KR100901983B1 - Apparatus of transferring a test tray and Test Handler using the same - Google Patents

Abstract

The present invention has a holding member for holding one side of the test tray, the first transfer device for transferring the test tray from the first position to the second position; And a pushing member for pushing one side of the test tray, and including a second feeding device for transferring the test tray from the second position to the third position, and a test handler applying the same.

According to the present invention, by performing the first step transfer process using the first transfer device and the second step transfer process using the second transfer device, the test through the second opening formed on the front side of the first chamber portion The tray can be easily transferred from the first buffer portion to the first chamber portion.

Test Tray Feeder, Test Handler

Description

Apparatus of transferring a test tray and Test Handler using the same}

The present invention relates to a test handler, and more particularly, to a test handler for testing the performance of the semiconductor device in the development stage.

The test handler is a device for testing whether or not semiconductor devices produced through various processes operate normally. Mass-produced semiconductor devices are tested by using the test handlers for their respective performance and according to the test results. After classified as good or bad, only good will be shipped.

Since semiconductor devices are used as components of various types of products in daily life, and such products are used not only at room temperature but also at high or low temperatures depending on the use, the semiconductor devices are used to test the performance of semiconductor devices. Or it is necessary to test whether the function is properly performed even at low temperatures, and therefore, the test handler is designed to perform the test in a state in which the semiconductor device is maintained at an extreme state of high temperature or low temperature.

As described above, a process in which the semiconductor device is tested by the test handler will be briefly described. First, a plurality of semiconductor devices are contained in a container called a test tray, and then the test tray is moved to a high or low temperature chamber to the test tray. The contained semiconductor element is heated or cooled. Next, the test tray is transported to the test board while maintaining a predetermined temperature to connect the semiconductor device contained in the test tray and the test socket mounted on the test board in a one-to-one manner to test the performance of each semiconductor device. To perform. Next, when the test is completed, the test tray is moved to a low or high temperature chamber to return the semiconductor device contained in the test tray to a room temperature state. Next, according to the test results, good semiconductor devices and defective semiconductor devices are classified and placed in containers called customer trays.

The test process of such a semiconductor device is an essential step performed by a semiconductor device manufacturer, and since the speed of the test process has a great influence on the yield of the semiconductor device, the test handler is equipped to test more semiconductor devices at a time. The composition is developing. In other words, test trays containing semiconductor devices are gradually being enlarged to accommodate 64, 128, and 256 semiconductor devices at one time, and thus, the configuration of chambers and the like is gradually increasing.

On the other hand, the testing of semiconductor devices is generally conducted for the purpose of classifying them as good or defective products before mass shipment and before shipment. However, even during the development of semiconductor devices, it is necessary to check whether the developed semiconductor devices function properly. If there is an error, you need to correct and correct it. Therefore, even in the development stage of the semiconductor device, a test handler is required to test whether the performance of the semiconductor device is eligible.

However, the test handler used to test the semiconductor device in such a development stage has little need to consider the yield, so it is less necessary to test a large amount of semiconductor devices at the same time. Therefore, the test handler developed for mass production is used as it is. Rather, it does not meet the needs of the user, and needs to be configured to be more easily used in consideration of the accuracy of the test and the user's convenience.

The present invention is designed to meet such demands, and the present invention is applied to the test handler and the test handler which can test the semiconductor device in the development stage more easily while satisfying the test accuracy and user convenience, and the test tray An object of the present invention is to provide a test tray feeder that can be more easily transported.

The present invention is provided with a holding member for holding one side of the test tray to achieve the above object, the first transfer device for transferring the test tray from the first position to the second position; And a pushing member for pushing one side of the test tray, and a second feeding device for transferring the test tray from the second position to the third position.

The holding member may include a holding groove holding one side of the test tray.

The holding member is connected to the first moving member through a first connecting member, and the first moving member can be moved from the first position to the second position by the first cylinder device.

The pushing member is connected to the second moving member through a second connecting member, and the second moving member is moved from the first position to the second position by the second cylinder device, and the pushing member is positioned in the second position. And a length corresponding to the distance between the third position and the third position.

The contact surface of the test tray pushed by the pushing member and the holding surface of the test tray held by the holding member may be different from each other.

The pushing member may move up and down between a height of the holding member and a height lower than the height of the holding member.

The pushing member may move up and down by a third cylinder device provided in the second connection member.

