KR100326609B1 - 청정실설비 - Google Patents

청정실설비 Download PDF

Info

Publication number
KR100326609B1
KR100326609B1 KR1019940021345A KR19940021345A KR100326609B1 KR 100326609 B1 KR100326609 B1 KR 100326609B1 KR 1019940021345 A KR1019940021345 A KR 1019940021345A KR 19940021345 A KR19940021345 A KR 19940021345A KR 100326609 B1 KR100326609 B1 KR 100326609B1
Authority
KR
South Korea
Prior art keywords
clean room
clean
installation according
plates
noise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940021345A
Other languages
English (en)
Korean (ko)
Other versions
KR950006370A (ko
Inventor
만프레드렌지
루돌프시몬
울리에서
Original Assignee
마이스너 부르스트 게엠베하 앤드 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 마이스너 부르스트 게엠베하 앤드 컴파니 filed Critical 마이스너 부르스트 게엠베하 앤드 컴파니
Publication of KR950006370A publication Critical patent/KR950006370A/ko
Application granted granted Critical
Publication of KR100326609B1 publication Critical patent/KR100326609B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/14—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the particular extruding conditions, e.g. in a modified atmosphere or by using vibration
    • B29C48/141—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the particular extruding conditions, e.g. in a modified atmosphere or by using vibration extruding in a clean room
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00—Shaping characteristics in general
    • B29C2791/004—Shaping under special conditions
    • B29C2791/005—Using a particular environment, e.g. sterile fluids other than air
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S454/00—Ventilation
    • Y10S454/906—Noise inhibiting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
KR1019940021345A 1993-08-28 1994-08-29 청정실설비 Expired - Fee Related KR100326609B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DEP4328995.916 1993-08-28
DE4328995A DE4328995C2 (de) 1993-08-28 1993-08-28 Reinraumanlage
DEP4328995.9 1993-08-28

Publications (2)

Publication Number Publication Date
KR950006370A KR950006370A (ko) 1995-03-20
KR100326609B1 true KR100326609B1 (ko) 2002-08-27

Family

ID=6496261

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940021345A Expired - Fee Related KR100326609B1 (ko) 1993-08-28 1994-08-29 청정실설비

Country Status (6)

