JPWO2024101166A5 - - Google Patents
Info
- Publication number
- JPWO2024101166A5 JPWO2024101166A5 JP2024557314A JP2024557314A JPWO2024101166A5 JP WO2024101166 A5 JPWO2024101166 A5 JP WO2024101166A5 JP 2024557314 A JP2024557314 A JP 2024557314A JP 2024557314 A JP2024557314 A JP 2024557314A JP WO2024101166 A5 JPWO2024101166 A5 JP WO2024101166A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- group
- substrate processing
- processing method
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022178903 | 2022-11-08 | ||
| PCT/JP2023/038633 WO2024101166A1 (ja) | 2022-11-08 | 2023-10-26 | 基板処理方法、金属含有レジスト形成用組成物、金属含有レジスト及び基板処理システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024101166A1 JPWO2024101166A1 (https=) | 2024-05-16 |
| JPWO2024101166A5 true JPWO2024101166A5 (https=) | 2025-08-04 |
Family
ID=91032730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024557314A Pending JPWO2024101166A1 (https=) | 2022-11-08 | 2023-10-26 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250264805A1 (https=) |
| EP (1) | EP4617777A1 (https=) |
| JP (1) | JPWO2024101166A1 (https=) |
| KR (1) | KR20250107207A (https=) |
| CN (1) | CN120153326A (https=) |
| TW (1) | TW202437006A (https=) |
| WO (1) | WO2024101166A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200144580A (ko) | 2018-05-11 | 2020-12-29 | 램 리써치 코포레이션 | Euv 패터닝 가능한 하드 마스크들을 제조하기 위한 방법들 |
| WO2020263750A1 (en) * | 2019-06-27 | 2020-12-30 | Lam Research Corporation | Apparatus for photoresist dry deposition |
| KR20230041749A (ko) * | 2020-07-17 | 2023-03-24 | 램 리써치 코포레이션 | 유기 공-반응 물질들 (co-reactants) 을 사용한 건식 증착된 포토레지스트들 |
-
2023
- 2023-10-26 KR KR1020257018129A patent/KR20250107207A/ko active Pending
- 2023-10-26 JP JP2024557314A patent/JPWO2024101166A1/ja active Pending
- 2023-10-26 WO PCT/JP2023/038633 patent/WO2024101166A1/ja not_active Ceased
- 2023-10-26 EP EP23888514.9A patent/EP4617777A1/en active Pending
- 2023-10-26 CN CN202380076750.4A patent/CN120153326A/zh active Pending
- 2023-10-31 TW TW112141739A patent/TW202437006A/zh unknown
-
2025
- 2025-05-06 US US19/199,672 patent/US20250264805A1/en active Pending
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