anti-reflection film silicon oxynitride film 39, the mask insulating film, the first silicon nitride film 35, and the gate electrode conductor 33 by an etching process using a gate electrode mask.

여기서, 상기 반사방지막은 노광공정시 마스크절연막으로 사용되는 실리콘질화막의 난반사가 심하여 고집적화된 반도체소자의 제조공정에서는 반드시 필요한 박막이다.Here, the anti-reflection film is a thin film which is essential in the manufacturing process of the highly integrated semiconductor device due to severe diffused reflection of the silicon nitride film used as the mask insulating film during the exposure process.

그 다음, 상기 게이트전극 측벽에 제2실리콘질화막(37)으로 절연막 스페이서를 형성한다.Next, an insulating film spacer is formed on the sidewalls of the gate electrode with the second silicon nitride film 37.

그리고, 전체표면상부를 평탄화시키는 층간절연막(41)을 형성한다. 이때, 상기 층간절연막(41)은 비.피.에스.지. ( boro phospho silicate glass, 이하에서 BPSG 라 함 ) 와 같이 유동성이 우수한 절연물질로 형성한다.Then, an interlayer insulating film 41 is formed to planarize the entire upper surface portion. At this time, the interlayer insulating film 41 is made of B.S.G. It is formed of an insulating material with excellent fluidity such as boro phospho silicate glass (hereinafter referred to as BPSG).

그 다음, 상기 반도체기판(31)의 예정된 부분을 노출시키는 자기정렬적인 콘택공정으로 콘택홀(43)을 형성한다. (도 1)Next, the contact hole 43 is formed by a self-aligned contact process that exposes a predetermined portion of the semiconductor substrate 31. (Figure 1)

상기한 바와 같이 종래기술에 따른 자기정렬적인 콘택공정은, 마스크절연막이나 절연막 스페이서로 사용되는 실리콘질화막의 큰 응력 ( stress ) 으로 인하여 웨이퍼의 뒤틀림 현상이 유발될 수 있고 그로 인한 도전체의 리프팅 ( lifting ) 등의 현상이 발생한다. 그리고, 그에 따른 후속 리소그래피 ( lithography ) 공정을 어렵게 하는 문제점이 있다.As described above, the self-aligned contact process according to the prior art may cause warpage of the wafer due to the large stress of the silicon nitride film used as the mask insulating film or the insulating film spacer, thereby lifting the conductor. ) Occurs. And, there is a problem that makes subsequent lithography processes difficult.

그리고, 상기 실리콘질화막은 높은 유전율을 가지고 있어 도전체의 주변에형성되어 높은 기생 캐패시턴스를 가지게 됨으로써 소자의 특성을 열화시킬 수 있는 문제점이 있다.In addition, the silicon nitride film has a high dielectric constant and is formed around the conductor to have a high parasitic capacitance, thereby deteriorating device characteristics.

그리고, 상기 실리콘질화막은 난반사가 심하여 그 상부에 반사방지막을 반드시 필요로 하게 되어 공정이 복잡해지는 문제점이 있다.In addition, since the silicon nitride film has severe diffused reflections, an antireflection film is necessarily required on the upper portion thereof, which causes a complicated process.

최근에는, 상기한 여러가지 문제점을 해결하기 위하여, 실리콘질화막보다 응력이 작고, 유전율이 작은 실리콘 리치 실리콘산화질화막으로 반사방지막의 적층없이 실리콘 리치 실리콘산화질화막으로 마스크 절연막을 형성하고 후속공정으로 절연막 스페이서를 형성하는 공정을 이용하여 자기정렬적인 콘택공정을 실시한다. 이때, 상기 실리콘 리치 실리콘산화질화막은 실리콘이 20 퍼센트의 부피비로 함유된 것이다.Recently, in order to solve the various problems described above, a mask insulating film is formed of a silicon rich silicon oxynitride film without lamination of an antireflection film with a silicon rich silicon oxynitride film having a lower stress and a lower dielectric constant than that of the silicon nitride film, and the insulating film spacer is formed in a subsequent process. A self-aligned contact process is performed using the forming process. At this time, the silicon rich silicon oxynitride film is a silicon containing 20% by volume ratio.

그러나, 상기 실리콘리치 실리콘산화질화막은 실리콘질화막에 비하여 전기적특성이 떨어져 종래보다 누설전류가 증가되는 문제점을 유발하였다.However, the silicon rich silicon oxynitride film has a lower electrical characteristic than the silicon nitride film, which causes a problem that leakage current is increased.

