KR0143334B1 - The customer tray conveyor for the tester of semiconductor device - Google Patents

Abstract

The present invention relates to a customer transfer device of a semiconductor device inspector for transferring a customer tray loaded up and down on a stacker of a loader or unloader to a stage of the loader or unloader. The transfer of the customer tray containing the device to the stage of the loader as a transport means and at the same time to load the device to the test tray side of the loader stage to unload the empty customer tray to a separate stacker.

To this end, the present invention is an elevator plate (4) which is installed inside each stacker (2) installed in the loader unit and the unloader unit 1 to raise and lower the customer tray (3) by one step, A slide plate 6 horizontally moved along the side plate 5 installed at the rear of the loader and unloader portions, and a customer tray holder plate coupled to the slider plate to move up and down as the first cylinder 8 is driven. 10, a locking piece 12 which is installed to be exposed to the lower side of the customer tray holder and rotates while holding both sides of the customer tray, and a locking piece which is installed on the upper side of the customer tray to rotate the locking piece. A seating plate 13 for exposing the customer rail mounted on the upper and lower sides of the rotating means and the lower and lower portions of the customer tray holder plate and each stage between the loader and unloader portions through the through holes 1a formed in each stage. It is composed of).

Description

Customer Tray Transfer Device of Semiconductor Device Inspector

1 is a plan view showing the present invention

Figure 2 is a longitudinal sectional view shown to explain the operating state of the present invention

3 is a cross-sectional view taken along the line A-A of FIG.

* Explanation of symbols for main parts of the drawings

1: Loader section and unloader section 2: Stacker

3: Customer Tray 4: Elevator Edition

5: side plate 6: slider plate

8: first cylinder 10: customer tray holder plate

12: Jam 13: 13:

17: slider 18: the second cylinder

19: first link 20: second link

22: bending piece 26: positioning pin

The present invention relates to a customer tray transfer device of a semiconductor device inspector for transferring a customer tray loaded up and down on a stacker of a loader or unloader to each stage of the loader or unloader. The customer tray containing the element as a transfer means is transferred to the stage of the loader unit, and at the same time, the empty customer tray that has been loaded from the stage of the loader unit to the test tray side can be unloaded to the stacker of the unloader unit.

In recent years, the thickness of semiconductor devices has gradually become thinner according to the trend of lighter and shorter parts. Among them, a typical device is a thin small outling package (TSOP).

The TSOP (Thin Smal Outling Package) has a thickness of about 1 mm, and the characteristics of the device are deteriorated when a shock is applied to the upper or lower surface due to carelessness between the test processes during the production process during the manufacturing process to check the performance. If the impact is severe, the molded chip is broken, so care must be taken not to impact the device during the transfer or during the test.

These TSOPs are loaded into test trays and transported between processes for characterization.

The elements are placed in a customer tray made of plastic material and sequentially loaded into the stacker of the loader unit during the transfer of the process, and these customer trays are sequentially separated from the stacker and transferred to the stage side of the loader unit.

Conventionally, a stopper installed below the stacker operates in a state in which a customer tray containing an element is placed in a stacker of a loader unit or an unloader unit, or an empty customer tray containing no element is sequentially loaded so that the stopper installed in the stacker is second from the bottom. In the state of holding the customer tray located, the customer tray located at the bottom was separated from the stacker, and then the customer tray separated by a separate transfer means was transferred to the stage of the loader unit.

In addition, after all the elements contained in the customer tray are loaded into the test tray, the same operation means as the transfer means separate from the above-described transfer means operates to move the empty customer tray in the stage of the loader to the lower side of the stacker installed in the unloader. It was to be pushed up and loaded.

However, such a conventional device separates or loads the customer tray from the bottom of the stacker, and thus the movement range of the transfer means for transporting the separated customer tray is widened, thereby increasing the installation area of the device, and thus the work according to the sequential operation. There was a problem that the productivity is lowered because the time is delayed.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem in the prior art, and the structure is improved to separate the uppermost customer tray loaded on the stacker, and the empty customer tray having all the elements loaded in the test tray. The purpose of this is to be able to simultaneously load the stacker on the unloader unit.