Country Link
US (1) US5518451A (enExample)
EP (1) EP0641977B1 (enExample)
KR (1) KR100326609B1 (enExample)
DE (2) DE4328995C2 (enExample)
ES (1) ES2115120T3 (enExample)
TW (1) TW298611B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100252215B1 (ko) * 1997-05-02 2000-04-15 윤종용 클린룸 계측장치 상태 모니터링 시스템 및 그를 이용한 모니터링 방법
CN1348392A (zh) 1999-04-28 2002-05-08 斯特拉托泰克公司 可调的净化空气气流场
US6574937B1 (en) * 1999-09-07 2003-06-10 Speedfam-Ipec Corporation Clean room and method
US7083515B2 (en) * 1999-09-07 2006-08-01 Speedfam-Ipec Corporation Clean room facility and construction method
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
WO2007025199A2 (en) * 2005-08-26 2007-03-01 Flitsch Frederick A Multi-level cleanspace fabricator elevator system
CN102986016B (zh) 2005-09-18 2015-11-25 弗雷德里克·A·弗里奇 用于在洁净空间中垂直定位基片处理设备的方法和装置
KR100650987B1 (ko) * 2005-10-18 2006-11-29 김재성 저소음형 공조 패키지 및 이를 이용한 수술실 공조 시스템
KR100789484B1 (ko) * 2006-04-25 2008-01-02 김재성 저소음형 공조 패키지 및 이를 이용한 수술실 공조 시스템
US7779960B2 (en) * 2006-08-18 2010-08-24 Hewlett-Packard Development Company, L.P. System and method for noise suppression
FR2914400B1 (fr) * 2007-03-30 2009-06-26 Data 4 Soc Par Actions Simplif Systeme de climatisation d'une piece
US9435552B2 (en) * 2007-12-14 2016-09-06 Ge-Hitachi Nuclear Energy Americas Llc Air filtration and handling for nuclear reactor habitability area
US8087492B2 (en) * 2010-03-08 2012-01-03 Huntair, Inc. Methods and systems for integrating sound attenuation into a filter bank
JP5427833B2 (ja) * 2011-05-18 2014-02-26 パナソニック株式会社 クリーンルームの逆流防止装置
DE202012100465U1 (de) * 2012-02-10 2012-03-14 Daldrop + Dr. Ing. Huber Gmbh & Co. Kg Lüftungsgerät für Reinraumanwendungen
US9631825B2 (en) 2012-12-18 2017-04-25 Nortek Air Solutions, Llc Air filter assembly
CN111457530A (zh) * 2020-04-01 2020-07-28 北京联合大学 洁净室内移动污染源污染气隐藏式快速清除系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125286A (en) * 1964-03-17 sanders
US1916908A (en) * 1929-06-04 1933-07-04 Carrier Engineering Corp Sound absorbing means
US1964845A (en) * 1933-09-14 1934-07-03 American Telephone & Telegraph Ventilator
US2112608A (en) * 1936-05-20 1938-03-29 Westinghouse Electric & Mfg Co Sound absorbing structure
US2270825A (en) * 1939-12-12 1942-01-20 Johns Manville Sound-absorbing structure
US3975995A (en) * 1975-03-13 1976-08-24 American Air Filter Company, Inc. Ventilated ceiling construction
DE2920278C2 (de) * 1979-05-18 1984-01-12 Aktiengesellschaft Kühnle, Kopp & Kausch, 6710 Frankenthal Schalldämpfungseinrichtung
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
US4608066A (en) * 1985-07-31 1986-08-26 Flanders Filters, Inc. Clean room adapted for variable work area configurations
US4747341A (en) * 1986-11-19 1988-05-31 Donaldson Company, Inc. Integral grid structure for providing negative pressure plenum
US4860420A (en) * 1987-04-07 1989-08-29 Flanders Filters, Inc. Method of fabricating a clean room filter bank
DE3832915A1 (de) * 1988-09-28 1990-03-29 Martin Gabler Reinraum
JPH0650193B2 (ja) * 1988-12-01 1994-06-29 日立プラント建設株式会社 クリーンルームの床下ダクト構造
JP2517112B2 (ja) * 1989-06-21 1996-07-24 松下電器産業株式会社 クリ―ントンネル
JP2574573B2 (ja) * 1991-10-18 1997-01-22 松下精工株式会社 換気扇

Also Published As

Publication number Publication date
US5518451A (en) 1996-05-21
KR950006370A (ko) 1995-03-20
EP0641977B1 (de) 1998-04-01
DE4328995C2 (de) 1997-01-23
ES2115120T3 (es) 1998-06-16
TW298611B (enExample) 1997-02-21
DE4328995A1 (de) 1995-03-02
EP0641977A1 (de) 1995-03-08
DE59405568D1 (de) 1998-05-07

Similar Documents

Publication Publication Date Title
KR100326609B1 (ko) 청정실설비
US10775074B2 (en) Sound attenuating air handler panel apparatus and method
US6290266B1 (en) Suction elbow provided with built-in guide blades
US3856439A (en) Sound proofed and air cooled shell for portable air compressor
RU2074293C1 (ru) Модуль для конструкции потолка в помещениях стерильной чистоты
JP2831114B2 (ja) 高速運行エレベータかごの換気装置
KR100240379B1 (ko) 공기냉각장치용 소음감쇠조립체
US20190280555A1 (en) Enclosure with inlet and outlet baffles for generator set
IE920336A1 (en) Filter/ventilator apparatus for use in clean rooms
US3101038A (en) Air and light distributor unit
US5232401A (en) Air supplying apparatus
US3752226A (en) Environmental air control unit
CN111189127A (zh) 空调室外机用消声隔音装置
CN1099827C (zh) 冷却设备柜的方法和结构
JPH0583817B2 (enExample)
CN113183799B (zh) 充电桩
JP2010236538A (ja) 消音ボックス付送風機
US20250020363A1 (en) Sound-reducing exhaust air system
JP3094153B2 (ja) 空調用室内機
CN210571842U (zh) 粉尘检测装置及其腔体结构
RU2279015C1 (ru) Вентиляционный шумоглушитель
WO2025015314A1 (en) Sound-reducing exhaust air system
JPH07318130A (ja) 人工竜巻発生装置
SU1203335A1 (ru) Тепловентил тор Д.Н.Борченко
EP1447628B1 (en) Ceiling mounted indoor unit of an air conditioner

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20050220

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20050220

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000