JPWO2023286711A5 - - Google Patents
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- Publication number
- JPWO2023286711A5 JPWO2023286711A5 JP2023534776A JP2023534776A JPWO2023286711A5 JP WO2023286711 A5 JPWO2023286711 A5 JP WO2023286711A5 JP 2023534776 A JP2023534776 A JP 2023534776A JP 2023534776 A JP2023534776 A JP 2023534776A JP WO2023286711 A5 JPWO2023286711 A5 JP WO2023286711A5
- Authority
- JP
- Japan
- Prior art keywords
- copper
- conductor film
- separating
- crosslinked layer
- laminate according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 36
- 239000010949 copper Substances 0.000 claims description 30
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 28
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 239000004020 conductor Substances 0.000 claims description 26
- ALKZAGKDWUSJED-UHFFFAOYSA-N dinuclear copper ion Chemical compound [Cu].[Cu] ALKZAGKDWUSJED-UHFFFAOYSA-N 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 19
- 239000002159 nanocrystal Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 238000004132 cross linking Methods 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910001431 copper ion Inorganic materials 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021115527 | 2021-07-13 | ||
| JP2021115527 | 2021-07-13 | ||
| PCT/JP2022/027099 WO2023286711A1 (ja) | 2021-07-13 | 2022-07-08 | 銅－銅積層体の分離方法及び銅－銅積層体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023286711A1 JPWO2023286711A1 (https=) | 2023-01-19 |
| JPWO2023286711A5 true JPWO2023286711A5 (https=) | 2023-12-06 |
| JP7597418B2 JP7597418B2 (ja) | 2024-12-10 |
Family
ID=84919416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023534776A Active JP7597418B2 (ja) | 2021-07-13 | 2022-07-08 | 銅－銅積層体の分離方法及び銅－銅積層体 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP4371678A4 (https=) |
| JP (1) | JP7597418B2 (https=) |
| KR (1) | KR102918834B1 (https=) |
| WO (1) | WO2023286711A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0885830A (ja) * | 1994-09-16 | 1996-04-02 | Kobe Steel Ltd | 銅または銅合金表面のめっき剥離法 |
| CN100447264C (zh) * | 2007-04-13 | 2008-12-31 | 浙江理工大学 | 一种从镀金废料中回收黄金的方法 |
| JP6251935B2 (ja) * | 2013-09-05 | 2017-12-27 | 国立研究開発法人物質・材料研究機構 | 接合方法 |
| JP2016134497A (ja) * | 2015-01-19 | 2016-07-25 | 凸版印刷株式会社 | 配線基板積層体及びこれを用いた半導体装置の製造方法 |
| JP7018223B2 (ja) | 2018-05-18 | 2022-02-10 | 国立研究開発法人物質・材料研究機構 | 積層体の製造方法、積層体、及び、暖房便座装置 |
-
2022
- 2022-07-08 WO PCT/JP2022/027099 patent/WO2023286711A1/ja not_active Ceased
- 2022-07-08 JP JP2023534776A patent/JP7597418B2/ja active Active
- 2022-07-08 KR KR1020237038023A patent/KR102918834B1/ko active Active
- 2022-07-08 EP EP22842055.0A patent/EP4371678A4/en active Pending
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