본 발명은 상기한 종래기술의 문제점을 해결하기 위하여, 실리콘산화질화막과 실리콘리치 실리콘산화질화막의 적층구조로 도전체의 마스크절연막과 절연막 스페이서를 형성함으로써 자기정렬적인 콘택공정시 반도체소자의 특성, 신뢰성 및 수율을 향상시키고 그에 따른 반도체소자의 고집적화를 가능하게 반도체소자의 자기정렬적인 콘택방법을 제공하는데 그 목적이 있다.The present invention is to solve the above problems of the prior art, by forming a mask insulating film and the insulating film spacer of the conductor in a stacked structure of the silicon oxynitride film and silicon rich silicon oxynitride film characteristics, reliability of the semiconductor device during the self-aligned contact process And to provide a self-aligned contact method of the semiconductor device to improve the yield and thereby high integration of the semiconductor device.

도 1 은 종래기술에 따른 반도체소자의 자기정렬적인 콘택방법을 도시한 단면도.1 is a cross-sectional view showing a self-aligned contact method of a semiconductor device according to the prior art.

도 2a 및 도 2b 는 본 발명의 실시예에 따른 반도체소자의 자기정렬적인 콘택방법을 도시한 단면도.2A and 2B are cross-sectional views illustrating a self-aligned contact method of a semiconductor device according to an embodiment of the present invention.

< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>

11,31 : 반도체기판 13,33 : 게이트전극용 도전체11,31: semiconductor substrate 13,33: conductor for gate electrode

15 : 제1실리콘산화질화막15: first silicon oxynitride film

17 : 제1실리콘리치 실리콘산화질화막17: first silicon rich silicon oxynitride film

19 : 제2실리콘산화질화막, 절연막 제1스페이서19: second silicon oxynitride film, insulating film first spacer

21 : 제2실리콘리치 실리콘산화질화막, 절연막 제2스페이서21: second silicon rich silicon oxynitride film, insulating film second spacer

23,41 : 층간절연막 25,43 : 콘택홀23,41: interlayer insulating film 25,43: contact hole

35 : 제1실리콘질화막 37 : 제2실리콘질화막35: first silicon nitride film 37: second silicon nitride film

