JPWO2024053456A5 - - Google Patents

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Publication number
JPWO2024053456A5
JPWO2024053456A5 JP2024545580A JP2024545580A JPWO2024053456A5 JP WO2024053456 A5 JPWO2024053456 A5 JP WO2024053456A5 JP 2024545580 A JP2024545580 A JP 2024545580A JP 2024545580 A JP2024545580 A JP 2024545580A JP WO2024053456 A5 JPWO2024053456 A5 JP WO2024053456A5
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JP
Japan
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region
trench
contact
gate
insulating layer
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JP2024545580A
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English (en)
Japanese (ja)
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JPWO2024053456A1 (https=
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Priority claimed from PCT/JP2023/030989 external-priority patent/WO2024053456A1/ja
Publication of JPWO2024053456A1 publication Critical patent/JPWO2024053456A1/ja
Publication of JPWO2024053456A5 publication Critical patent/JPWO2024053456A5/ja
Pending legal-status Critical Current

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JP2024545580A 2022-09-09 2023-08-28 Pending JPWO2024053456A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022143915 2022-09-09
PCT/JP2023/030989 WO2024053456A1 (ja) 2022-09-09 2023-08-28 半導体装置および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2024053456A1 JPWO2024053456A1 (https=) 2024-03-14
JPWO2024053456A5 true JPWO2024053456A5 (https=) 2025-05-21

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ID=90191233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024545580A Pending JPWO2024053456A1 (https=) 2022-09-09 2023-08-28

Country Status (4)

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US (1) US20250203897A1 (https=)
JP (1) JPWO2024053456A1 (https=)
CN (1) CN119856588A (https=)
WO (1) WO2024053456A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3705977B2 (ja) * 1999-12-03 2005-10-12 松下電器産業株式会社 ゲート電極の形成方法
JP2003303967A (ja) * 2002-04-09 2003-10-24 Shindengen Electric Mfg Co Ltd 半導体装置およびその製造方法
JP4383820B2 (ja) * 2003-10-10 2009-12-16 トヨタ自動車株式会社 トレンチゲート型半導体装置
JPWO2019103135A1 (ja) * 2017-11-24 2020-11-19 ローム株式会社 半導体装置
JP6876767B2 (ja) * 2019-10-07 2021-05-26 ローム株式会社 半導体装置

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