According to an aspect of the present invention for achieving the above object, an elevator plate which is installed inside each stacker installed in the loader and unloader to lift and lower the customer tray by one step, and the loader and the unloader. A slide plate horizontally moved along the side plate installed at the rear of the loader, a customer tray holder plate coupled to the slider plate to move up and down according to the driving of the first cylinder, and installed below the customer tray holder plate. A locking piece for holding both sides of the customer tray while rotating, a locking piece rotating means installed at an upper portion of the customer tray to rotate the locking piece, and directly below and below the customer tray holder plate, and between each stage of the loader and unloader parts. The semiconductor consists of a seating plate that exposes the customer tray mounted ascending and descending to the upper part through the through hole formed in each stage The transfer device of the customer tray character tester is provided.

Hereinafter, the present invention will be described in more detail with reference to FIGS. 1 through 3 of the accompanying drawings.

1 is a plan view showing the present invention, 2 is a longitudinal cross-sectional view for explaining the operating state of the present invention and FIG. 3 is a cross-sectional view taken along line AA of FIG. 2, the present invention is a loader and unloader (1) The elevator plate 4 which raises the customer tray 3 or the empty customer tray 3a by 1 step (1 customer tray height) inside each stacker 2 installed in the linear motor (not shown) The slider plate 6 is installed on the side plate 5 provided at the rear of the loader unit and the unloader unit to move horizontally along the horizontal LM guider 7. The customer tray holder plate 10 is coupled in a cantilever shape to move up and down along the vertical LM guide 9 according to the driving of the first cylinder 8.

The stacker (2) is installed to be pulled out in front of the operator along a guide rail (not shown) to easily load the customer tray (3), the stacker is guided in the state pushed into the machine The locking lever 11 is locked to prevent flow from the rail.

And the bottom surface of the customer tray holder plate 10 is inserted into the engaging groove (3b) formed on both sides of the customer tray (3) so that the four engaging pieces 12 for holding the customer tray rotates at the same time by the engaging piece rotation means. Mounting plate 13 which is installed and exposed to the upper portion of each stage through the through hole (1a) of the customer tray (3) which is installed and directly below the customer tray holder plate and between each stage of the loader and unloader unit (1) It is provided so that it may move up and down according to the drive of the 3rd cylinder 15 fixed to this support plate 14.

The seating plate 13 is fixed in the form of a rod and cantilever of the third cylinder 15, as shown in FIG.

It is fixed to the upper portion of the customer tray holder plate 10 as shown in Figure 1 in the embodiment of the present invention by the rotation means of the locking surface 12 is installed to be rotatable on the bottom surface of the customer tray holder plate 10 The slider 17 is coupled to the LM guide 16, and guided to the LM guide 16 in accordance with the operation of the second cylinder 18 so as to move horizontally. A first link 19 having a long hole 19a formed therein is fitted with projections 17a formed at both ends of the slider in the long hole, and both ends of each of the first links are fixed to the engaging pieces 12. It is hinged by 20 and pin 21.

Accordingly, as the slider 17 is guided to the LM guider 16 and moved horizontally by the driving of the second cylinder 18, the first link 19 is pivoted and the second link 20 fixed to the locking piece 12 is fixed. Rotated).

On the upper part of the customer tray holder plate 10, a bending piece 22 which is anti-bent as shown in FIG. 2 is fixed, and a sensor 23 for detecting the customer tray 3 is fixed inside the bending pieces. On the support plate 14 located at the bottom dead center (customer tray holding position) of the seating plate 13, another sensor 24 for detecting the customer tray mounted on the seating plate is fixed.

This is to control the driving of the first cylinder 8 and the third cylinder 15 by detecting the falling of the customer tray holder plate 10 and the seating plate 13.

An elastic member 25 such as a tension spring is connected between the customer tray holder plate 10 and the first link 19, which is shown on the right side of FIG. 1 when the rod of the second cylinder 18 returns. As described above, the locking piece 12 is more reliably rotated into the locking groove 3b of the customer tray 3.

As described above, the customer tray holding plate 10 holding the customer tray 3 or the empty customer tray 3a mounted on the seating plate 13 between the stackers 2 is attached to the slider plate 6. One may be installed, but in one embodiment of the present invention, just before loading the customer tray 3 held by the stacker 2 on the seating plate 13, the empty customer tray 3a which was first placed on the seating plate 3a. Since the customer tray holder plates 10a and 10b are installed at the same time, each customer tray holder plate can be operated separately and the customer tray holder plates 10a and 10b must be removed. It is configured to perform loading and unloading at the same time.

This is to improve productivity by minimizing cycle time due to loading and unloading of customer tray.