The invention also includes a first chamber portion having a heating zone and a test zone; A second chamber portion formed on one side of the first chamber portion and having a cooling region; A first buffer part formed in front of a heating region of the first chamber part; A loading / unloading portion formed in front of the test area of the first chamber portion; A second buffer portion formed in front of the second chamber portion; And a test tray transfer device having the above-described first transfer device and second transfer device for transferring a test tray from the first buffer portion to the first chamber portion.

The first position may be a position of the first buffer portion, the second position may be a position between the first buffer portion and the first chamber portion, and the third position may be a position of the first chamber portion.

An opening and closing device for opening and closing a first opening and a first opening is formed at a boundary between the first chamber and the second chamber so that the test tray can move from the first chamber to the second chamber. An opening / closing device for opening and closing a predetermined second opening portion and the second opening portion is provided on a side surface of the first chamber portion facing the first buffer portion to move the test tray from the first buffer portion to the heating region of the first chamber portion. An opening for opening and closing a third opening and the third opening at a side surface of the second chamber facing the second buffer so that a test tray can be moved from the second chamber to the second buffer. A device is formed, and the opening and closing device comprises a cylinder, a cylinder rod connected to the cylinder, and a plate connected to the cylinder rod. The plate may be formed so as to close or to open the rising or falling of the first opening, second opening and third opening.

A loading stacker for loading a semiconductor device to be tested is provided at one front side of the loading / unloading unit, and an unloading stacker for separating and loading a tested semiconductor device is provided at the other front side of the loading / unloading unit. A position alignment device is provided in an area between the loading / unloading unit and the loading stacker, and an area between the loading / unloading unit and the unloading stacker, and the loading / unloading unit, the loading stacker, and the unloading unit. In order to transfer the semiconductor device between the loading stacker and the alignment device, a semiconductor device transfer mechanism including a Y axis stage, an X axis stage connected to the Y axis stage, and a picker unit connected to the X axis stage may be provided.

The first chamber part and the second chamber part may enter one horizontal test tray, and the process may proceed.

According to the present invention has the following effects.

First, the test tray transfer apparatus according to the present invention is formed on the front side of the first chamber by performing a first step transfer process using a first transfer device and a second step transfer process using a second transfer device. The test tray may be easily transferred from the first buffer part to the first chamber part through the second opening part.

Second, since the test handler according to the present invention comprises the heating area and the test area as one first chamber part, it is easier to maintain the semiconductor device at a high temperature during the test process for the semiconductor device, and thus a precise test process can be made. In addition, there is an effect that the equipment configuration is simplified and the material cost is reduced as compared to the configuration of the heating zone and the test zone, each composed of a separate chamber.

Third, unlike the test handler under the mass production system, the test handler according to the present invention is designed such that one test tray is operated in the first chamber part and the second chamber part, so that a plurality of test trays can be operated simultaneously. This eliminates the need for a very simple machine configuration.

Fourth, according to the test handler of the present invention, the first opening is formed only at the boundary between the first chamber and the second chamber, and the first opening is opened only when the test tray moves from the first chamber to the second chamber. Otherwise, since the first opening is closed, it is easy to maintain the internal temperature of the first chamber portion and the second chamber portion.

In addition, when the test tray is transferred from the first buffer part to the first chamber part and when the test tray is transferred from the second chamber part to the second buffer part, the second opening part and the third opening part are also transferred when the test tray is transferred. It is easy to maintain the internal temperature of the first chamber portion and the second chamber portion because the second opening portion and the third opening portion are closed.

Fifth, according to the test handler of the present invention, by forming the first buffer portion in front of the heating region of the first chamber portion, the test tray can more easily enter the heating region of the first chamber portion, and in the heating region of the first chamber portion, The process waiting time due to the time difference between the heating process and the loading and unloading process in the loading / unloading unit can be shortened.

Also, by forming the second buffer portion in front of the second chamber portion, the test tray can be more easily moved out of the second chamber portion, and the cooling process in the second chamber portion and the loading / unloading portion in the loading / unloading portion The process waiting time due to the time difference between loading processes can be shortened.

Sixth, according to the test handler of the present invention, by configuring the alignment device in the region between the loading / unloading unit and the unloading stacker, and the region between the loading / unloading unit and the loading stacker, the semiconductor during the loading and unloading process The misalignment of the devices can be minimized to minimize errors.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 is a schematic plan view of a test handler according to an embodiment of the present invention, Figure 2 is a perspective view of a chamber configuration according to an embodiment of the present invention, Figures 3a and 3b is an embodiment of the present invention 4 is a perspective view of the opening and closing device according to an embodiment of the present invention.

