KR100358965B1 - 맥동 저감장치부착 펌프 - Google Patents
맥동 저감장치부착 펌프 Download PDFInfo
- Publication number
- KR100358965B1 KR100358965B1 KR1020000057010A KR20000057010A KR100358965B1 KR 100358965 B1 KR100358965 B1 KR 100358965B1 KR 1020000057010 A KR1020000057010 A KR 1020000057010A KR 20000057010 A KR20000057010 A KR 20000057010A KR 100358965 B1 KR100358965 B1 KR 100358965B1
- Authority
- KR
- South Korea
- Prior art keywords
- bellows
- pump
- chamber
- liquid
- pulsation
- Prior art date
Links
- 230000010349 pulsation Effects 0.000 title claims abstract description 76
- 230000001603 reducing effect Effects 0.000 title claims abstract description 34
- 239000007788 liquid Substances 0.000 claims abstract description 86
- 230000008859 change Effects 0.000 claims abstract description 6
- 230000005489 elastic deformation Effects 0.000 claims abstract description 5
- 230000009471 action Effects 0.000 claims description 19
- 238000010276 construction Methods 0.000 claims description 13
- 230000009467 reduction Effects 0.000 claims description 13
- 230000008602 contraction Effects 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 7
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 5
- 241000220317 Rosa Species 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 description 14
- 238000007789 sealing Methods 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000126 substance Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229920001774 Perfluoroether Polymers 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000035485 pulse pressure Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B11/00—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
- F04B11/0008—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators
- F04B11/0016—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators with a fluid spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/0027—Pulsation and noise damping means
- F04B39/0055—Pulsation and noise damping means with a special shape of fluid passage, e.g. bends, throttles, diameter changes, pipes
- F04B39/0061—Pulsation and noise damping means with a special shape of fluid passage, e.g. bends, throttles, diameter changes, pipes using muffler volumes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
- F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
- F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
- F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
- F04B9/123—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having only one pumping chamber
- F04B9/125—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having only one pumping chamber reciprocating movement of the pumping member being obtained by a double-acting elastic-fluid motor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
Claims (5)
- 액체의 유입로 및 유출로를 구비한 펌프헤드 구성벽과, 상기 펌프헤드 구성벽의 한 측부에 배설된 케이싱내를 축선 방향을 따라서 신축변형이 가능한 수지제의 제1벨로즈와, 이 제1벨로즈를 구동 신축변형운동을 시키는 에어실린더부와, 상기 제1벨로즈의 내측에 그 제1벨로즈의 신축변형운동에 수반하여 교호로 개폐를 작동시켜 액체의 흡입작용 및 토출작용을 행하는 체크밸브가 설치된 펌프작용실을 구비하여 이루어지는 에어구동형 왕복운동 펌프부와,상기 펌프헤드 구성벽의 다른 측부에 배설된 케이싱내에 배설되어 신축변형이 가능한 수지제의 제2벨로즈와, 이 제2벨로즈의 내측에 형성되어 상기 펌프 작용실로부터 토출용 체크밸브를 경유하여 토출되는 액체를 일시적으로 저류 가능하게 하는 액체실과, 상기 제2벨로즈의 외측에 상기 액체실에 대하여 격리형성되어 맥동 저감용의 공기가 봉입되는 공기실을 구비하여, 상기 제2벨로즈의 신축변형운동에 수반하는 상기 액체실의 용량변화에 의해 상기 펌프작용실로부터 토출되는 액체의 토출압에 의한 맥동을 흡수시키도록 구성한 맥동 저감부를 구비하고 있는 맥동 저감장치부착 펌프로서,상기 제2벨로즈의 신장률을 상기 제1벨로즈의 그것보다 크게 설정하고 있는 것을 특징으로 하는 맥동 저감장치부착 펌프.
- 제1항에 있어서,상기 제1벨로즈 및 제2벨로즈는 동일한 수지재료로 성형하며, 제2벨로즈의 두께를 제1벨로즈의 그것보다 얇게 성형하고 있는 것을 특징으로 하는 맥동 저감장치부착 펌프.
- 제1항에 있어서,상기 제1벨로즈 및 제2벨로즈가 공히 폴리4불화에틸렌에 의해 이루어지며, 또한 제2벨로즈의 두께를 제1벨로즈의 그것보다 얇게 하고 있는 것을 특징으로 하는 맥동 저감장치부착 펌프.
