JPWO2025062534A1 - - Google Patents
Info
- Publication number
- JPWO2025062534A1 JPWO2025062534A1 JP2025547049A JP2025547049A JPWO2025062534A1 JP WO2025062534 A1 JPWO2025062534 A1 JP WO2025062534A1 JP 2025547049 A JP2025547049 A JP 2025547049A JP 2025547049 A JP2025547049 A JP 2025547049A JP WO2025062534 A1 JPWO2025062534 A1 JP WO2025062534A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/034118 WO2025062534A1 (ja) | 2023-09-20 | 2023-09-20 | ウエハ載置台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2025062534A1 true JPWO2025062534A1 (https=) | 2025-03-27 |
| JPWO2025062534A5 JPWO2025062534A5 (https=) | 2026-04-22 |
Family
ID=95072460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025547049A Pending JPWO2025062534A1 (https=) | 2023-09-20 | 2023-09-20 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2025062534A1 (https=) |
| WO (1) | WO2025062534A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5738751A (en) * | 1994-09-01 | 1998-04-14 | Applied Materials, Inc. | Substrate support having improved heat transfer |
| JP2013125791A (ja) * | 2011-12-13 | 2013-06-24 | Canon Inc | 保持装置、描画装置、および、物品の製造方法 |
| JP7486018B2 (ja) * | 2018-12-21 | 2024-05-17 | Toto株式会社 | 静電チャック |
| JP7407529B2 (ja) * | 2019-07-10 | 2024-01-04 | 東京エレクトロン株式会社 | 基板載置台、基板処理装置及び温度制御方法 |
| WO2022215633A1 (ja) * | 2021-04-09 | 2022-10-13 | 東京エレクトロン株式会社 | 静電チャックおよび基板処理装置 |
-
2023
- 2023-09-20 JP JP2025547049A patent/JPWO2025062534A1/ja active Pending
- 2023-09-20 WO PCT/JP2023/034118 patent/WO2025062534A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025062534A1 (ja) | 2025-03-27 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20260121 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20260121 |