5A and 5B are a perspective view and a right side view, respectively, in a standby step of a test tray feeder according to an embodiment of the present invention, and FIGS. 6A and 6B are respectively a test tray feeder according to an embodiment of the present invention. 7A and 7B are respectively a perspective view and a right side view in a second step of a test tray feeder according to an embodiment of the present invention, and FIGS. 8A, 8B and 8C are respectively. Is a left side view of the second transfer device according to an embodiment of the present invention, which shows a state in which the pushing member of the second transfer device moves up and down.

As can be seen in Figure 1, the test handler according to an embodiment of the present invention is the first chamber portion 100, the second chamber portion 200, the loading / unloading portion 300, the first buffer portion 400 , The second buffer unit 500, the loading stacker 600, the unloading stacker 700, the semiconductor device transfer mechanisms 810, 820, and 830, and a test tray transfer device (not shown).

<1st chamber part 100 and 2nd chamber part 200>

The first chamber part 100 and the second chamber part 200 will be described with reference to FIGS. 1, 2, 3A, and 3B.

As shown in FIGS. 1 and 2, the first chamber part 100 includes a heating area 110 and a test area 120.

The heating region 110 is a region for heating the semiconductor element in a high temperature extreme state, and the test region 120 is a region for performing a test on the semiconductor element while maintaining the temperature of the heated semiconductor element at a high temperature state. .

As such, the first chamber part 100 is provided with a predetermined heating mechanism (not shown) for both the heating area 110 and the test area 120 to be maintained at a high temperature.

Only one heating device may be provided in the first chamber part 100, or may be separately provided in each of the heating area 110 and the test area 120. The heating mechanism may be connected to the upper cover of the first chamber part 100 to blow hot air into the first chamber part 100.

Although not shown, a test board having a test socket is positioned below the test area 120, and a pushing unit is provided on the test area 120 to push the test tray toward the test board.

The operation of the first chamber unit 100 will be described briefly. First, a test tray for accommodating a plurality of semiconductor devices enters the heating region 110 in a horizontal state, and then a heating process for the semiconductor devices is performed. After the heating is completed, the test tray is moved to the test area 120 in a horizontal state, and then a test is performed on the semiconductor device. In the test process, the pushing unit provided on the test area 120 pushes the test tray toward the test board, and thus the semiconductor device contained in the test tray is connected to the test socket of the test board.

Since the present invention aims at testing a semiconductor device in a development stage, there is less demand for testing a large amount of semiconductor devices in a short time. Therefore, unlike a test handler under a mass production system, one test tray may be used as the first test tray. It is designed to operate in the chamber part 100 does not require an elevator, etc. to operate a large number of test trays at the same time, the equipment configuration is very simple.

In addition, in the present invention, since the heating area 110 and the test area 120 are configured as one first chamber part 100, it is easier to maintain the semiconductor device at a high temperature during a test process for the semiconductor device. A precise test process can be made, and the equipment configuration is simplified and the material cost can be reduced compared to the configuration of the heating zone and the test zone, respectively.

The second chamber part 200 is formed on one side of the first chamber part 100 and includes a cooling region 210 for cooling the tested semiconductor device to a room temperature state. Therefore, a cooling device (not shown) is provided in the second chamber part 200, and the cooling device is connected to the upper cover of the second chamber part 200 to have a low temperature inside the second chamber part 200. It can be configured to blow air of.

After the test is completed in the test area 120 of the first chamber part 100, the test tray is transferred to the second chamber part 200 and cooled to a room temperature. Accordingly, a first opening is formed at the boundary 150 between the first chamber part 100 and the second chamber part 200 so that the test tray can be moved from the first chamber part 100 to the second chamber part 200. 170 is formed.

If the first opening 170 is always open, the internal temperature of the first chamber 100 and the second chamber 200 may not be easily maintained, and thus a test tray may be removed from the first chamber 100. A predetermined opening / closing device 180 is additionally formed so that the first opening 170 is opened only when the second chamber 200 moves to the second chamber 200.