- 제3항에 있어서,상기 제1벨로즈 및 제2벨로즈가 공히 폴리4불화에틸렌에 의해 이루어지며, 또한 제1벨로즈와 제2벨로즈의 두께의 비(제2벨로즈의 두께/제1벨로즈의 두께)가 1 미만인 것을 특징으로 하는 맥동 저감장치부착 펌프.
- 제1항 내지 제4항의 어느 한 항에 있어서,상기 왕복운동 펌프부가 한 쌍의 제1벨로즈를 구비하고 있는 것을 특징으로 하는 맥동 저감장치부착 펌프.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-302485 | 1999-10-25 | ||
JP30248599A JP3205909B2 (ja) | 1999-10-25 | 1999-10-25 | 脈動低減装置付きポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010039937A KR20010039937A (ko) | 2001-05-15 |
KR100358965B1 true KR100358965B1 (ko) | 2002-10-31 |
Family
ID=17909533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000057010A KR100358965B1 (ko) | 1999-10-25 | 2000-09-28 | 맥동 저감장치부착 펌프 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6364640B1 (ko) |
EP (1) | EP1096147B1 (ko) |
JP (1) | JP3205909B2 (ko) |
KR (1) | KR100358965B1 (ko) |
DE (1) | DE60034096T2 (ko) |
TW (1) | TW508408B (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101295374B1 (ko) * | 2011-06-01 | 2013-08-12 | 한국수력원자력 주식회사 | 황-요오드 수소생산공정용 황산용액 이송장치 |
KR101733634B1 (ko) | 2017-02-24 | 2017-05-08 | 주식회사 이노디스 | 벨로우즈 펌프 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3845544B2 (ja) * | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
JP3761754B2 (ja) * | 1999-11-29 | 2006-03-29 | 日本ピラー工業株式会社 | ポンプ、アキュムレータ等の流体機器 |
JP3610272B2 (ja) * | 1999-11-29 | 2005-01-12 | 日本ピラー工業株式会社 | ベローズを有する流体機器 |
TW200415310A (en) * | 2002-12-03 | 2004-08-16 | Nippon Pillar Packing | A pump |
JP3874416B2 (ja) | 2003-05-02 | 2007-01-31 | 日本ピラー工業株式会社 | 往復動ポンプ |
JP5116153B2 (ja) * | 2008-03-20 | 2013-01-09 | Nok株式会社 | ベローズ式アキュムレータ |
JP4982515B2 (ja) | 2009-02-24 | 2012-07-25 | 日本ピラー工業株式会社 | ベローズポンプ |
JP5062910B2 (ja) * | 2009-07-29 | 2012-10-31 | 日本ピラー工業株式会社 | ベローズポンプ |
US9010353B2 (en) | 2011-08-04 | 2015-04-21 | Weatherford Technology Holdings, Llc | Gas lift valve having edge-welded bellows and captive sliding seal |
TWI452207B (zh) * | 2012-01-12 | 2014-09-11 | Hong Kel Trading Co Ltd | 往復式泵浦 |
DE102012102700A1 (de) * | 2012-03-29 | 2013-10-02 | Elringklinger Ag | Dichtungsanordnung |
JP6353732B2 (ja) * | 2014-08-04 | 2018-07-04 | 日本ピラー工業株式会社 | ベローズポンプ装置 |
SG11201702586XA (en) | 2014-10-08 | 2017-04-27 | Air Prod & Chem | Low pressure fluctuation flow control apparatus and method |
JP6362535B2 (ja) | 2014-12-25 | 2018-07-25 | 日本ピラー工業株式会社 | ベローズポンプ装置 |
GB201601194D0 (en) | 2016-01-22 | 2016-03-09 | Carlisle Fluid Tech Inc | Active surge chamber |
NO344401B1 (en) * | 2017-07-04 | 2019-11-25 | Rsm Imagineering As | Method, system and use, of controlling working range of a pump bellows |
NO20171100A1 (en) * | 2017-07-04 | 2019-01-07 | Rsm Imagineering As | A dual-acting pressure boosting liquid partition device, system, fleet and use |
US11499543B2 (en) | 2018-05-25 | 2022-11-15 | Graco Minnesota Inc. | Pneumatic surge suppressor |
US11326425B2 (en) * | 2020-03-17 | 2022-05-10 | Silverwell Technology Ltd | Pressure protection system for lift gas injection |
CN114017575B (zh) * | 2022-01-06 | 2022-05-20 | 智程半导体设备科技(昆山)有限公司 | 一种脉冲阻尼器及半导体设备 |
