DE19613616A1 - Magazine transport apparatus for semiconductor testing equipment - Google Patents

Abstract

The transport apparatus includes a loading/discharging section (1) in which the magazines (3,3a) are selectively loaded or discharged. A storage area (2) under the loading/discharging section holds several magazines. A holding device (10) holds and removes the magazines from the storage area by horizontal movement between the loading/ discharging section and the storage area and selective movement of the top side of the magazines. An arrangement plate runs the magazines up from the loading/discharge section when the holding device is separated from the storage area by horizontal movement, after receiving magazine separated by the holding device.

Description

The invention relates to a foreign magazine transport direction of a test device for semiconductor devices (components) and esp especially a foreign magazine transport device for transport animals of the building block containing the third party magazine Level of a loader / unloader with a single transport device and at the same time transporting an empty one Third-party magazine for storing the loader / unloader.

In line with recent developments small and light components will also have the thickness of Semiconductor components increasingly thin. A typical building block is a TSOP (thin small outline package = thin building block with small dimensions).

The thickness of the TSOP is about 1 mm, and its performance is ge after completion of production in a handling device checks. However, the top or bottom of the TSOP has one Impact due to rough handling during its transportation experienced a test procedure in the handling device, ver the building block properties deteriorate, in particular the compact chip itself can be damaged. So is when transporting the TSOP in the handling device or during the test  careful handling of the TSOP in a test magazine necessary so that the TSOP does not experience an impact.

During the transport of the loaded test magazine between In terms of procedures, the TSOP becomes a test of its own subjected to shafts.

The building blocks are located during transport the procedures in foreign magazines made of plastic material and are continuously loaded into the storage of a loader section the. Foreign magazines of this type are separated one after the other and transported to the stage of the loader section.

Conventionally, one that contains the block Foreign magazine or a third-party magazine containing no module zin successively loaded into the storage of a loader / unloader will.

In a state in which the one containing the block Foreign magazine is loaded, acts in the lower section of the Storage built-in stop to one in the second position to hold the external magazine. Then one at the third-party magazine located at the bottom of the shelf separated and to the level of the loader section by means of a transported additional transport device.

After all the blocks contained in the third-party magazine have been there is also another additional transport set up in the same way to that in the stage of the loader empty third-party magazine located at the bottom from the section cut the tray installed in an unloader section slide to load into it.

However, since the foreign magazine in the conventional Vorrich detached or loaded in the lower section of the shelf the range of motion of the transport unit expands direction for transporting the separated third-party magazine. So that the installation area of the device is large, and it there are working hours delays due to the consequential Operation of the transport facilities.

There is a task for the He to solve these problems finding in the provision of a foreign magazine transport device for transporting the containing the module  Foreign magazine for the level of the loader section and at the same time to unload the empty magazine in the unloader's tray section after the block from the stage of the loader section is transferred to the test magazine using an egg ner single transport device.

This object is achieved with the features of the claims solves.

The foreign magazine transport device according to the invention of a test device for semiconductor components has in particular on: a loader / unloader section in which a foreign magazine is selectively loaded / unloaded; one under the loader / discharge the section located storage, the several foreign magazines contains; a holding device for holding and separating the foreign material gazins from the shelf by moving horizontally between the Loader / unloader section and storage and selective moving to the top of the foreign magazine; and a layout board for starting up the third-party magazine from the loader / unloader section, if the holding device moves away from the shelf by horizontal loading movement separates after picking up the holding device separated foreign magazine.

In the invention, the holding device preferably has: a third-party magazine holding board, which runs horizontally through one Slider moves and when a cylinder is driven it moves up / down; a lock that is rotatably installed to under of the foreign magazine holding board to be exposed both sides of the foreign magazine; and a locking device device installed at the top of the third-party magazine is to turn the lock.

The stated object and advantages of the invention go clearer from the detailed description of a preferred Embodiment of her with reference to the accompanying drawings forth. Show it:

Fig. 1 is a plan view illustrating the inven tion;

Fig. 2 is a vertical section for explaining the operation of the invention; and

Fig. 3 is a sectional view on the line AA.

A tray 2 (stack magazine, stacker) is installed in a loader / unloader 1 . Inside the tray 2 is a lifting plate 4 for lifting a third-party magazine 3 or an empty third-party magazine 3a by one step (the height of a third-party magazine) in order to be able to drive up / down when driving a linear motor (not shown). A slide panel 6 is installed to move horizontally along a horizontal LM guide 7 along a side panel 5 which is installed at the rear of the loader / unloader 1 . One end of a third-party magazine holding panel 10 for raising / lowering along a vertical right LM guide 9 by means of a first cylinder 8 is coupled to the slide panel 6 .

