KR100198874B1 - Multipart supporting crucible - Google Patents

Multipart supporting crucible Download PDF

Info

Publication number
KR100198874B1
KR100198874B1 KR1019930701136A KR930701136A KR100198874B1 KR 100198874 B1 KR100198874 B1 KR 100198874B1 KR 1019930701136 A KR1019930701136 A KR 1019930701136A KR 930701136 A KR930701136 A KR 930701136A KR 100198874 B1 KR100198874 B1 KR 100198874B1
Authority
KR
South Korea
Prior art keywords
supporting crucible
multipart
multipart supporting
crucible
supporting
Prior art date
Application number
KR1019930701136A
Other languages
English (en)
Other versions
KR930702558A (ko
Inventor
Julius Weigmeth
Bernd Schmidt
Original Assignee
Sgl Carbon A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sgl Carbon A filed Critical Sgl Carbon A
Publication of KR930702558A publication Critical patent/KR930702558A/ko
Application granted granted Critical
Publication of KR100198874B1 publication Critical patent/KR100198874B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
KR1019930701136A 1991-09-12 1993-04-16 Multipart supporting crucible KR100198874B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DEP4130253.2 1991-09-12
DE4130253A DE4130253C2 (de) 1991-09-12 1991-09-12 Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung
PCT/EP1992/001956 WO1993005205A1 (de) 1991-09-12 1992-08-26 Mehrteiliger stütztiegel

Publications (2)

Publication Number Publication Date
KR930702558A KR930702558A (ko) 1993-09-09
KR100198874B1 true KR100198874B1 (en) 1999-06-15

Family

ID=6440387

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930701136A KR100198874B1 (en) 1991-09-12 1993-04-16 Multipart supporting crucible

Country Status (8)

Country Link
US (1) US5372090A (ko)
EP (1) EP0557480B1 (ko)
KR (1) KR100198874B1 (ko)
CZ (1) CZ286853B6 (ko)
DE (1) DE4130253C2 (ko)
ES (1) ES2064300T3 (ko)
FI (1) FI113378B (ko)
WO (1) WO1993005205A1 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19723070A1 (de) * 1997-06-02 1998-12-03 Siemens Ag Vorrichtung und Verfahren zum Schmelzen und Kristallisieren von Stoffen
EP0892091A1 (en) * 1997-07-03 1999-01-20 MEMC Electronic Materials, Inc. Graphite support vessels having a low concentration of calcium impurities and use thereof for production of single-crystal silicon
DE19806863A1 (de) * 1998-02-19 1999-08-26 Herbst Bremer Goldschlaegerei Verfahren zum Schmelzen von Gußwerkstoffen und vorzugsweise zur Durchführung des Verfahrens dienender Schmelztiegel
DE19830785A1 (de) * 1998-07-09 2000-01-13 Wacker Siltronic Halbleitermat Stütztiegel zur Stützung von Schmelztiegeln
FR2804132B1 (fr) * 2000-01-20 2002-06-07 Lorraine Carbone Porte-creuset pour le tirage de monocristaux
FR2804131A1 (fr) * 2000-01-20 2001-07-27 Lorraine Carbone Porte-creuset pour le tirage de monocristaux
US20020124792A1 (en) * 2001-01-09 2002-09-12 Hariprasad Sreedharamurthy Crystal puller and method for growing single crystal semiconductor material
JP3617466B2 (ja) * 2001-03-16 2005-02-02 三菱住友シリコン株式会社 単結晶引上げ装置
DE10321785A1 (de) * 2003-05-14 2004-12-16 Sgl Carbon Ag Dauerhafter CFC-Stütztiegel für Hochtemperaturprozesse beim Ziehen von Halbleiterkristallen
KR100995927B1 (ko) * 2008-10-16 2010-11-22 한국에너지기술연구원 실리콘 전자기 유도 용융용 흑연 도가니 및 이를 이용한 실리콘 용융 정련 장치
KR101063250B1 (ko) * 2008-10-16 2011-09-07 한국에너지기술연구원 실리콘 전자기 유도 용융용 흑연 도가니 및 이를 이용한 실리콘 용융 정련 장치
CN102115909A (zh) * 2010-10-13 2011-07-06 浙江舒奇蒙能源科技有限公司 一种三瓣石墨坩埚单晶炉
JP5870406B2 (ja) * 2012-05-29 2016-03-01 東海カーボン株式会社 坩堝保持具および坩堝保持具の製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320522A (en) * 1976-08-10 1978-02-24 Toshiba Corp Pulse width modulated circuit for d.c. motor control circuit
JPS549172A (en) * 1977-06-24 1979-01-23 Toshiba Corp Method of producing single crystal
JPS57170892A (en) * 1981-04-10 1982-10-21 Toshiba Ceramics Co Ltd Crucible holder made of graphite for manufacture of silicon single crystal
JPS5895693A (ja) * 1981-11-30 1983-06-07 Toshiba Ceramics Co Ltd 単結晶引上げ用黒鉛ルツボ
JPS6163593A (ja) * 1984-09-05 1986-04-01 Toshiba Corp 化合物半導体単結晶の製造装置
DE3743952A1 (de) * 1986-12-26 1988-07-07 Toshiba Ceramics Co Einrichtung zum ziehen von siliziumeinkristallen mit einem waermeisolierzylinder und verfahren zur herstellung des materials desselben
JPS6454319A (en) * 1987-08-26 1989-03-01 Sumitomo Electric Industries Measuring method for temperature of molten metal
JP2579951B2 (ja) * 1987-09-14 1997-02-12 株式会社東芝 半導体単結晶の製造装置
JPS6479093A (en) * 1987-09-22 1989-03-24 Nippon Steel Corp Pulling up device for single crystal rod
SU1487514A1 (ru) * 1987-10-19 1990-10-15 Gnii Pi Redkometa Подставка под кварцевый тигель ;
DE4007053A1 (de) * 1989-03-21 1990-09-27 Schunk Kohlenstofftechnik Gmbh Graphittiegel, verfahren zu seiner herstellung und verwendung
JPH03174390A (ja) * 1989-12-01 1991-07-29 Nippon Steel Corp 単結晶の製造装置
JPH03228892A (ja) * 1990-01-31 1991-10-09 Japan Silicon Co Ltd 半導体製造装置

Also Published As

Publication number Publication date
CZ64293A3 (en) 1994-01-19
EP0557480B1 (de) 1995-05-17
CZ286853B6 (cs) 2000-07-12
FI932128A0 (fi) 1993-05-11
EP0557480A1 (en) 1993-09-01
ES2064300T3 (es) 1995-08-01
DE4130253C2 (de) 2001-10-04
FI932128A (fi) 1993-05-11
FI113378B (fi) 2004-04-15
US5372090A (en) 1994-12-13
KR930702558A (ko) 1993-09-09
WO1993005205A1 (de) 1993-03-18
ES2064300T1 (es) 1995-02-01
DE4130253A1 (de) 1993-03-18

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Payment date: 20120227

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