39 : 실리콘리치 실리콘산화질화막39: silicon rich silicon oxynitride film

이상의 목적을 달성하기 위해 본 발명에 따른 반도체소자의 자기정렬적인 콘택방법은,반도체기판 상부에 도전체, 제1 절연막 및 제1실리콘리치 실리콘산화질화막을 일정두께 형성하고 이들을 패터닝하여 도전배선을 형성하는 공정과,상기 도전배선 측벽에 제2 절연막과 제2실리콘리치 실리콘산화질화막의 적층구조 스페이서를 형성하는 공정과,전체표면상부를 평탄화시키는 층간절연막을 형성하는 공정과,상기 반도체기판의 예정된 부분을 노출시키는 콘택홀을 자기정렬적으로 형성하는 공정을 포함하는 것과,상기 제1,2 절연막은 상기 제1,2 실리콘리치 실리콘산화질화막의 형성공정시 실리콘 리치 소오스 가스를 조절하여 인-시튜로 형성한 실리콘산화질화막인 것과,상기 자기정렬적인 콘택식각공정은 상기 층간절연막과 제1,2실리콘리치 실리콘산화질화막이 충분한 식각선택비 차이를 가질 수 있는 C-F 계 플라즈마를 이용하여 실시하되, 상기 자기정렬적인 콘택식각공정은 식각공정의 안정성을 향상시키기 위하여 아르곤이나 헬륨 등과 같은 불활성가스를 첨가하여 실시하는 것과,상기 자기정렬적인 콘택식각공정은 C3F8, C5F8등과 같은 탄소 리치 ( C-rich ) 불소가스를 이용하여 실시하되, 상기 콘택식각공정은 C-H-F 계 가스를 첨가하여 폴리머로 인한 식각정지 현상을 억제하는 것과,상기 제1 및 2 절연막은 실리콘산화막으로 형성하는 것을 특징으로 한다.한편, 본 발명의 원리는 다음과 같다.본 발명은, 마스크절연막과 절연막 스페이서로 실리콘질화막을 사용하고 반사방지막으로 실리콘산화질화막을 사용하는 종전의 종래기술에 유발되는 문제점을 해결하기 위하여,최근의 종래기술에서, 반사방지막 없이 단층의 실리콘리치 실리콘산화질화막으로 도전배선의 마스크절연막 및 절연막 스페이서를 각각 형성함으로써 자기정렬적인 콘택 공정의 특성을 형성하고자 하였으나,상기 실리콘리치 실리콘산화질화막이 실리콘질화막에 비해 전기적 특성이 저하되므로,상기한 전기적 특성 저하를 방지하기 위하여, 실리콘산화질화막이나 실리콘산화막을 실리콘리치 실리콘산화질화막의 하부에 형성함으로써 실리콘산화질화막/실리콘리치 실리콘산화질화막의 적층구조나 실리콘산화막/실리콘리치 실리콘산화질화막의 적층구조로 마스크절연막 및 절연막 스페이서를 각각 형성하는 것이다.이하, 첨부된 도면을 참고로 하여 본 발명은 상세히 설명하기로 한다.In order to achieve the above object, in the self-aligned contact method of a semiconductor device according to the present invention, a conductive layer, a first insulating film, and a first silicon rich silicon oxynitride film are formed on a semiconductor substrate at a predetermined thickness and patterned to form a conductive wiring. Forming a stacked structure spacer of a second insulating film and a second silicon rich silicon oxynitride film on the sidewalls of the conductive wiring; forming an interlayer insulating film to planarize the entire surface; and a predetermined portion of the semiconductor substrate. And forming self-aligned contact holes to expose the first and second insulating films, wherein the first and second insulating layers are in-situ by controlling a silicon rich source gas during the process of forming the first and second silicon rich silicon oxynitride layers. The silicon oxynitride layer is formed, and the self-aligned contact etching process includes the interlayer insulating layer and the first and second silicon rich silicon acids. The nitride film may be performed using a CF plasma having a sufficient etching selectivity difference, and the self-aligned contact etching process may be performed by adding an inert gas such as argon or helium to improve the stability of the etching process. The self-aligned contact etching process is performed using a carbon-rich (C-rich) fluorine gas such as C 3 F 8 , C 5 F 8, etc., the contact etching process is a etch stop due to the polymer by adding a CHF-based gas The first and second insulating films are formed of a silicon oxide film. The principle of the present invention is as follows. The present invention uses a silicon nitride film as a mask insulating film and an insulating film spacer and reflects the same. In order to solve the problems caused by the prior art using the silicon oxynitride film as the prevention film, in the recent prior art, the reflection In order to form a self-aligned contact process by forming a mask insulating film and an insulating film spacer of a conductive wiring using a single layer of silicon rich silicon oxynitride without a layer, the electrical properties of the silicon rich silicon oxynitride are lower than those of the silicon nitride. In order to prevent the above electrical property degradation, a silicon oxynitride film or a silicon oxide film is formed under the silicon rich silicon oxynitride film, thereby forming a laminated structure of the silicon oxynitride film / silicon rich silicon oxynitride film or A mask insulating film and an insulating film spacer are respectively formed in a stacked structure. Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

도 2a 및 도 2b 는 본 발명의 실시예에 따른 반도체소자의 자기정렬적인 콘택방법을 도시한 단면도이다.2A and 2B are cross-sectional views illustrating a self-aligned contact method of a semiconductor device according to an embodiment of the present invention.

먼저, 반도체기판(11) 상부에 게이트전극용 도전체(13), 제1 실리콘산화질화막(15)과 제1실리콘리치 실리콘산화질화막(17)을 적층한다.First, the gate electrode conductor 13, the first silicon oxynitride film 15, and the first silicon rich silicon oxynitride film 17 are stacked on the semiconductor substrate 11.

이때, 상기 제1실리콘리치 실리콘산화질화막(17)은 실리콘이 20 퍼센트 부피비로 포함된 실리콘산화질화막이다.In this case, the first silicon rich silicon oxynitride layer 17 is a silicon oxynitride layer containing 20 percent by volume of silicon.

그리고, 상기 제1실리콘산화질화막(15)은 통상의 실리콘산화질화막으로서, 상기 제2실리콘리치 실리콘산화질화막(17)의 형성공정중 공급되는 실리콘의 소오스 가스를 조절함으로써, 상기 제1실리콘산화질화막(15)과 제 1실리콘리치 실리콘산화질화막(17)을 인-시튜로 형성할 수 있다.The first silicon oxynitride film 15 is a conventional silicon oxynitride film, and the first silicon oxynitride film is controlled by adjusting the source gas of silicon supplied during the process of forming the second silicon rich silicon oxynitride film 17. 15 and the first silicon rich silicon oxynitride film 17 can be formed in-situ.