The tray 2 is installed so that it can protrude to the front of an operator on a (not shown) guide rail, so as to facilitate loading of the third-party magazine 3 . When inserting the shelf 2 into the mechanism, the shelf 2 is locked by a locking lever 11 , since it does not move in the guide rail.

Four locks 12 for holding the third-party magazine 3 are installed on the underside of the third-party magazine holding board 10 . The locks 12 rotate in unison by means of a (not shown) locking device, and each lock is inserted into a locking groove 3 b, which is formed on both sides of Fremdmaga interest 3 . A placement plate 13 for starting up / shutting down by means of a third cylinder 15 attached to a support plate 14 is installed vertically under the Fremdma magazine holding plate 10 . The arrangement plate 13 serves to expose the foreign magazine 3 above each stage through an opening 1 a, which is formed between the vertically lower portion of the holding board 10 and each stage of the loader / unloader 1 . One end of the arrangement plate 13 is fixed to a rod of the third cylinder 15 shown in FIG. 3.

The rotator of the lock 12 , which is rotatably mounted on the underside of the foreign magazine holding panel 10 , speaks ent. Fig. 1. A slider 17 is coupled to an LM guide 16 which is fixed to the upper portion of the foreign magazine holding plate 10 . When driving a second cylinder 18 , the slide 17 moves horizontally and is guided by the LM guide 16 . At both ends of the slide 17 , a first connecting member 19 is attached, in which an elongated hole 19 a is formed, which extends perpendicular to the direction of movement of the slide 17 . A formed at both ends of the slider 17 projection 17 a is inserted into the slot 19 a, and both ends of the first link 19 are articulated by a pin 21 with a second link 20 which is attached to the lock 12 . With horizontal movement of the slide 17 under the guidance of the LM slide 16 by driving the second cylinder 18 runs there through the first connecting member 19 so as to rotate the second connecting member 20 to which the lock 12 is fastened.

A piece 22 is fastened to the upper section of the foreign magazine holding board 10 and is folded downward according to FIG. 2. A first sensor 23 for detecting the foreign magazine 3 is fastened inside each piece 22 . A second sensor 24 for detecting the loaded on the array board 13 foreign magazine 3 is fixed to the support panel 14, which is located at an assembly point of the assembly plate 13, which is a holding position of the foreign magazine. 3 This serves to control the drive of the first and third cylinders 8 and 15 by detecting the descent of the foreign magazine holding plate 10 and the arrangement plate 13 .

An elastic part 25 is connected between the foreign magazine holding panel 10 and the first connecting member 19 , e.g. B. a tension spring. This is for stable rotation of the lock 12 in the interior of a locking groove 3b of the third magazine 3 when a rod of the second cylinder 18 according to the Dar position on the right side in Fig. 1 moves back.

Is possible on the slider panel 6 a Fremdmagazin- holding board 10 build verify for holding an empty foreign magazine 3 a, responsive to the foreign magazine 3 or the assembly plate is set 13 loaded in the tray 2, which vorste mentioned starting. Removal of the empty foreign magazine 3 a placed on the arrangement plate 13 a (an empty foreign magazine from which all the blocks have been loaded) before the foreign magazine 3 held by the tray 2 is loaded onto the arrangement plate 13 is more efficient. Thus, in one embodiment of the invention, two foreign magazin holding boards 10 a and 10 b are installed, and at the same time each foreign magazine holding board can be operated individually. That is, loading and unloading of the third- party magazine 3 can be carried out in the same way.

A position determination pin 26 is attached to the underside of the foreign magazine holding board 10 in order to determine a position of the foreign magazine 3 located on the tray 2 and the arrangement plate 13 before the lock 12 holding the foreign magazine 3 is fastened. When holding the foreign magazine interest 3 , the lock 12 can therefore be inserted precisely into the locking groove 3 b formed on both sides of the third -party magazine 3 .

The following are the operations and effects of Invention described with the aforementioned structure.

First, in a state in which the tray 2 is pulled forwards to an operator by releasing the locking lever 11 of the tray 2 according to FIG. 3, building blocks containing foreign magazines 3 are successively loaded into the tray 2 , and then the pulled-out tray is pushed back and locked by the locking lever 11 .

