FR2804132B1 - Porte-creuset pour le tirage de monocristaux - Google Patents

Porte-creuset pour le tirage de monocristaux

Info

Publication number
FR2804132B1
FR2804132B1 FR0002332A FR0002332A FR2804132B1 FR 2804132 B1 FR2804132 B1 FR 2804132B1 FR 0002332 A FR0002332 A FR 0002332A FR 0002332 A FR0002332 A FR 0002332A FR 2804132 B1 FR2804132 B1 FR 2804132B1
Authority
FR
France
Prior art keywords
single crystals
crucible holder
drawing single
crucible
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0002332A
Other languages
English (en)
Other versions
FR2804132A1 (fr
Inventor
Christophe Bommier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mersen SA
Original Assignee
Carbone Lorraine SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0000722A external-priority patent/FR2804131A1/fr
Application filed by Carbone Lorraine SA filed Critical Carbone Lorraine SA
Priority to FR0002332A priority Critical patent/FR2804132B1/fr
Priority to US09/514,374 priority patent/US6334898B1/en
Priority to PCT/FR2001/000159 priority patent/WO2001053572A2/fr
Priority to EP01907624A priority patent/EP1206591A2/fr
Priority to KR1020017011721A priority patent/KR100733798B1/ko
Publication of FR2804132A1 publication Critical patent/FR2804132A1/fr
Application granted granted Critical
Publication of FR2804132B1 publication Critical patent/FR2804132B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR0002332A 2000-01-20 2000-02-24 Porte-creuset pour le tirage de monocristaux Expired - Fee Related FR2804132B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0002332A FR2804132B1 (fr) 2000-01-20 2000-02-24 Porte-creuset pour le tirage de monocristaux
US09/514,374 US6334898B1 (en) 2000-01-20 2000-02-28 Crucible holder for pulling monocrystals
PCT/FR2001/000159 WO2001053572A2 (fr) 2000-01-20 2001-01-18 Porte-creuset pour le tirage de monocristaux
EP01907624A EP1206591A2 (fr) 2000-01-20 2001-01-18 Porte-creuset pour le tirage de monocristaux
KR1020017011721A KR100733798B1 (ko) 2000-01-20 2001-01-18 단결정 인상용 도가니 홀더

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0000722A FR2804131A1 (fr) 2000-01-20 2000-01-20 Porte-creuset pour le tirage de monocristaux
FR0002332A FR2804132B1 (fr) 2000-01-20 2000-02-24 Porte-creuset pour le tirage de monocristaux

Publications (2)

Publication Number Publication Date
FR2804132A1 FR2804132A1 (fr) 2001-07-27
FR2804132B1 true FR2804132B1 (fr) 2002-06-07

Family

ID=26212107

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0002332A Expired - Fee Related FR2804132B1 (fr) 2000-01-20 2000-02-24 Porte-creuset pour le tirage de monocristaux

Country Status (5)

Country Link
US (1) US6334898B1 (fr)
EP (1) EP1206591A2 (fr)
KR (1) KR100733798B1 (fr)
FR (1) FR2804132B1 (fr)
WO (1) WO2001053572A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3617466B2 (ja) * 2001-03-16 2005-02-02 三菱住友シリコン株式会社 単結晶引上げ装置
JP5286589B2 (ja) * 2008-05-01 2013-09-11 イビデン株式会社 ルツボ保持部材およびその製造方法
JP5027168B2 (ja) * 2009-01-22 2012-09-19 ジャパンスーパークォーツ株式会社 単結晶引上げ用ルツボ及び単結晶引上げ方法
USD771167S1 (en) 2013-08-21 2016-11-08 A.L.M.T. Corp. Crucible
FR3029214B1 (fr) * 2014-12-02 2019-06-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Creuset reutilisable pour la fabrication de materiau cristallin.
CN108149315B (zh) * 2018-01-24 2020-10-23 中国科学院上海硅酸盐研究所 晶体生长用坩埚以及释放碳化硅晶体热应力的方法
CN112341232B (zh) * 2020-10-28 2022-04-08 西安超码科技有限公司 一种炭/炭坩埚及其制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH520H (en) * 1985-12-06 1988-09-06 Technique for increasing oxygen incorporation during silicon czochralski crystal growth
GB2188854A (en) * 1986-04-09 1987-10-14 Philips Electronic Associated Apparatus and a method for growing a crystal using a low-pressure Czochralski method and a crucible holder for use in such apparatus and method
JPH03228892A (ja) * 1990-01-31 1991-10-09 Japan Silicon Co Ltd 半導体製造装置
JPH04321584A (ja) * 1991-04-22 1992-11-11 Kawasaki Steel Corp 単結晶引上装置用カーボン坩堝
DE4130253C2 (de) 1991-09-12 2001-10-04 Sgl Carbon Ag Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung
JPH06345587A (ja) * 1993-06-08 1994-12-20 Toyo Tanso Kk シリコン単結晶引き上げ装置用黒鉛製ルツボ
DE4325522C1 (de) * 1993-07-30 1994-11-17 Schunk Kohlenstofftechnik Gmbh Tiegel, insbesondere Stütztiegel
JP3551736B2 (ja) * 1997-12-05 2004-08-11 三菱住友シリコン株式会社 単結晶引上装置のカーボンサセプタ

Also Published As

Publication number Publication date
FR2804132A1 (fr) 2001-07-27
US6334898B1 (en) 2002-01-01
WO2001053572A2 (fr) 2001-07-26
WO2001053572A3 (fr) 2002-03-07
KR20010113749A (ko) 2001-12-28
EP1206591A2 (fr) 2002-05-22
KR100733798B1 (ko) 2007-07-02

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Legal Events

Date Code Title Description
TP Transmission of property
PLFP Fee payment

Year of fee payment: 17

PLFP Fee payment

Year of fee payment: 18

ST Notification of lapse

Effective date: 20181031