As can be seen in FIGS. 3A and 3B, the opening and closing device 180 includes a cylinder 182, a cylinder rod 184 connected to the cylinder 182, and a plate 186 connected to the cylinder rod 184. Is made of. The plate 186 is located inside the boundary portion 150 of the first chamber portion 100 and the second chamber portion 200 to substantially open or close the first opening 170 formed at the boundary portion 150. Do it.

Referring to the operation of the opening and closing device 180 is as follows.

As shown in FIG. 3A, when the cylinder 182 is driven to raise the cylinder rod 184, the plate 186 connected to the cylinder rod 184 rises inside the boundary part 150, and finally the first Ascending to the opening 170 is formed. Thus, the plate 186 covers the first opening 170 so that the first opening 170 is closed.

As shown in FIG. 3B, when the cylinder 182 is driven and the cylinder rod 184 is lowered, the plate 186 connected to the cylinder rod 184 is lowered in the boundary portion 150 and finally the first It moves out of the region of the opening 170. Therefore, the plate 186 does not cover the first opening 170 so that the first opening 170 opens.

Meanwhile, in FIGS. 3A and 3B, although the first opening 170 is closed when the cylinder rod 184 is raised, and the first opening 170 is opened when the cylinder rod 184 is lowered, the first opening 170 is opened. The opening and closing device 180 may be configured to open the first opening 170 when the cylinder rod 184 is raised and close the first opening 170 when the cylinder rod 184 is lowered.

The opening and closing device 180 having the above-described configuration, in addition to the boundary portion 150 of the first chamber portion 100 and the second chamber portion 200, is a front side surface of the first chamber portion 100 and the second chamber portion. It is also formed in the front side of the (200).

The test tray moves from the first buffer part 400 to the heating region of the first chamber part 100, and therefore, the first chamber facing the first buffer part 400 for the movement of the test tray. A predetermined second opening 190 is formed on the front side of the part 400.

In addition, the test tray is moved from the second chamber portion 200 to the second buffer portion 500, so that the second chamber portion facing the second buffer portion 500 for the movement of the test tray ( The predetermined third opening 220 is formed on the front side of the 400.

If the second opening 190 or the third opening 220 is always open, the internal temperature of the first chamber 100 or the second chamber 200 is not easily maintained, and thus the test tray is moved. Only a predetermined opening and closing device is further formed so that the second opening 190 or the third opening 220 is opened and closed otherwise, and the opening and closing device 180 according to FIGS. 3A and 3B is described as the opening and closing device. The same switching device as is used.

Meanwhile, since the embodiment of the present invention described above relates to a test handler capable of testing a semiconductor device at a high temperature, a heating region 110 is formed in the first chamber part 100 and the second chamber part 200. Cooling region 210 is formed in the present invention, but the present invention also includes a test handler for testing a semiconductor device at a low temperature, in which case the heating region 110 of the first chamber portion 100 is a cooling region. The cooling zone 210 of the second chamber 200 becomes a heating zone.

<Loading / unloading unit 300, the first buffer unit 400 and the second buffer unit 500>

The loading / unloading unit 300, the first buffer unit 400, and the second buffer unit 500 will be described with reference to FIGS. 1 and 4.

The loading / unloading unit 300 is a space for loading a semiconductor device to be tested into a test tray and unloading a tested semiconductor device from a test tray, and the test area 120 of the first chamber part 100. It is formed in the front.

The first buffer unit 400 is a space in which the test tray, which has been loaded in the loading / unloading unit 300, remains before entering the heating region 110 of the first chamber unit 100. It is formed in front of the heating region 110 of the chamber portion 100.

The loading test tray should be moved to the heating area 110 of the first chamber part 100. The loading / unloading part 300, which is the space where the loading is performed, is the first chamber part 100. Since the first buffer unit 400 is formed in front of the heating region 110 of the first chamber unit 100, the test tray is formed at the position of the first chamber unit 100. It is to be able to enter the heating zone 110 more easily. In addition, the first buffer unit 400 is a time difference between a heating process in the heating region 110 of the first chamber unit 100 and a loading and unloading process in the loading / unloading unit 300. It also serves to temporarily hold the test tray to reduce process waiting time.

The second buffer unit 500 is a space where the test tray, which has been cooled in the second chamber unit 200, remains before exiting the second chamber unit 200 and moving to the loading / unloading unit 300. It is formed in front of the second chamber portion 200.