Until the top third magazine 3 in the tray 2 is detected by egg nen (not shown) sensor, the lifting plate 4 then moves up by driving the linear motor. When the linear motor drive stops, the lifting of the lifting plate 4 stops, and in the same direction the slide plate 6 is transported to the upper section of the external magazine 3 loaded in the holder 2 along the horizontal LM guide 7 fastened to the side plate 5 . Then their transport stops at a position at which the foreign magazine holding panel 10 a on one side of the slide panel 6 matches the external magazine 3 .

During this movement, the foreign magazine holding panel 10 a coupled to the slide panel 6 with one arm is arranged at its uppermost position by the cylinder 8 , which is shown in the left section of FIG. 2. The arrangement plate 13, which is attached to the rod of the third cylinder 15 with one arm, sits on the underside of the loader / unloader 1 , which is shown by a dotted line on the right side of FIGS. 2 and 3. Thus, the foreign magazine 3 loaded in the tray 2 does not interfere with other devices (although the foreign magazine holding panel 10 a on the right-hand side of the drawing is also positioned in the uppermost position, the holding panel is shown in the position at the lowest position to explain the operating state) .

In a state in which the foreign magazine holding plate 10 a is located on one side (the right side in FIG. 2) perpendicularly above the foreign magazine 3 , the foreign magazine holding board 10 a is pulled by the operation of the first cylinder 8 . Since the foreign magazine holding board 10 a descends under the guidance of the vertical LM guide 9 . The foreign magazine holding plate 10 a moves down until the sensor 23 attached to the piece 22 detects the foreign magazine 3 placed on the arrangement plate 13 , ie it moves down into the state illustrated on the right-hand side of FIG. 2. Is located at the descending of the foreign magazine holding panel 10 a according to the above description, the lock 12 in the same horizontal plane as the formed on the foreign magazine 3 locking groove 3b, the position of the foreign magazine 3 is pin by the position determination is corrected exactly 26 which at the Underside of Fremdma magazine holding board 10 a is attached.

Further, a (not shown) projection is formed on the underside of the foreign magazine holding panel 10 a so that it corresponds to the center of each foreign magazine space, and thus the projection touches the top of the building blocks contained in the room. As a result, the building blocks do not move in the space of the external magazine in a state in which the external magazine 3 is held.

In such a state, the slide 17 is pulled by the action of the second cylinder 18 attached to the top of the foreign magazine holding panel 10 a, the first connecting member 19 coupled to both sides of the slide 17 is moved in an arrow direction according to FIG. 1. Since the second link 20 fastened to the lock 12 is articulated by the pin 21 at both ends of the first link 19 and the projection 17 a formed at both ends of the slide 17 is inserted into the elongated hole 19 a formed in the first link 19 , the second link 20 is rotated when the first link 19 rotates. Thereby, the lock 12, the b is located outside the locking groove formed on the external magazine 3 3, b is rotated inwardly into the lock groove. 3 As a result, a third-party magazine 3 is held, which is located on the uppermost portion of the tray 2 .

Upon movement of the first link 19 in the direction of the arrow according to the above description, the first link 19 moves stably by a restoring force of the elastic part 25, the binding member in extended state between the foreign magazine holding sheet 10 a and the first Ver connected 19th

After an on the upper portion of the tray 2 tein foreign magazine 3 is held by the coupled to the foreign magazine holding panel 10 a lock 12 , the first cylinder 8 works to arrange the foreign magazine holding panel 10 a at the top most position. The separation of the foreign magazine 3 from the tray 2 is thus completed.

Since the third cylinder 15 attached to the support plate 14 is operated while the slide plate 6 is moved along the horizontal LM guide 7 to a side portion where the arrangement plate 13 is raised and lowered after the above-described separation of the foreign media 3 is not disturbed, the arrangement plate 13 , which is closely attached to the underside of the loader / unloader 1, descends. The arrangement plate 13 moves down until the sensor 24 attached to both sides of the support plate 14 detects the empty plate 3 a placed on the arrangement plate 13 .

When the arrangement plate 13 arrives at the lowest position, the slide panel 6 moved to the side section is transported along the horizontal LM guide 7 . Since the foreign magazine holding board 10 b is positioned on the side section without holding a third-party magazine 3 vertically above the empty third-party magazine 3 a.

Then moves in the aforementioned manner, the foreign magazine holding board 10 b and holds the empty foreign magazine 3 a, which is arranged on the arrangement plate 13 by the lock 12 , and then drives up by driving the first cylinder, so in the top Position to be positioned.