Family Cites Families (16)
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GB1464024A (en) * | 1974-09-13 | 1977-02-09 | Pye Ltd | Pulse dampers for liquid chromatography |
US4177023A (en) * | 1975-02-25 | 1979-12-04 | Toyota Jidosha Kogyo Kabushiki Kaisha | Pneumatic system for smoothing discharge pressure from air |
US4523612A (en) * | 1983-04-15 | 1985-06-18 | The United States Of America As Represented By The United States Department Of Energy | Apparatus and method for suppressing vibration and displacement of a bellows |
US4537216A (en) * | 1984-07-13 | 1985-08-27 | Edwin Schwartz | Anti-knock liquid flow control valve |
JP2649091B2 (ja) * | 1989-09-05 | 1997-09-03 | 株式会社 豊田中央研究所 | 高圧液体供給装置 |
JPH03179184A (ja) * | 1989-12-05 | 1991-08-05 | Nippon Pillar Packing Co Ltd | 往復動ポンプ |
US5129427A (en) * | 1991-04-17 | 1992-07-14 | The Aro Corporation | Pulsation damper for a pumped liquid system |
US5205326A (en) * | 1991-08-23 | 1993-04-27 | Hydraulic Power Systems, Inc. | Pressure response type pulsation damper noise attenuator and accumulator |
CA2158215A1 (en) * | 1994-09-19 | 1996-03-20 | Richard R. Larsen | Pressure balanced bellows seal |
JP3310566B2 (ja) * | 1997-01-10 | 2002-08-05 | 日本ピラー工業株式会社 | 半導体製造装置用ポンプ |
US5845621A (en) * | 1997-06-19 | 1998-12-08 | Siemens Automotive Corporation | Bellows pressure pulsation damper |
JP3471587B2 (ja) * | 1997-10-27 | 2003-12-02 | 三菱電機株式会社 | 筒内噴射用高圧燃料ポンプ |
JPH11132130A (ja) * | 1997-10-27 | 1999-05-18 | Mitsubishi Electric Corp | 筒内噴射用高圧燃料ポンプ |
JP3577580B2 (ja) * | 1998-03-17 | 2004-10-13 | 東京エレクトロン株式会社 | 空気駆動式液体供給装置 |
US6095194A (en) * | 1998-03-20 | 2000-08-01 | Nippon Pillar Packaging Co., Ltd. | Pulsation suppression device for a pump |
KR100363748B1 (ko) * | 1998-10-26 | 2002-12-11 | 니폰 필라고교 가부시키가이샤 | 펌프의 맥동 감쇠장치 |
-
1999
- 1999-10-25 JP JP30248599A patent/JP3205909B2/ja not_active Expired - Lifetime
-
2000
- 2000-09-15 TW TW089118999A patent/TW508408B/zh not_active IP Right Cessation
- 2000-09-28 KR KR1020000057010A patent/KR100358965B1/ko active IP Right Grant
- 2000-10-11 US US09/685,092 patent/US6364640B1/en not_active Expired - Lifetime
- 2000-10-13 EP EP00122475A patent/EP1096147B1/en not_active Expired - Lifetime
- 2000-10-13 DE DE60034096T patent/DE60034096T2/de not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101295374B1 (ko) * | 2011-06-01 | 2013-08-12 | 한국수력원자력 주식회사 | 황-요오드 수소생산공정용 황산용액 이송장치 |
KR101733634B1 (ko) | 2017-02-24 | 2017-05-08 | 주식회사 이노디스 | 벨로우즈 펌프 |
Also Published As
Publication number | Publication date |
---|---|
KR20010039937A (ko) | 2001-05-15 |
DE60034096T2 (de) | 2007-12-06 |
DE60034096D1 (de) | 2007-05-10 |
TW508408B (en) | 2002-11-01 |
EP1096147A3 (en) | 2003-01-02 |
JP2001123959A (ja) | 2001-05-08 |
EP1096147B1 (en) | 2007-03-28 |
JP3205909B2 (ja) | 2001-09-04 |
EP1096147A2 (en) | 2001-05-02 |
US6364640B1 (en) | 2002-04-02 |
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