그 다음, 상기 적층구조 상부에 감광막을 도포하고 이를 게이트전극 마스크(도시안됨)를 이용한 노광 및 현상공정으로 감광막패턴(도시안됨)을 형성한다.Next, a photoresist film is coated on the laminated structure, and a photoresist pattern (not shown) is formed by an exposure and development process using a gate electrode mask (not shown).

그리고, 상기 감광막패턴을 마스크로하여 상기 적층구조를 식각하여 상측에 제1 실리콘산화질화막(15)과 제1실리콘리치 실리콘산화질화막(17)의 적층구조가 구비되는 게이트전극을 형성한다. (도 2a)The laminate structure is etched using the photoresist pattern as a mask to form a gate electrode having a laminate structure of a first silicon oxynitride film 15 and a first silicon rich silicon oxynitride film 17 thereon. (FIG. 2A)

그 다음, 전체표면상부에 제2 실리콘산화질화막(19)을 일정두께 형성하고 이를 이방성식각하여 상기 게이트전극 측벽에 상기 제2 실리콘산화질화막(19)으로 절연막 제1스페이서를 형성한다.Next, a second silicon oxynitride film 19 is formed on the entire surface and anisotropically etched to form an insulating film first spacer on the sidewall of the gate electrode with the second silicon oxynitride film 19.

그리고, 전체표면상부에 제2실리콘리치 실리콘산화질화막(21)을 일정두께 형성하고 이를 이방성식각하여 상기 절연막 제1스페이서(19) 측벽에 상기 제2실리콘리치 실리콘산화질화막(21)으로 절연막 제2스페이서를 형성한다.A second silicon rich silicon oxynitride layer 21 is formed on the entire surface and anisotropically etched to form a second thickness of the second silicon rich silicon oxynitride layer 21 on the sidewalls of the first spacer layer 19. Form a spacer.

한편, 상기 제1 및 제2 실리콘산화질화막(15,19)은 실리콘산화막으로 대신할 수도 있다.The first and second silicon oxynitride layers 15 and 19 may be replaced with silicon oxide layers.

그 다음, 전체표면 상부를 평탄화시키는 층간절연막(23)을 형성한다. 이때, 상기 층간절연막(23)은 BPSG 와 같이 유동성이 우수한 절연물질로 형성한다.Next, an interlayer insulating film 23 is formed to planarize the entire upper surface. In this case, the interlayer insulating film 23 is formed of an insulating material having excellent fluidity, such as BPSG.

그리고, 비트라인이나 저장전극을 형성할 수 있는 콘택마스크를 이용한 식각공정으로 상기 층간절연막(23)을 자기정렬적으로 식각하여 상기 반도체기판(11)의 예정된 부분을 노출시키는 콘택홀(25)을 형성한다.In addition, a contact hole 25 exposing a predetermined portion of the semiconductor substrate 11 by self-aligning the interlayer insulating layer 23 by an etching process using a contact mask capable of forming a bit line or a storage electrode. Form.

이때, 상기 자기정렬적인 콘택식각공정은 상기 층간절연막(23)과 제1 및 2실리콘리치 실리콘산화질화막(17,21)이 충분한 식각선택비 차이를 가질 수 있는 C4F8/ CH2F2등의 C-F 계 플라즈마를 이용하여 실시한다.In this case, the self-aligned contact etching process of which the interlayer insulating film 23 and the first and second silicon-rich silicon oxy-nitride film (17,21) can have a sufficient etching selection ratio difference C 4 F 8 / CH 2 F 2 It is performed using a CF plasma such as the above.

그리고, 상기 식각공정의 안정성을 향상시키기 위하여 아르곤이나 헬륨 등과 같은 불활성가스를 첨가하여 실시할 수도 있다.In order to improve the stability of the etching process, an inert gas such as argon or helium may be added.