The test tray after the cooling is completed should be moved to the loading / unloading unit 300 to be unloaded. The loading / unloading unit 300, which is the space where the unloading is performed, is connected to the second chamber part 200. Since it is not in the front position, the second buffer portion 500 is formed in front of the second chamber portion 200 so that the test tray can be more easily moved out of the second chamber portion 200. In addition, the second buffer unit 500 shortens the process waiting time due to the time difference between the cooling process in the second chamber unit 200 and the loading and unloading process in the loading / unloading unit 300. It also serves as a temporary hold on the test tray.

<Test Tray Feeder>

The test tray transfer apparatus will be described with reference to FIGS. 1 and 2, 5A and 5B, 6A and 6B, 7A and 7B, and 8A to 8C.

Referring to FIG. 1, the loading of the loading / unloading unit 300 is completed and the test tray transferred to the first buffer unit 400 is transferred from the first buffer unit 400 to the first chamber unit 100. do.

Therefore, a predetermined test tray feeder is provided to transfer the test tray from the first buffer part 400 to the first chamber part 100.

On the other hand, since the first buffer unit 400 is maintained at room temperature, while the first chamber unit 100 is maintained at high temperature, as shown in FIG. 2, the internal temperature of the first chamber unit 100 is maintained. A predetermined second opening 190 is formed on the front side of the first chamber part 100 for ease of maintenance. Therefore, the test tray may be transferred from the first buffer unit 400 to the first chamber unit 100 through the second opening 190 as described above, and the test tray transfer apparatus according to the present invention may enable this. It is designed.

The test tray transfer apparatus according to the present invention transfers the test tray through two stages, and thus includes a first transfer apparatus in charge of the first stage transfer and a second transfer apparatus in charge of the second stage transfer.

The first step transfer is a position (hereinafter referred to as a second position) between the first buffer portion 400 and the first chamber portion 100 at a position of the first buffer portion 400 (hereinafter referred to as a first position). The test tray is transferred to the test tray, and the second step transfer is to transfer the test tray from the second position to the position of the first chamber part 100 (hereinafter referred to as the third position).

First, the test tray transfer apparatus according to the present invention will be described in detail, and then, in the process of transferring the test tray from the first buffer unit 400 to the first chamber unit 100 using the test tray transfer apparatus according to the present invention. This will be described.

As can be seen in Figures 5a and 5b, the test tray transfer device 900 according to the present invention is composed of a first transfer device 910 and a second transfer device 960.

The first transfer device 910 includes a first cylinder device 920, a first moving member 930, a first connection member 935, and a holding member 940.

The first cylinder device 920 is connected to the first moving member 930 to serve to move the first moving member 930.

The first moving member 930 is moved by the first cylinder device 920 and is connected to the holding member 940 by the first connection member 935.

The first connection member 935 serves to connect the first moving member 930 and the holding member 940.

The holding member 940 is provided with a holding groove 945 for holding one side of the test tray and is connected to the first moving member 930 through the first connecting member 935.

The first transfer device 910 having such a configuration serves to transfer the test tray from the first position to the second position. As described above, the holding groove 945 of the holding member 940 in the first position is described. When the first cylinder device 920 moves the first moving member 930 from the first position to the second position in a state where the test tray is held at the test tray, through the first connection member 935 The holding member 940 connected to the first moving member 930 is moved from the first position to the second position, so that the test tray is moved from the first position to the second position.

The second transfer device 960 includes a second cylinder device 970, a second moving member 980, a second connecting member 985, and a pushing member 990.

The second cylinder device 970 is connected to the second moving member 980 and serves to move the second moving member 980.

The second moving member 980 is moved by the second cylinder device 970 and is connected to the pushing member 990 by the second connection member 985.

The second connection member 985 serves to connect the second moving member 980 and the pushing member 990.

The pushing member 990 is configured to push the test tray in contact with one side of the test tray and is connected to the second moving member 980 through the second connecting member 985. The pushing member 990 is extended by a length corresponding to the distance between the second position and the third position.

The second transfer apparatus 960 having such a configuration serves to transfer the test tray transferred to the second position by the first transfer apparatus 910 from the second position to the third position. In a state where the test tray is held by the holding member 940 of the first transfer device 910 at the second position, the second cylinder device 970 moves the second moving member 980 to the first position. When moved to the second position in the, the pushing member 990 connected to the second moving member 980 through the second connecting member 985 pushes the side of the test tray. In this case, the test tray is moved by the length of the pushing member 990. Since the pushing member 990 is extended by a length corresponding to the distance between the second position and the third position, the test tray eventually becomes. Moves from the second position to the third position.