After the empty foreign magazine 3 a is held by the foreign magazin holding board 10 a on one side section, the slide panel 6 is moved one step to a side section and then stops the movement. The foreign magazine holding board 10 a, which holds the foreign magazine 3 with the building blocks, is arranged on the upper section of the arrangement plate 13 .

Then the foreign magazine holding panel 10 a is positioned at the lowermost position under drive by the first cylinder 8 , and at the same time the slide 17 is moved forward by the second cylinder 18 . The ge linear effect of the slider 17 is converted by the first and second links 19 and 20 into a rotational effect, thereby rotating the lock 12 . As a result, the held foreign magazine 3 is released and is placed on the upper portion of the arrangement plate 13 .

After the loaded in the tray 2 foreign magazine 3 be in this way on the top of the arrangement plate 13 be, the foreign magazine holding panel 10 a is positio ned at the top position by drive by the first cylinder 8 , and at the same time the slide panel 6 is the horizontal LM guide 7 moves to a side section where the start-up of the arrangement plate 13 is not disturbed.

When moving the slide panel 6 to a Seitenab section as described above, the Anord voltage plate 13 is positioned at the top position by drive by the third cylinder 15 so that it closely contacts the underside of the loader / unloader 1 . Here, the foreign magazine placed on the arrangement plate 13 is exposed above the top of each stage through the opening 1 a of the loader / unloader 1 . The blocks are removed from the exposed third-party magazine by a gripping device in order to be moved into the space of the test magazine.

Furthermore, the empty foreign magazine 3 a held by the foreign magazine holding panel 10 b on one side section is transported along the horizontal LM guide 7 to the upper section of the tray 2 as an empty foreign magazine of the unloader section. The transported empty third-party magazine is stacked in the tray 2 . The foreign magazine holding board 10 b, which has unloaded the empty foreign magazine 3 a, returns to the exit state, whereby a continuous transport sequence of the foreign magazine 3 is possible.

As described above, in the Erfin the foreign material loaded in the storage of the loader section magazine moves continuously to the stage of the loader section, and at the same time this will be in the stage of the loader section Find empty empty magazine for storing the unloader cut transported. This reduces the cycle time when transporting the foreign magazine, and productivity increases. Furthermore, the structure itself is simplified, and the Device space can be used to the maximum.

Claims (6)

1. Foreign magazine transport device of a testing device for semiconductor components with:
a loader / unloader section in which a foreign magazine is selectively loaded / unloaded;
from under the loader / unloader section from which contains several foreign magazines;
a holding device for holding and separating the foreign magazin interest from the storage by horizontally moving between the loader / unloader section and the storage and selective moving to the top of the foreign magazine; and
a placement plate for starting up the foreign magazine from the loader / unloader section when the holding device separates from the tray by horizontal movement after receiving the separated third-party magazine by the holding device. 2. Foreign magazine transport device of a testing device for semiconductor devices according to claim 1, wherein the holding device comprises:
a third-party magazine holding board, which moves horizontally through a slide and moves up / down when a cylinder is driven;
a lock rotatably installed to be exposed under the foreign magazine holding board for holding both sides of the foreign magazine; and a lock end rotator installed on the upper portion of the foreign magazine for rotating the lock. 3. Foreign magazine transport device of a testing device for semiconductor devices according to claim 2, wherein the locking device comprises:
a slider that is coupled to move horizontally along an LM guide attached to the upper portion of the foreign magazine holding panel;
a second cylinder attached to the upper portion of the foreign magazine holding board for moving the slider;
a first link installed to be reciprocated together with the slider at both ends of the slider; and
a second link, one end of which is pivotally coupled to the first link and the other end of which is attached to the lock, the lock being rotated as the slider moves along the LM guide by driving the second cylinder. 4. Foreign magazine transport device of a tester for Semiconductor devices according to claim 3, wherein an elastic part between the foreign magazine holding board and the first link is connected. 5. Foreign magazine transport device of a testing device for Semiconductor components according to one of Claims 2 to 4, wherein a plurality of positioning pins for determining the position of the foreign magazine if the foreign magazine is held at the bottom of the foreign magazine holder board are attached. 6. Foreign magazine transport device of a testing device for semiconductor devices according to one of claims 1 to 5, further comprising:
a placement plate for moving down the foreign magazin interest after the work in the loader / unloader section is completed; and
a holding device for moving horizontally to a section in which the arrangement plate is not disturbed after the foreign magazine is held and separated from the order plate, in separation from the storage location and subsequent approach to the storage area in order to load the foreign storage area on the storage area .