JPWO2024143432A5 - - Google Patents
Info
- Publication number
- JPWO2024143432A5 JPWO2024143432A5 JP2024567900A JP2024567900A JPWO2024143432A5 JP WO2024143432 A5 JPWO2024143432 A5 JP WO2024143432A5 JP 2024567900 A JP2024567900 A JP 2024567900A JP 2024567900 A JP2024567900 A JP 2024567900A JP WO2024143432 A5 JPWO2024143432 A5 JP WO2024143432A5
- Authority
- JP
- Japan
- Prior art keywords
- dechucking
- electrostatic chuck
- chuck according
- electrode
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022212754 | 2022-12-28 | ||
| PCT/JP2023/046818 WO2024143432A1 (ja) | 2022-12-28 | 2023-12-26 | 静電チャック |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024143432A1 JPWO2024143432A1 (https=) | 2024-07-04 |
| JPWO2024143432A5 true JPWO2024143432A5 (https=) | 2025-09-11 |
Family
ID=91717759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024567900A Pending JPWO2024143432A1 (https=) | 2022-12-28 | 2023-12-26 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP4645673A1 (https=) |
| JP (1) | JPWO2024143432A1 (https=) |
| CN (1) | CN120435818A (https=) |
| TW (1) | TW202427678A (https=) |
| WO (1) | WO2024143432A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004031599A (ja) | 2002-06-25 | 2004-01-29 | Kyocera Corp | 静電チャック |
| JP2005166820A (ja) * | 2003-12-01 | 2005-06-23 | Toshiba Ceramics Co Ltd | 静電チャック装置 |
| JP2006332204A (ja) * | 2005-05-24 | 2006-12-07 | Toto Ltd | 静電チャック |
| US8497980B2 (en) * | 2007-03-19 | 2013-07-30 | Nikon Corporation | Holding apparatus, exposure apparatus, exposure method, and device manufacturing method |
-
2023
- 2023-12-26 JP JP2024567900A patent/JPWO2024143432A1/ja active Pending
- 2023-12-26 WO PCT/JP2023/046818 patent/WO2024143432A1/ja not_active Ceased
- 2023-12-26 EP EP23912210.4A patent/EP4645673A1/en active Pending
- 2023-12-26 CN CN202380089729.8A patent/CN120435818A/zh active Pending
- 2023-12-27 TW TW112151091A patent/TW202427678A/zh unknown
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