JPWO2025062534A5 - - Google Patents
Info
- Publication number
- JPWO2025062534A5 JPWO2025062534A5 JP2025547049A JP2025547049A JPWO2025062534A5 JP WO2025062534 A5 JPWO2025062534 A5 JP WO2025062534A5 JP 2025547049 A JP2025547049 A JP 2025547049A JP 2025547049 A JP2025547049 A JP 2025547049A JP WO2025062534 A5 JPWO2025062534 A5 JP WO2025062534A5
- Authority
- JP
- Japan
- Prior art keywords
- heat transfer
- transfer fluid
- recess
- wafer mounting
- platform according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/034118 WO2025062534A1 (ja) | 2023-09-20 | 2023-09-20 | ウエハ載置台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2025062534A1 JPWO2025062534A1 (https=) | 2025-03-27 |
| JPWO2025062534A5 true JPWO2025062534A5 (https=) | 2026-04-22 |
Family
ID=95072460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025547049A Pending JPWO2025062534A1 (https=) | 2023-09-20 | 2023-09-20 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2025062534A1 (https=) |
| WO (1) | WO2025062534A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5738751A (en) * | 1994-09-01 | 1998-04-14 | Applied Materials, Inc. | Substrate support having improved heat transfer |
| JP2013125791A (ja) * | 2011-12-13 | 2013-06-24 | Canon Inc | 保持装置、描画装置、および、物品の製造方法 |
| JP7486018B2 (ja) * | 2018-12-21 | 2024-05-17 | Toto株式会社 | 静電チャック |
| JP7407529B2 (ja) * | 2019-07-10 | 2024-01-04 | 東京エレクトロン株式会社 | 基板載置台、基板処理装置及び温度制御方法 |
| WO2022215633A1 (ja) * | 2021-04-09 | 2022-10-13 | 東京エレクトロン株式会社 | 静電チャックおよび基板処理装置 |
-
2023
- 2023-09-20 JP JP2025547049A patent/JPWO2025062534A1/ja active Pending
- 2023-09-20 WO PCT/JP2023/034118 patent/WO2025062534A1/ja active Pending
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