Positioning pins on the bottom surface of the customer tray holder plate 10 determine a position of the customer tray 3 positioned on the stacker 2 and the seating plate 13 immediately before holding the customer tray. (26) is fixed.

This is to ensure that when the holding of the customer tray 3 can be accurately fitted to the locking groove (3b) formed on both sides of the customer tray of the locking piece (12).

Referring to the operation and effects of the present invention configured as described above are as follows.

First, as shown in FIG. 3, the lock lever 11 of the stacker 2 is released, and the customer tray 3 containing the elements in the stacker is sequentially loaded while pulling the stacker toward the front of the operator. At the same time, push the stacker that was withdrawn again and lock the lock lever (11).

In this state, when the elevator plate 4 is lifted up by the operation of the linear motor until the uppermost customer tray 3 loaded in the stacker 2 is detected by a sensor (not shown), the driving of the linear motor is stopped. As the lift plate stops rising, the slide plate 6 is transferred to the upper portion of the customer tray 3 loaded on the stacker 2 along the horizontal LM guider 7 fixed to the side plate 5. And the customer tray holder plate (10a) of one side is to stop the movement at the position matching the customer tray (3).

In the above operation, the customer tray holder plate 10a coupled to the slide plate 6 in the form of a cantilever beam is positioned at the top dead center as shown in the left side of FIG. 2 by the first cylinder 8. The seating plate 13, which is broken in a cantilever shape in the rod of 15), is in close contact with the bottom of the loader and unloader 1, as shown by a dashed line on the right and the third of FIG. It does not interfere with the customer tray loaded in 2). (The customer tray holder plate located on the right side is also located at the top dead center, but is shown in the bottom dead center to explain the operation state.)

Thus, when the customer tray holder plate 10a of one side (right side of FIG. 2) is located directly above the customer tray 3, the first cylinder 8 operates to pull the customer tray holder plate 10a. The customer tray holder plate is guided to the vertical LM guider 9 and descends. The customer tray holder plate 10a is a customer tray 3 on which the sensor 23 multiplied by the bending piece 22 is placed on the seating plate 13. Until you sense).

In other words, it is lowered to the state shown on the right side of FIG. 2, but if the customer tray holder plate 10a is lowered and the locking piece 12 is positioned horizontally with the locking groove 3b formed in the customer tray 3, The position of the customer tray 3 is correctly corrected by the positioning pin 26 fixed to the bottom surface of the customer tray holder plate 10a.

On the other hand, a protrusion (not shown) is formed on the bottom of the customer tray holder plate 10a to coincide with the center of each space part of the customer tray, so that the customer tray is connected to the upper surface of the element contained in the space part. In the held state, the element does not flow in the space portion of the customer tray.

In this state, when the second cylinder 18 fixed to the upper surface of the customer tray holder plate 10a is operated to pull the slider 17, the first link 19 coupled to both sides of the slider is in the direction of the arrow in FIG. Both ends of the first link 19, the engaging piece 12 and the fixed second link 20 is hinged to the pin 21 and the projections 17a formed on both ends of the slider 17 is Since the first link 19 is pivoted, the second link 20 is rotated while the first link 19 is pivoted, and thus the locking groove 3b formed in the customer tray 3 is formed. The locking piece 12 located on the outside of the rotating member rotates to the inside of the locking groove 3b to hold the one customer tray 3 located on the top of the stacker 2.

As described above, when the first link 19 is moved in the direction of the arrow, the first link is connected in the tensioned state between the customer tray holder plate 10a and the first link 19. It is stably moved by the wearer's force.

After the locking piece 12 coupled to the customer tray holder plate 10a holds one of the customer trays 3 positioned above the stacker 2, the first cylinder 8 operates to operate the customer trays. Since the holder plate 10a is located at the top dead center, the operation of separating the customer tray from the stacker 2 is completed.

After separating the customer tray 3 in this way, the slide plate 6 moves to one side (the part which does not interfere with the raising and lowering of the seating plate) along the horizontal LM guider 7 and is fixed to the supporting plate 14 at the same time. Since the third cylinder 15 is driven, the seating plate 13 which is in close contact with the bottom of the loader and unloader 1 is lowered, and the seating plate 13 is disposed on both sides of the support plate 14. The fixed sensor 24 is lowered until it detects the empty customer tray 3a mounted on the seating plate.

