TW275719B - - Google Patents

Info

Publication number
TW275719B
TW275719B TW084101180A TW84101180A TW275719B TW 275719 B TW275719 B TW 275719B TW 084101180 A TW084101180 A TW 084101180A TW 84101180 A TW84101180 A TW 84101180A TW 275719 B TW275719 B TW 275719B
Authority
TW
Taiwan
Application number
TW084101180A
Original Assignee
Tokyo Electron Co Ltd
Tokyo Electron Tohoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP35274093A external-priority patent/JP3239972B2/ja
Priority claimed from JP35273993A external-priority patent/JP3237732B2/ja
Application filed by Tokyo Electron Co Ltd, Tokyo Electron Tohoku Kk filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW275719B publication Critical patent/TW275719B/zh

Links

Classifications

    • H01L21/205—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/003—Actuating devices; Operating means; Releasing devices operated without a stable intermediate position, e.g. with snap action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Furnace Details (AREA)
TW084101180A 1993-12-29 1995-02-10 TW275719B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35274093A JP3239972B2 (ja) 1993-12-29 1993-12-29 減圧熱処理炉用緊急遮断機能付弁装置及び熱処理装置
JP35273993A JP3237732B2 (ja) 1993-12-29 1993-12-29 減圧熱処理炉用開度可変弁装置及び熱処理装置

Publications (1)

Publication Number Publication Date
TW275719B true TW275719B (zh) 1996-05-11

Family

ID=26579700

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084101180A TW275719B (zh) 1993-12-29 1995-02-10

Country Status (3)

Country Link
US (1) US5671903A (zh)
KR (1) KR100315134B1 (zh)
TW (1) TW275719B (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29908901U1 (de) * 1999-05-20 1999-11-04 SAIA-Burgess GmbH, 01257 Dresden Vorrichtung zur Lagesicherung der Stellstange bei Motoren mit Sicherheitsverstellung
JP3522681B2 (ja) * 2000-02-02 2004-04-26 株式会社キッツエスシーティー 流量制御用バルブ
US6807984B2 (en) * 2001-12-26 2004-10-26 Fsi International, Inc. High flow high control valve and assembly
KR100862860B1 (ko) * 2002-10-07 2008-10-09 주식회사 포스코 소둔로의 가스투입관 개폐장치
WO2005088175A1 (ja) * 2004-03-12 2005-09-22 Toyota Jidosha Kabushiki Kaisha 弁
EP1946848B1 (en) 2005-10-21 2010-09-15 Musashi Engineering, Inc. Liquid material ejector
US7445194B2 (en) * 2006-09-19 2008-11-04 Continental Automotive Canada, Inc. Bellows for idle air control valve of vehicle
CN102829232B (zh) * 2011-06-14 2016-02-24 Tlx技术有限公司 用于助力致动器的螺线管联锁装置
KR101829093B1 (ko) * 2014-10-22 2018-03-29 주식회사 엘지화학 배터리 시스템의 냉각 공기 흐름 제어 시스템 및 방법
CN105508671B (zh) * 2016-02-02 2018-06-26 上海霍贝电机制造有限公司 一种适用于液化气钢瓶智能控制的阀门结构
CN109084029B (zh) * 2018-09-21 2023-10-31 双恒阀门集团有限公司 燃气调流阀
JP7313169B2 (ja) * 2019-03-19 2023-07-24 株式会社キッツエスシーティー 真空ベローズホットバルブ
CN111734884B (zh) * 2020-06-30 2021-05-07 宁波方太厨具有限公司 灶具阀体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2630832A (en) * 1948-10-13 1953-03-10 North American Mfg Co Safety shutoff valve
US2638929A (en) * 1949-06-04 1953-05-19 Delany Realty Corp Self-throttling valve
US2875616A (en) * 1957-07-19 1959-03-03 Ind Heat Engineering Company Safety cut-off valve
US3084901A (en) * 1960-11-17 1963-04-09 Powers Regulator Co Pressure compensated valve
US3422329A (en) * 1965-10-19 1969-01-14 Acf Ind Inc System for controlling remotely located electrically energized power operator devices
JPS5946311B2 (ja) * 1979-08-29 1984-11-12 株式会社村田製作所 熱処理された銅被膜の酸化防止法
DE3127913A1 (de) * 1981-07-15 1983-01-27 Gecos Armaturen GmbH, 4800 Bielefeld "stellventil"
US4793589A (en) * 1987-06-18 1988-12-27 Gilbarco Inc. Piston valve with proportional solenoid controlled pilot valve
US5113908A (en) * 1990-09-04 1992-05-19 Dresser Industries, Inc. Multistep trim design
DE4036491C2 (de) * 1990-11-16 1994-01-27 Danfoss As Magnetventil
JPH0599360A (ja) * 1991-10-04 1993-04-20 Hitachi Ltd 圧力制御装置および真空処理システム

Also Published As

Publication number Publication date
KR950020998A (ko) 1995-07-26
KR100315134B1 (ko) 2002-04-24
US5671903A (en) 1997-09-30

Similar Documents

Publication Publication Date Title
FR2704266B1 (zh)
FR2709055B1 (zh)
TW281629B (zh)
FR2705941B1 (zh)
FR2706772B1 (zh)
FR2713041B1 (zh)
FR2705754B1 (zh)
TW275719B (zh)
FR2707025B1 (zh)
FR2706914B1 (zh)
GB9420951D0 (zh)
FR2702441B1 (zh)
FR2711472B1 (zh)
FR2706803B1 (zh)
FR2710786B1 (zh)
FR2706864B1 (zh)
FR2706927B1 (zh)
FR2706931B1 (zh)
FR2706903B1 (zh)
FR2709098B1 (zh)
IN187420B (zh)
FR2706889B1 (zh)
FR2706843B3 (zh)
FR2706932B1 (zh)
FR2707009B1 (zh)

Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent