KR100315134B1 - 열처리장치 및 그것에 사용되는 밸브장치 - Google Patents

열처리장치 및 그것에 사용되는 밸브장치 Download PDF

Info

Publication number
KR100315134B1
KR100315134B1 KR1019940038817A KR19940038817A KR100315134B1 KR 100315134 B1 KR100315134 B1 KR 100315134B1 KR 1019940038817 A KR1019940038817 A KR 1019940038817A KR 19940038817 A KR19940038817 A KR 19940038817A KR 100315134 B1 KR100315134 B1 KR 100315134B1
Authority
KR
South Korea
Prior art keywords
valve
valve body
heat treatment
opening
circumferential wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019940038817A
Other languages
English (en)
Korean (ko)
Other versions
KR950020998A (ko
Inventor
혼마겐지
니시흐로노부
Original Assignee
히가시 데쓰로
동경 엘렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP35274093A external-priority patent/JP3239972B2/ja
Priority claimed from JP35273993A external-priority patent/JP3237732B2/ja
Application filed by 히가시 데쓰로, 동경 엘렉트론 주식회사 filed Critical 히가시 데쓰로
Publication of KR950020998A publication Critical patent/KR950020998A/ko
Application granted granted Critical
Publication of KR100315134B1 publication Critical patent/KR100315134B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H01L21/205
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00Spindle sealings
    • F16K41/10Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/003Actuating devices; Operating means; Releasing devices operated without a stable intermediate position, e.g. with snap action
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04Actuating devices; Operating means; Releasing devices electric; magnetic using a motor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Furnace Details (AREA)
KR1019940038817A 1993-12-29 1994-12-29 열처리장치 및 그것에 사용되는 밸브장치 Expired - Lifetime KR100315134B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP35274093A JP3239972B2 (ja) 1993-12-29 1993-12-29 減圧熱処理炉用緊急遮断機能付弁装置及び熱処理装置
JP35273993A JP3237732B2 (ja) 1993-12-29 1993-12-29 減圧熱処理炉用開度可変弁装置及び熱処理装置
JP93-352740 1993-12-29
JP93-352739 1993-12-29

Publications (2)

Publication Number Publication Date
KR950020998A KR950020998A (ko) 1995-07-26
KR100315134B1 true KR100315134B1 (ko) 2002-04-24

Family

ID=26579700

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940038817A Expired - Lifetime KR100315134B1 (ko) 1993-12-29 1994-12-29 열처리장치 및 그것에 사용되는 밸브장치

Country Status (3)

