JPWO2024122541A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2024122541A5
JPWO2024122541A5 JP2024562945A JP2024562945A JPWO2024122541A5 JP WO2024122541 A5 JPWO2024122541 A5 JP WO2024122541A5 JP 2024562945 A JP2024562945 A JP 2024562945A JP 2024562945 A JP2024562945 A JP 2024562945A JP WO2024122541 A5 JPWO2024122541 A5 JP WO2024122541A5
Authority
JP
Japan
Prior art keywords
region
concentration
peak
doping concentration
donors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024562945A
Other languages
English (en)
Japanese (ja)
Other versions
JP7827170B2 (ja
JPWO2024122541A1 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/043470 external-priority patent/WO2024122541A1/ja
Publication of JPWO2024122541A1 publication Critical patent/JPWO2024122541A1/ja
Publication of JPWO2024122541A5 publication Critical patent/JPWO2024122541A5/ja
Application granted granted Critical
Publication of JP7827170B2 publication Critical patent/JP7827170B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024562945A 2022-12-08 2023-12-05 半導体装置および半導体装置の製造方法 Active JP7827170B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022196682 2022-12-08
JP2022196682 2022-12-08
PCT/JP2023/043470 WO2024122541A1 (ja) 2022-12-08 2023-12-05 半導体装置および半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPWO2024122541A1 JPWO2024122541A1 (https=) 2024-06-13
JPWO2024122541A5 true JPWO2024122541A5 (https=) 2025-03-10
JP7827170B2 JP7827170B2 (ja) 2026-03-10

Family

ID=91379320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024562945A Active JP7827170B2 (ja) 2022-12-08 2023-12-05 半導体装置および半導体装置の製造方法

Country Status (5)

Country Link
US (1) US20250126863A1 (https=)
JP (1) JP7827170B2 (https=)
CN (1) CN119452752A (https=)
DE (1) DE112023002227T5 (https=)
WO (1) WO2024122541A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4989797B2 (ja) * 2006-03-30 2012-08-01 新電元工業株式会社 Igbtの製造方法
JP5532758B2 (ja) * 2009-08-31 2014-06-25 富士電機株式会社 半導体装置の製造方法および半導体装置
US9887125B2 (en) * 2014-06-06 2018-02-06 Infineon Technologies Ag Method of manufacturing a semiconductor device comprising field stop zone
DE102017118975B4 (de) * 2017-08-18 2023-07-27 Infineon Technologies Ag Halbleitervorrichtung mit einem cz-halbleiterkörper und verfahren zum herstellen einer halbleitervorrichtung mit einem cz-halbleiterkörper
DE102018132236B4 (de) * 2018-12-14 2023-04-27 Infineon Technologies Ag Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung
JP7251616B2 (ja) * 2019-04-26 2023-04-04 富士電機株式会社 半導体装置および製造方法
WO2021166980A1 (ja) * 2020-02-18 2021-08-26 富士電機株式会社 半導体装置

Similar Documents

Publication Publication Date Title
US10950524B2 (en) Heterojunction semiconductor device for reducing parasitic capacitance
CN109585537B (zh) 半导体装置
US9214535B2 (en) Semiconductor device
CN104900690B (zh) 半导体装置
JP2021073733A5 (https=)
JP6221974B2 (ja) 半導体装置
US10083957B2 (en) Semiconductor device
JP2007150282A (ja) 電界効果トランジスタ
US20180308926A1 (en) Semiconductor device
JPWO2022239285A5 (https=)
JP5531700B2 (ja) 絶縁ゲートバイポーラトランジスタ
JP2024060027A5 (https=)
JP5768028B2 (ja) 半導体装置
JPWO2023063411A5 (https=)
JP2023179936A5 (https=)
JPWO2022107727A5 (https=)
JPWO2022014623A5 (https=)
JP7487692B2 (ja) 電界効果トランジスタ
KR100873419B1 (ko) 높은 항복 전압, 낮은 온 저항 및 작은 스위칭 손실을갖는 전력용 반도체 소자
JPWO2022239284A5 (https=)
JP7115000B2 (ja) 半導体装置
US20250169143A1 (en) Insulated gate bipolar transistor
US12317536B2 (en) Semiconductor device and power switching system including the same
US20250380476A1 (en) Semiconductor device
JPWO2024122541A5 (https=)