JP2008085245A5 - - Google Patents

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Publication number
JP2008085245A5
JP2008085245A5 JP2006266275A JP2006266275A JP2008085245A5 JP 2008085245 A5 JP2008085245 A5 JP 2008085245A5 JP 2006266275 A JP2006266275 A JP 2006266275A JP 2006266275 A JP2006266275 A JP 2006266275A JP 2008085245 A5 JP2008085245 A5 JP 2008085245A5
Authority
JP
Japan
Prior art keywords
base plate
electrostatic chuck
conductive component
wiring
chuck according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006266275A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008085245A (ja
JP5032818B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006266275A priority Critical patent/JP5032818B2/ja
Priority claimed from JP2006266275A external-priority patent/JP5032818B2/ja
Priority to KR1020070092950A priority patent/KR101343456B1/ko
Priority to US11/857,681 priority patent/US7483256B2/en
Priority to TW096136152A priority patent/TWI423378B/zh
Publication of JP2008085245A publication Critical patent/JP2008085245A/ja
Publication of JP2008085245A5 publication Critical patent/JP2008085245A5/ja
Application granted granted Critical
Publication of JP5032818B2 publication Critical patent/JP5032818B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006266275A 2006-09-29 2006-09-29 静電チャック Active JP5032818B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006266275A JP5032818B2 (ja) 2006-09-29 2006-09-29 静電チャック
KR1020070092950A KR101343456B1 (ko) 2006-09-29 2007-09-13 정전 척
US11/857,681 US7483256B2 (en) 2006-09-29 2007-09-19 Electrostatic chuck
TW096136152A TWI423378B (zh) 2006-09-29 2007-09-28 靜電夾盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006266275A JP5032818B2 (ja) 2006-09-29 2006-09-29 静電チャック

Publications (3)

Publication Number Publication Date
JP2008085245A JP2008085245A (ja) 2008-04-10
JP2008085245A5 true JP2008085245A5 (https=) 2009-07-30
JP5032818B2 JP5032818B2 (ja) 2012-09-26

Family

ID=39260903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006266275A Active JP5032818B2 (ja) 2006-09-29 2006-09-29 静電チャック

Country Status (4)

Country Link
US (1) US7483256B2 (https=)
JP (1) JP5032818B2 (https=)
KR (1) KR101343456B1 (https=)
TW (1) TWI423378B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5236448B2 (ja) * 2008-12-16 2013-07-17 アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド 静電チャック及びそれを備えた基板合着装置
JP5816454B2 (ja) * 2011-05-09 2015-11-18 新光電気工業株式会社 基板温調固定装置
JP5733756B2 (ja) * 2011-08-31 2015-06-10 アルプス電気株式会社 高分子アクチュエータおよびその製造方法
US10388493B2 (en) * 2011-09-16 2019-08-20 Lam Research Corporation Component of a substrate support assembly producing localized magnetic fields
US20140318455A1 (en) * 2013-04-26 2014-10-30 Varian Semiconductor Equipment Associates, Inc. Low emissivity electrostatic chuck
CN110085546B (zh) * 2013-08-05 2023-05-16 应用材料公司 用于薄基板搬运的静电载体
JP6308871B2 (ja) * 2014-05-28 2018-04-11 新光電気工業株式会社 静電チャック及び半導体・液晶製造装置
JP6464071B2 (ja) * 2015-10-13 2019-02-06 日本特殊陶業株式会社 基板保持装置
US10460969B2 (en) * 2016-08-22 2019-10-29 Applied Materials, Inc. Bipolar electrostatic chuck and method for using the same
CN111357096A (zh) 2017-11-24 2020-06-30 东华隆株式会社 发热部件
KR101964631B1 (ko) * 2018-04-06 2019-04-02 (주)아폴로테크 완충력이 우수한 정전척

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2521471B2 (ja) * 1987-05-14 1996-08-07 富士通株式会社 静電吸着装置
JP3264391B2 (ja) * 1993-05-17 2002-03-11 東京エレクトロン株式会社 静電吸着体の離脱装置
US5528451A (en) * 1994-11-02 1996-06-18 Applied Materials, Inc Erosion resistant electrostatic chuck
JP2000100916A (ja) * 1998-09-18 2000-04-07 Tomoegawa Paper Co Ltd 静電チャック装置
JP4021661B2 (ja) * 2001-12-27 2007-12-12 株式会社巴川製紙所 静電チャック装置
JP2003324144A (ja) 2002-04-30 2003-11-14 Shin-Etsu Engineering Co Ltd 静電チャック及びそれを用いたフラットパネル用基板の貼り合わせ装置
KR100666039B1 (ko) * 2003-12-05 2007-01-10 동경 엘렉트론 주식회사 정전척
US7993489B2 (en) 2005-03-31 2011-08-09 Tokyo Electron Limited Capacitive coupling plasma processing apparatus and method for using the same

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