When the seating plate 13 reaches the bottom dead center, the slider plate 6, which has been moved to one side, is transferred along the horizontal LM guider 7, so that the customer tray holder plate 10b of the one side where the customer tray 3 is not held. ) Is located directly below the empty customer tray 3a.

Thereafter, the customer tray holder plate 10b is lowered by the operation as described above to hold the empty customer tray 3a which has been placed on the seating plate 13 by the locking piece 12, and at the same time, the first cylinder 8 Ascends to the top dead center by driving of.

In this way, after the customer tray holder plate 10b of one side holds the empty customer tray placed on the seating plate 13, the slider plate 6 moves one step to one side and then stops the movement. The customer tray holder plate 10a holding 3) is located above the seating plate 13.

After that, the first cylinder 8 operates to position the customer tray holder plate 10a at the bottom dead center, and the second cylinder 18 moves to advance the slider 17. The first and second links 19 and 20 are converted into rotational movements to rotate the locking pieces 12, and thus are released to the holding of the customer tray 3 and placed on the seating plate 13.

After the customer tray 3 loaded on the stacker 2 is placed on the upper surface of the seating plate 13 by the above-described operation, the customer tray holder plate 10a is driven by the driving of the first cylinder 8. At the same time, the slider plate 6 is moved along the horizontal LM guider 7 to one side (a position where no interference occurs when the seat plate is raised).

In this way, after the slider plate 6 moves to one side, the third cylinder 15 is operated to position the seating plate 13 at the top dead center to be in close contact with the bottom of the loader and the unloader 1. The customer tray 3 mounted on the upper surface of each stage is exposed to the upper surface of each stage through the opening 1A of the loader unit and the unloader unit 1, so that the pickup means can move the element contained in the customer tray into the space of the test tray. Will be.

On the other hand, the empty customer tray (3a) was held in the customer tray holder plate (10b) of the one side in the state that the slide plate 6 is transferred to the empty customer tray stacker portion of the unloader portion of the horizontal LM guider (7) In the same operation, the stacker is placed inside the stacker, and the container is returned to its initial state, thereby enabling the continuous transfer of the customer tray.

As described above, according to the present invention, the customer tray loaded in the stacker of the loader unit is sequentially supplied to the stage of the loader unit, and at the same time, the empty customer tray located on the stage of the loader unit can be simultaneously transferred to the stacker of the loader unit. By reducing the cycle time in accordance with the transfer of the not only improves the productivity, but also the structure is simplified, thereby maximizing the space utilization of the device.

Claims (5)

An elevator plate 4 installed inside each stacker 2 installed in the loader and unloader 1 to lift and lower the customer tray 3 by one step, and the loader and unloader. A slide plate 6 horizontally moving along the side plate 5 installed at the rear of the unit, a customer tray holder plate 10 coupled to the slider plate to move up and down according to the driving of the first cylinder 8, and A locking piece 12 which is installed to be exposed to the lower side of the customer tray holder plate and rotates while holding both sides of the customer tray, a locking piece rotating means which is installed on the upper part of the customer tray to rotate the locking piece, and the customer tray holder. The semiconductor device inspector is composed of a seating plate 13 which exposes a customer tray mounted while moving up and down between the stages of the plate and the loader and unloader sections, through the through hole 1a formed in each stage. Customer Tray Transmitting device. The slider 17 of claim 1, wherein the engaging piece pivoting means is horizontally coupled along the LM guider 16 fixed to the upper part of the customer tray holder plate 10, and the upper part of the customer tray holder plate. A second cylinder 18 fixed to the first cylinder 18 for moving the slider, a first link 19 provided at both ends of the slider so as to be retractable together with the slider, and one end hinged to the first link, and the other end is engaged. It is composed of a second link 20 fixed to the side is characterized in that the locking piece 12 is rotated as the slider 17 moves along the LM guider 16 by the driving of the second cylinder 18. Customer tray feeder for device inspector. The device of claim 2, wherein the elastic member (25) is connected between the customer tray holder plate (10) and the first link (19). The device inspector of claim 1 or 2, wherein a plurality of positioning pins 26 for fixing a position of the customer tray when the customer tray is held on the bottom surface of the customer tray holder plate 10 are fixed. Customer Tray Feeder. According to claim 1, Two customer tray holder plate (10) is provided on the slider plate, and each of the customer tray holder plate is installed in each of the locking piece 12 to be rotated by the locking piece rotating means directly above the Customer tray transfer device of the device inspector, characterized in that the customer tray holder plate to operate independently.