On the other hand, the pushing member 990 of the second transfer device 960 is prevented when the holding member 940 of the first transfer device 910 transfers the test tray from the first position to the second position. It should not be. Thus, as can be seen in Figure 5b, the pushing member 990 should be at a position lower than the height of the holding member 940.

In addition, in order to transfer the test tray held by the holding member 940 from the second position to the third position, the pushing member 990 first moves the height of the holding member 940. The contact surface of the test tray pushed by the pushing member 990 and the holding surface of the test tray held by the holding member 940 should be different from each other.

As a result, the pushing member 990 moves horizontally in a different path along the movement path of the holding member 940, and at the same time between the height of the holding member 940 and a height lower than the height of the holding member 940. Will move up and down.

A process of vertically moving the pushing member 990 between a height of the holding member 940 and a height lower than that of the holding member 940 will be described with reference to FIGS. 8A and 8B.

8A and 8B are left side views of the second transfer device 960. As shown in FIGS. 8A and 8B, the pushing member 990 is provided in the second connection member 985 in the third cylinder device. (986). Accordingly, the pushing member 990 is moved up and down from the height lower than the height of the holding member 940 (see FIG. 8A) by the third cylinder device 986 to the same height as the holding member 940 (see FIG. 8B). Will move.

The process of transferring the test tray from the first buffer unit 400 to the first chamber unit 100 using the test tray transfer apparatus described above will be described in detail as follows.

First, as shown in FIGS. 5A and 5B, both the holding member 940 of the first transfer apparatus 910 and the pushing member 990 of the second transfer apparatus 960 are located at the first position (first buffer portion 400). In this state, the test tray waits with its side held in the holding groove 945 of the holding member 940 of the first transfer device 910.

6A and 6B, the test tray in the first position is moved to the second position (the first buffer part 400 and the first chamber part 100) by the operation of the first transfer device 910. ) Position).

This process is performed through a process in which the holding member 940 of the first transfer device 910 moves from a first position to a second position.

That is, the first cylinder device 920 moves the first moving member 930 from the first position to the second position, so that the holding member 940 connected to the first moving member 930 is firstly moved. The test tray is moved from the position to the second position, thereby moving the test tray from the first position to the second position.

Next, as shown in FIGS. 7A and 7B, the test tray in the second position is transferred to the third position (the position of the first chamber part 100) by the operation of the second transfer apparatus 960.

In this process, the pushing member 990 of the second transfer device 960 vertically rises from the position lower than the holding member 940 to the same position as the holding member 940 and the pushing member 990 is The process of the horizontal transfer of the test tray from the second position to the third position.

That is, as shown in FIG. 8B, the pushing member 990 is vertically raised upward by the third cylinder device 986, and then, as shown in FIGS. 7A, 7B, and 8C, the second cylinder device ( 970 moves the second moving member 980 from the first position to the second position, thereby causing the pushing member 990 connected to the second moving member 980 to move, thereby removing the test tray. It moves from the second position to the third position.

<Loading stacker 600, unloading stacker 700, semiconductor device transfer mechanism (810, 820, 830)>

The loading stacker 600, the unloading stacker 700, and the semiconductor device transfer mechanisms 810, 820, and 830 will be described with reference to FIGS. 1 and 4.

The loading stacker 600 is a space in which the semiconductor device to be tested is placed on a front side of the loading / unloading unit 300. The loading stacker 600 is provided with a container called a customer tray. The customer tray contains the semiconductor devices to be tested.

The unloading stacker 700 is located at the other front side of the loading / unloading unit 300, and is a space for separating and loading the tested semiconductor device into good and bad parts. The unloading stacker 700 includes a customer. A tray is provided and the tested semiconductor device is separated and contained in the customer tray.

The semiconductor device transfer mechanisms 810, 820, and 830 include a Y axis stage 810, an X axis stage 820, and a picker unit 830.

The Y-axis stage 810 is fixed and supports the X-axis stage 820, and the X-axis stage 820 is connected to the Y-axis stage 810 and follows the Y-axis stage 810. It moves in the axial direction. The picker unit 830 is connected to the X-axis stage 820 and moves along the X-axis stage 820 in the Y-axis direction, and also moves along the X-axis stage 820 in the X-axis direction. do.

