KR0159024B1 - 갈륨비소집적회로장치 및 그 제조방법 - Google Patents

갈륨비소집적회로장치 및 그 제조방법 Download PDF

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Publication number
KR0159024B1
KR0159024B1 KR1019950023158A KR19950023158A KR0159024B1 KR 0159024 B1 KR0159024 B1 KR 0159024B1 KR 1019950023158 A KR1019950023158 A KR 1019950023158A KR 19950023158 A KR19950023158 A KR 19950023158A KR 0159024 B1 KR0159024 B1 KR 0159024B1
Authority
KR
South Korea
Prior art keywords
gallium arsenide
integrated circuit
electrode layer
electrode
circuit device
Prior art date
Application number
KR1019950023158A
Other languages
English (en)
Korean (ko)
Other versions
KR960005996A (ko
Inventor
마사오 모치즈키
Original Assignee
사토 후미오
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 사토 후미오, 가부시키가이샤 도시바 filed Critical 사토 후미오
Publication of KR960005996A publication Critical patent/KR960005996A/ko
Application granted granted Critical
Publication of KR0159024B1 publication Critical patent/KR0159024B1/ko

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/481Internal lead connections, e.g. via connections, feedthrough structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0605Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725Source or drain electrodes for field effect devices
    • H01L29/4175Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227Inductive arrangements or effects of, or between, wiring layers
KR1019950023158A 1994-07-26 1995-07-26 갈륨비소집적회로장치 및 그 제조방법 KR0159024B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-173923 1994-07-26
JP17392394 1994-07-26

Publications (2)

Publication Number Publication Date
KR960005996A KR960005996A (ko) 1996-02-23
KR0159024B1 true KR0159024B1 (ko) 1998-12-01

Family

ID=15969587

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950023158A KR0159024B1 (ko) 1994-07-26 1995-07-26 갈륨비소집적회로장치 및 그 제조방법

Country Status (2)

Country Link
KR (1) KR0159024B1 (zh)
TW (1) TW275714B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102463346B1 (ko) 2021-03-19 2022-11-07 (주)컨트롤웍스 차량용 페달 구동장치
KR102538634B1 (ko) 2021-04-22 2023-05-31 (주)컨트롤웍스 차량용 페달 구동장치

Also Published As

Publication number Publication date
KR960005996A (ko) 1996-02-23
TW275714B (zh) 1996-05-11

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