JPWO2024142722A5 - - Google Patents

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Publication number
JPWO2024142722A5
JPWO2024142722A5 JP2024567324A JP2024567324A JPWO2024142722A5 JP WO2024142722 A5 JPWO2024142722 A5 JP WO2024142722A5 JP 2024567324 A JP2024567324 A JP 2024567324A JP 2024567324 A JP2024567324 A JP 2024567324A JP WO2024142722 A5 JPWO2024142722 A5 JP WO2024142722A5
Authority
JP
Japan
Prior art keywords
group
abrasive
water
particles
soluble polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024567324A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024142722A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/042574 external-priority patent/WO2024142722A1/ja
Publication of JPWO2024142722A1 publication Critical patent/JPWO2024142722A1/ja
Publication of JPWO2024142722A5 publication Critical patent/JPWO2024142722A5/ja
Pending legal-status Critical Current

Links

JP2024567324A 2022-12-27 2023-11-28 Pending JPWO2024142722A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022209603 2022-12-27
PCT/JP2023/042574 WO2024142722A1 (ja) 2022-12-27 2023-11-28 研磨剤、研磨方法、半導体部品の製造方法、及び研磨用添加液

Publications (2)

Publication Number Publication Date
JPWO2024142722A1 JPWO2024142722A1 (https=) 2024-07-04
JPWO2024142722A5 true JPWO2024142722A5 (https=) 2025-09-05

Family

ID=91717161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024567324A Pending JPWO2024142722A1 (https=) 2022-12-27 2023-11-28

Country Status (4)

Country Link
US (1) US20250368860A1 (https=)
JP (1) JPWO2024142722A1 (https=)
TW (1) TW202438613A (https=)
WO (1) WO2024142722A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2025023040A1 (https=) * 2023-07-21 2025-01-30

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013137220A1 (ja) * 2012-03-14 2015-08-03 日立化成株式会社 研磨方法
JP2017149798A (ja) * 2016-02-22 2017-08-31 日立化成株式会社 研磨液、研磨液セット及び基体の研磨方法
KR102827839B1 (ko) * 2019-12-27 2025-06-30 도아고세이가부시키가이샤 분산제 및 연마제 조성물 (dispersant and polishing agent composition)

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