KR100218239B1 - 액정표시체용 기판의 검사장치 - Google Patents

액정표시체용 기판의 검사장치 Download PDF

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Publication number
KR100218239B1
KR100218239B1 KR1019960010864A KR19960010864A KR100218239B1 KR 100218239 B1 KR100218239 B1 KR 100218239B1 KR 1019960010864 A KR1019960010864 A KR 1019960010864A KR 19960010864 A KR19960010864 A KR 19960010864A KR 100218239 B1 KR100218239 B1 KR 100218239B1
Authority
KR
South Korea
Prior art keywords
substrate
cassette
prober
loader
inspection
Prior art date
Application number
KR1019960010864A
Other languages
English (en)
Korean (ko)
Other versions
KR960039251A (ko
Inventor
가즈로 모토다
다미오 구보타
Original Assignee
히가시 데쓰로
동경엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7109043A external-priority patent/JPH08285911A/ja
Priority claimed from JP7109042A external-priority patent/JPH08285910A/ja
Application filed by 히가시 데쓰로, 동경엘렉트론주식회사 filed Critical 히가시 데쓰로
Publication of KR960039251A publication Critical patent/KR960039251A/ko
Application granted granted Critical
Publication of KR100218239B1 publication Critical patent/KR100218239B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1019960010864A 1995-04-10 1996-04-10 액정표시체용 기판의 검사장치 KR100218239B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP95-109043 1995-04-10
JP95-109042 1995-04-10
JP7109043A JPH08285911A (ja) 1995-04-10 1995-04-10 液晶表示体用基板の検査装置
JP7109042A JPH08285910A (ja) 1995-04-10 1995-04-10 液晶表示体用基板の検査装置

Publications (2)

Publication Number Publication Date
KR960039251A KR960039251A (ko) 1996-11-21
KR100218239B1 true KR100218239B1 (ko) 1999-10-01

Family

ID=26448834

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960010864A KR100218239B1 (ko) 1995-04-10 1996-04-10 액정표시체용 기판의 검사장치

Country Status (2)

Country Link
KR (1) KR100218239B1 (zh)
TW (1) TW305975B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980020101A (ko) * 1996-09-05 1998-06-25 손욱 액정표시소자의 ito 박막 패턴의 단락 및 오픈 검사방법
TWI499788B (zh) 2013-04-29 2015-09-11 E Ink Holdings Inc 畫素陣列基板檢測方法及畫素陣列基板檢測裝置

Also Published As

Publication number Publication date
KR960039251A (ko) 1996-11-21
TW305975B (zh) 1997-05-21

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