The semiconductor device transfer mechanisms 810, 820, and 830 transfer the semiconductor device to be tested in the customer tray of the loading stacker 600 to the test tray of the loading / unloading unit 300, and the loading. The semiconductor device contained in the test tray of the unloading unit 300 is transferred to the customer tray of the unloading stacker 700.

Referring to the transfer process of the semiconductor device, the picker unit 830 moves to the loading / unloading unit 300 to pick the tested semiconductor device and moves to the unloading stacker 700 in that state. The semiconductor device is separated and contained in a customer tray of the unloading stacker 700. Thereafter, the picker unit 830 moves from the unloading stacker 700 to the loading stacker 600 to pick a semiconductor device to be tested and moves to the loading / unloading unit 300 as it is. The semiconductor device is loaded onto the test tray of the loading / unloading unit 300. As such, the picker unit 830 moves back to the loading / unloading unit 300 via the loading / unloading unit 300, the unloading stacker 700, and the loading stacker 600. Even if only one picker unit 830 is formed, the loading and unloading process of the semiconductor device may be easily performed. However, it is also possible to form a plurality of the picker unit 830.

Meanwhile, the picker unit 830 moves from the loading / unloading unit 300 to the unloading stacker 700 or from the loading stacker 600 to the loading / unloading unit 300. Misalignment of the picking semiconductor device during movement may occur, in which case an error may occur in the loading and unloading process of the semiconductor device. Therefore, in order to prevent such an error, an area between the loading / unloading unit 300 and the unloading stacker 700, and between the loading / unloading unit 300 and the loading stacker 600. The alignment device 850 may be further provided in the area.

The alignment device 850 has a seating portion 855 configured to be inclined at its side, as can be seen in the enlarged cross section of FIG. Therefore, when the picker unit 830 picks up a misaligned semiconductor device and puts the semiconductor device on the alignment device 850, the seating part 855 is inclined along the inclined surface of the seating part 855. Since the semiconductor device is seated on the bottom surface of 855, the semiconductor device is aligned correctly.

As described above, in the case where the alignment device 850 is provided, the transfer process of the semiconductor device will be described. The picker unit 830 moves to the loading / unloading unit 300 to pick the tested semiconductor device, and then, the state thereof. Move the positioner 850 to the positioner 850 to align the position by placing the semiconductor element on the positioner 850, pick the semiconductor element again, and then move to the unloading stacker 700 in that state. The semiconductor device is separated and contained in a customer tray of the unloading stacker 700. Thereafter, the picker unit 830 moves from the unloading stacker 700 to the loading stacker 600 to pick a semiconductor device to be tested, and moves to the positioning device 850 in that state. Place the device on the alignment device 850 to align the position, pick the semiconductor device again, and move to the loading / unloading unit 300 as it is, and the test tray of the loading / unloading unit 300. The semiconductor element is loaded into the package.

Although the test handler according to the present invention described above is designed for testing a semiconductor device in a development stage, the test handler according to the present invention is not necessarily applied only to a test of a semiconductor device in a development stage, and is manufactured in mass production. May also be applied to testing a sample of such or such semiconductor devices.

1 is a schematic plan view of a test handler according to an embodiment of the present invention.

2 is a perspective view of a chamber unit configuration according to an embodiment of the present invention.

3A and 3B are perspective views of an opening and closing device according to an embodiment of the present invention.

Figure 4 is a perspective view of the chamber portion front side configuration according to an embodiment of the present invention.

5A and 5B are a perspective view and a right side view, respectively, in a waiting stage of a test tray feeder according to an embodiment of the present invention.

6A and 6B are a perspective view and a right side view, respectively, in a first step of a test tray feeder according to an embodiment of the present invention.

7A and 7B are respectively a perspective view and a right side view of a second stage of a test tray feeder according to an embodiment of the present invention.

8A, 8B and 8C are left side views of a second transfer device according to an embodiment of the present invention.