Country Link
US (1) US5671903A (enExample)
KR (1) KR100315134B1 (enExample)
TW (1) TW275719B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29908901U1 (de) * 1999-05-20 1999-11-04 SAIA-Burgess GmbH, 01257 Dresden Vorrichtung zur Lagesicherung der Stellstange bei Motoren mit Sicherheitsverstellung
JP3522681B2 (ja) * 2000-02-02 2004-04-26 株式会社キッツエスシーティー 流量制御用バルブ
US6807984B2 (en) * 2001-12-26 2004-10-26 Fsi International, Inc. High flow high control valve and assembly
KR100862860B1 (ko) * 2002-10-07 2008-10-09 주식회사 포스코 소둔로의 가스투입관 개폐장치
CA2525082C (en) * 2004-03-12 2010-08-10 Toyota Jidosha Kabushiki Kaisha Valve
EP1946848B1 (en) 2005-10-21 2010-09-15 Musashi Engineering, Inc. Liquid material ejector
US7445194B2 (en) * 2006-09-19 2008-11-04 Continental Automotive Canada, Inc. Bellows for idle air control valve of vehicle
CN102829232B (zh) * 2011-06-14 2016-02-24 Tlx技术有限公司 用于助力致动器的螺线管联锁装置
KR101829093B1 (ko) * 2014-10-22 2018-03-29 주식회사 엘지화학 배터리 시스템의 냉각 공기 흐름 제어 시스템 및 방법
CN105508671B (zh) * 2016-02-02 2018-06-26 上海霍贝电机制造有限公司 一种适用于液化气钢瓶智能控制的阀门结构
CN109084029B (zh) * 2018-09-21 2023-10-31 双恒阀门集团有限公司 燃气调流阀
JP7313169B2 (ja) * 2019-03-19 2023-07-24 株式会社キッツエスシーティー 真空ベローズホットバルブ
CN111734884B (zh) * 2020-06-30 2021-05-07 宁波方太厨具有限公司 灶具阀体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2630832A (en) * 1948-10-13 1953-03-10 North American Mfg Co Safety shutoff valve
US2638929A (en) * 1949-06-04 1953-05-19 Delany Realty Corp Self-throttling valve
US2875616A (en) * 1957-07-19 1959-03-03 Ind Heat Engineering Company Safety cut-off valve
US3084901A (en) * 1960-11-17 1963-04-09 Powers Regulator Co Pressure compensated valve
US3422329A (en) * 1965-10-19 1969-01-14 Acf Ind Inc System for controlling remotely located electrically energized power operator devices
JPS5946311B2 (ja) * 1979-08-29 1984-11-12 株式会社村田製作所 熱処理された銅被膜の酸化防止法
DE3127913A1 (de) * 1981-07-15 1983-01-27 Gecos Armaturen GmbH, 4800 Bielefeld "stellventil"
US4793589A (en) * 1987-06-18 1988-12-27 Gilbarco Inc. Piston valve with proportional solenoid controlled pilot valve
US5113908A (en) * 1990-09-04 1992-05-19 Dresser Industries, Inc. Multistep trim design
DE4036491C2 (de) * 1990-11-16 1994-01-27 Danfoss As Magnetventil
JPH0599360A (ja) * 1991-10-04 1993-04-20 Hitachi Ltd 圧力制御装置および真空処理システム

Also Published As

Publication number Publication date
TW275719B (enExample) 1996-05-11
KR950020998A (ko) 1995-07-26
US5671903A (en) 1997-09-30

Similar Documents

Publication Publication Date Title
KR100315134B1 (ko) 열처리장치 및 그것에 사용되는 밸브장치
US6321780B1 (en) Valve for controlling flow rate of gas
US5356113A (en) Isolation valve for single crystal pulling apparatus
KR101333363B1 (ko) 열처리 장치
JP2001250787A (ja) 基板処理装置および基板処理方法
JP3032708B2 (ja) 真空用開閉弁
JP2006179699A (ja) 処理方法及び処理装置
JP3644880B2 (ja) 縦型熱処理装置
JP2008531943A (ja) ポンプダウン性能を改良したバルブ組立体
JP3330839B2 (ja) 真空圧力制御システム
US6572075B2 (en) Valve for controlling flow rate of gas
TWI498989B (zh) Gas port construction and processing device
JP3239972B2 (ja) 減圧熱処理炉用緊急遮断機能付弁装置及び熱処理装置
KR102372132B1 (ko) 기판 처리 장치의 제어 방법 및 기판 처리 장치
WO2001035453A1 (en) Heat treatment device
JP3543963B2 (ja) 熱処理装置
JP3237732B2 (ja) 減圧熱処理炉用開度可変弁装置及び熱処理装置
JPH04337171A (ja) 弁装置
JP4483040B2 (ja) 熱処理装置
JP7605781B2 (ja) 圧力制御バルブ
KR100889665B1 (ko) 열처리 장치
JP4212753B2 (ja) 縦型熱処理装置
TW200535958A (en) System, apparatus and method for contaminant reduction in semiconductor device fabrication equipment components
TW202136574A (zh) 控制閥、基板處理裝置及半導體裝置的製造方法
JP2008244409A (ja) 熱処理方法及び熱処理装置

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

FPAY Annual fee payment

Payment date: 20121023

Year of fee payment: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

FPAY Annual fee payment

Payment date: 20131022

Year of fee payment: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20141230

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000