JPWO2024143381A5 - - Google Patents

Info

Publication number
JPWO2024143381A5
JPWO2024143381A5 JP2024567872A JP2024567872A JPWO2024143381A5 JP WO2024143381 A5 JPWO2024143381 A5 JP WO2024143381A5 JP 2024567872 A JP2024567872 A JP 2024567872A JP 2024567872 A JP2024567872 A JP 2024567872A JP WO2024143381 A5 JPWO2024143381 A5 JP WO2024143381A5
Authority
JP
Japan
Prior art keywords
region
semiconductor device
sic
sic semiconductor
trench structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024567872A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024143381A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/046702 external-priority patent/WO2024143381A1/ja
Publication of JPWO2024143381A1 publication Critical patent/JPWO2024143381A1/ja
Publication of JPWO2024143381A5 publication Critical patent/JPWO2024143381A5/ja
Pending legal-status Critical Current

Links

JP2024567872A 2022-12-28 2023-12-26 Pending JPWO2024143381A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022212613 2022-12-28
PCT/JP2023/046702 WO2024143381A1 (ja) 2022-12-28 2023-12-26 SiC半導体装置

Publications (2)

Publication Number Publication Date
JPWO2024143381A1 JPWO2024143381A1 (https=) 2024-07-04
JPWO2024143381A5 true JPWO2024143381A5 (https=) 2025-09-11

Family

ID=91717772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024567872A Pending JPWO2024143381A1 (https=) 2022-12-28 2023-12-26

Country Status (5)

Country Link
US (1) US20250318183A1 (https=)
JP (1) JPWO2024143381A1 (https=)
CN (1) CN120419306A (https=)
DE (1) DE112023004896T5 (https=)
WO (1) WO2024143381A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012142537A (ja) * 2010-12-16 2012-07-26 Mitsubishi Electric Corp 絶縁ゲート型バイポーラトランジスタとその製造方法
JP7007971B2 (ja) * 2018-03-29 2022-01-25 ローム株式会社 半導体装置
GB2590716B (en) * 2019-12-30 2023-12-20 Mqsemi Ag Fortified trench planar MOS power transistor
US11961903B2 (en) * 2020-05-26 2024-04-16 Hyundai Mobis Co., Ltd. Power semiconductor device and method of fabricating the same
DE112021006730T5 (de) * 2021-02-01 2023-10-12 Rohm Co., Ltd. Sic-halbleiterbauelement

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