그리고, 상기 식각공정은 C3F8, C5F8등과 같은 탄소 리치 ( C-rich ) 불소가스를 이용하여 실시할 수도 있다. 여기에 C-H-F 계 가스를 첨가하여 폴리머로 인한 식각정지 현상을 없애면서 고선택비를 갖도록 실시할 수도 있다. (도 2b)In addition, the etching process may be performed using a carbon rich (C-rich) fluorine gas such as C 3 F 8 , C 5 F 8, or the like. CHF-based gas may be added thereto to remove the etch stop due to the polymer and to have a high selectivity. (FIG. 2B)

한편, 상기 게이트전극 대신 비트라인의 마스크절연막 및 절연막 스페이서로 본 발명과 같은 실리콘산화질화막과 실리콘리치 실리콘산화질화막의 적층구조를 형성할 수 있어 비트라인 콘택공정이나 저장전극 콘택공정에 적용할 수도 있다.Meanwhile, the stacked structure of the silicon oxynitride layer and the silicon rich silicon oxynitride layer may be formed using the mask insulation layer and the insulation spacer of the bit line instead of the gate electrode, and thus may be applied to the bit line contact process or the storage electrode contact process. .

이상에서 설명한 바와 같이 본 발명에 따른 반도체소자의 자기정렬적인 콘택방법은, 통상의 실리콘산화질화막과 실리콘리치 실리콘산화질화막 또는 통상의 실리콘산화막과 실리콘리치 실리콘산화질화막의 적층구조로 마스크절연막 및 절연막 스페이서를 각각 형성하여 자기정렬적인 콘택공정을 용이하게 실시할 수 있도록 하는 효과가 있다.As described above, the self-aligned contact method of the semiconductor device according to the present invention includes a mask insulating film and an insulating film spacer in a stacked structure of a conventional silicon oxynitride film and a silicon rich silicon oxynitride film or a conventional silicon oxide film and a silicon rich silicon oxynitride film. Forming each has the effect of being able to easily perform a self-aligned contact process.

Claims (7)

반도체기판 상부에 도전체, 제1 절연막 및 제1실리콘리치 실리콘산화질화막을 일정두께 형성하고 이들을 패터닝하여 도전배선을 형성하는 공정과,Forming a conductive wiring on the semiconductor substrate by forming a conductor, a first insulating film, and a first silicon rich silicon oxynitride film at a predetermined thickness to form a conductive wiring; 상기 도전배선 측벽에 제2 절연막과 제2실리콘리치 실리콘산화질화막의 적층구조 스페이서를 형성하는 공정과,Forming a stacked structure spacer of a second insulating film and a second silicon rich silicon oxynitride film on the sidewalls of the conductive wirings; 전체표면상부를 평탄화시키는 층간절연막을 형성하는 공정과,Forming an interlayer insulating film to planarize the entire upper surface; 상기 반도체기판의 예정된 부분을 노출시키는 콘택홀을 자기정렬적으로 형성하는 공정을 포함하는 반도체소자의 자기정렬적인 콘택방법.And self-aligning a contact hole for exposing a predetermined portion of the semiconductor substrate. 제 1 항에 있어서,The method of claim 1, 상기 제1,2 절연막은 상기 제1,2 실리콘리치 실리콘산화질화막의 형성공정시 실리콘 리치 소오스 가스를 조절하여 인-시튜로 형성한 실리콘산화질화막인 것을 특징으로하는 반도체소자의 콘택방법.And the first and second insulating films are silicon oxynitride films formed in-situ by controlling a silicon rich source gas during the process of forming the first and second silicon rich silicon oxynitride films. 제 1 항에 있어서,The method of claim 1, 상기 자기정렬적인 콘택식각공정은 상기 층간절연막과 제1,2실리콘리치 실리콘산화질화막이 충분한 식각선택비 차이를 가질 수 있는 C-F 계 플라즈마를 이용하여 실시하는 것을 특징으로하는 반도체소자의 자기정렬적인 콘택방법.The self-aligned contact etching process is a self-aligned contact of the semiconductor device, characterized in that the interlayer insulating film and the first and second silicon rich silicon oxynitride film using a CF plasma that can have a sufficient etching selectivity difference. Way. 제 3 항에 있어서,The method of claim 3, wherein 상기 자기정렬적인 콘택식각공정은 식각공정의 안정성을 향상시키기 위하여 아르곤이나 헬륨 등과 같은 불활성가스를 첨가하여 실시하는 것을 특징으로하는 반도체소자의 자기정렬적인 콘택방법.The self-aligned contact etching process is a self-aligned contact method of a semiconductor device, characterized in that to perform the addition of an inert gas, such as argon or helium in order to improve the stability of the etching process. 제 1 항에 있어서,The method of claim 1, 상기 자기정렬적인 콘택식각공정은 C3F8, C5F8등과 같은 탄소 리치 ( C-rich ) 불소가스를 이용하여 실시하는 것을 특징으로하는 반도체소자의 자기정렬적인 콘택방법.The self-aligned contact etching process is a self-aligned contact method of a semiconductor device, characterized in that performed using carbon-rich (C-rich) fluorine gas, such as C 3 F 8 , C 5 F 8 . 제 5 항에 있어서,The method of claim 5, 상기 콘택식각공정은 C-H-F 계 가스를 첨가하여 폴리머로 인한 식각정지 현상을 억제하는 것을 특징으로하는 반도체소자의 자기정렬적인 콘택방법.The contact etching process is a self-aligned contact method of a semiconductor device, characterized in that by adding a C-H-F-based gas to suppress the etch stop due to the polymer. 제 1 항에 있어서,The method of claim 1, 상기 제1 및 2 절연막은 실리콘산화막으로 형성하는 것을 특징으로하는 반도체소자의 자기정렬적인 콘택방법.And the first and second insulating films are formed of a silicon oxide film.
KR10-1999-0021770A 1998-11-12 1999-06-11 A method of manufacturing self align contact of semiconductor device KR100372770B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-1999-0021770A KR100372770B1 (en) 1999-06-11 1999-06-11 A method of manufacturing self align contact of semiconductor device
JP31969699A JP4776747B2 (en) 1998-11-12 1999-11-10 Contact formation method of semiconductor element
US09/438,048 US6316349B1 (en) 1998-11-12 1999-11-10 Method for forming contacts of semiconductor devices
TW088119815A TW449872B (en) 1998-11-12 1999-11-10 Method for forming contacts of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-1999-0021770A KR100372770B1 (en) 1999-06-11 1999-06-11 A method of manufacturing self align contact of semiconductor device