<Description of Signs of Major Parts of Drawings>

100: first chamber portion 110: heating area

120: test area 200: second chamber portion

210: cooling zone 300: loading / unloading unit

400: first buffer unit 500: second buffer unit

600: loading stacker 700: unloading stacker

810: Y-axis stage 820: X-axis stage

830: picker unit 850: alignment device

900: test tray feeder 910: first feeder

920: first cylinder device 930: first moving member

940: holding member 960: second transfer device

970: second cylinder device 980: second moving member

990: pushing member

Claims (12)

A first chamber portion having a heating area and a test area; A second chamber portion formed on one side of the first chamber portion and having a cooling region; A first buffer part formed in front of a heating region of the first chamber part; A loading / unloading portion formed in front of the test area of the first chamber portion; A second buffer portion formed in front of the second chamber portion; And And a test tray feeder for transferring a test tray from the first buffer part to the first chamber part. The test tray feeder, A first transfer device for transferring the test tray from the first buffer part to a second position between the first buffer part and the first chamber part; And And a second transfer device configured to transfer the test tray transferred to the second position by the first transfer device from the second position to the first chamber part. The method of claim 1, An opening and closing device for opening and closing a first opening and a first opening is formed at a boundary between the first chamber and the second chamber so that the test tray can be moved from the first chamber to the second chamber. Opening and closing device for opening and closing a predetermined second opening and the second opening on the side surface of the first chamber portion facing the first buffer portion to move the test tray from the first buffer portion to the heating region of the first chamber portion Is formed, On the side of the second chamber portion facing the second buffer portion so that the test tray can move from the second chamber portion to the second buffer portion, an opening and closing device for opening and closing a predetermined third opening portion and the third opening portion is formed. And, The opening and closing device includes a cylinder, a cylinder rod connected to the cylinder, and a plate connected to the cylinder rod, and the plate is formed to open or close the first opening, the second opening, and the third opening by raising or lowering the plate. Test handler, characterized in that. The method of claim 1, A front side of the loading / unloading unit is provided with a loading stacker for loading a semiconductor device to be tested, The other side of the loading / unloading part is provided with an unloading stacker for separating and loading the tested semiconductor device. Positioning devices are provided in the region between the loading / unloading portion and the loading stacker, and the region between the loading / unloading portion and the unloading stacker. In order to transfer the semiconductor device between the loading / unloading unit, the loading stacker, the unloading stacker, and the alignment device, a Y-axis stage, an X-axis stage connected to the Y-axis stage, and a picker unit connected to the X-axis stage The test handler, characterized in that the semiconductor element transfer mechanism made of. The test handler according to claim 1, wherein the first chamber portion and the second chamber portion are configured such that one test tray enters a horizontal state and the process proceeds. The method of claim 1, wherein the first transfer device A first moving member moved from the first buffer portion to the second position by a first cylinder device; A holding member for holding one side of the test tray, the holding member transferring the test tray from the first buffer part to the second position according to the movement of the first moving member; And a first connection member connecting the first moving member and the holding member. The method of claim 1 or 5, wherein the second transfer device A second moving member moved by the second cylinder device; A pushing member contacting one side of the test tray and transferring the test tray from the second position to the first chamber part according to the movement of the second moving member; And And a second connection member connecting the second moving member and the pushing member. The method of claim 6, The second moving member is moved from the first buffer portion to the second position by the second cylinder device, And the pushing member extends by a length corresponding to a distance between the second position and the first chamber portion. The method of claim 1, The first transfer device includes a holding member holding one side of a test tray and transferring a test tray from the first buffer portion to the second position; The second conveying apparatus is in contact with one side of a test tray and includes a pushing member for conveying a test tray from the second position to the first chamber portion; And a contact surface of the test tray in contact with the pushing member and a holding surface of the test tray held by the holding member are different from each other. The method of claim 1, The first transfer device includes a holding member holding one side of a test tray and transferring a test tray from the first buffer portion to the second position; The second conveying apparatus is in contact with one side of a test tray and includes a pushing member for conveying a test tray from the second position to the first chamber portion; And the pushing member moves up and down between a height of the holding member and a height lower than that of the holding member. The method of claim 9, The second conveying apparatus includes a second moving member moved by a second cylinder device, and a second connecting member connecting the second moving member and the pushing member; The pushing member moves the test tray from the second position to the first chamber part according to the movement of the second moving member, and moves up and down by a third cylinder device provided in the second connecting member. Test handler. The test handler of claim 1, wherein the first transfer device includes a holding member configured to hold one side of the test tray and to transfer the test tray from the first buffer portion to the second position. The test handler of claim 1, wherein the second transfer device includes a pushing member that contacts one side of the test tray and transfers the test tray from the second position to the first chamber part.

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