Publications (2)

Publication Number Publication Date
KR20010002130A KR20010002130A (en) 2001-01-05
KR100372770B1 true KR100372770B1 (en) 2003-02-20

Family

ID=19591687

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1999-0021770A KR100372770B1 (en) 1998-11-12 1999-06-11 A method of manufacturing self align contact of semiconductor device

Country Status (1)

Country Link
KR (1) KR100372770B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100844935B1 (en) * 2002-07-19 2008-07-09 주식회사 하이닉스반도체 Method for fabricating semiconductor device with landing plug contact structure

Also Published As

Publication number Publication date
KR20010002130A (en) 2001-01-05

Similar Documents

Publication Publication Date Title
KR100292940B1 (en) Method for fabricating dram cell capacitor
KR100512904B1 (en) Fabricating method for semiconductor device
KR100403328B1 (en) Forming method for self aligned contact of semiconductor device
KR100372770B1 (en) A method of manufacturing self align contact of semiconductor device
KR100468697B1 (en) Apparatus comprising damascene bit lines and method for manufacturing the same
KR100440079B1 (en) Forming method for self aligned contact of semiconductor device
KR100440076B1 (en) Forming method for self aligned contact of semiconductor device
KR20020017845A (en) A method for forming a bit line of a semiconductor device
KR100301148B1 (en) Forming method for hard mask of semiconductor device
KR100282416B1 (en) Method for fabricating semiconductor device
KR20000045442A (en) Fabrication method of contacts for semiconductor device
KR100361210B1 (en) Method of forming a contact hole in a semiconductor device
KR100400321B1 (en) A method for forming of a semiconductor device
KR100421278B1 (en) Fabricating method for semiconductor device
KR100668726B1 (en) Method for forming the bit line contact in semiconductor device
KR20000045482A (en) Etching method of semiconductor device
KR0162140B1 (en) Formation method of contact hole
KR20050002005A (en) Method for fabricating semiconductor device capable of forming storage node contact hole and insulating spacer of bit line
KR100431818B1 (en) Forming method for self aligned contact of semiconductor device
KR20050066192A (en) A method for forming a contact of a semiconductor device
KR20030058634A (en) Manufacturing method for semiconductor device
KR100444312B1 (en) Method for forming fine contact of semiconductor device using insulating spacer
KR20030058636A (en) A method for forming of a semiconductor device
KR100451989B1 (en) A method for forming a metal line of semiconductor device
KR100843903B1 (en) Method for manufacturing of semiconductor device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20110126

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee