JP7597418B2 - 銅-銅積層体の分離方法及び銅-銅積層体 - Google Patents
銅-銅積層体の分離方法及び銅-銅積層体 Download PDFInfo
- Publication number
- JP7597418B2 JP7597418B2 JP2023534776A JP2023534776A JP7597418B2 JP 7597418 B2 JP7597418 B2 JP 7597418B2 JP 2023534776 A JP2023534776 A JP 2023534776A JP 2023534776 A JP2023534776 A JP 2023534776A JP 7597418 B2 JP7597418 B2 JP 7597418B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- conductor film
- laminate
- separating
- copper conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
- B09B3/70—Chemical treatment, e.g. pH adjustment or oxidation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B15/00—Obtaining copper
- C22B15/0002—Preliminary treatment
- C22B15/0004—Preliminary treatment without modification of the copper constituent
- C22B15/0006—Preliminary treatment without modification of the copper constituent by dry processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B2101/00—Type of solid waste
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B2101/00—Type of solid waste
- B09B2101/15—Electronic waste
- B09B2101/17—Printed circuit boards [PCB]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021115527 | 2021-07-13 | ||
| JP2021115527 | 2021-07-13 | ||
| PCT/JP2022/027099 WO2023286711A1 (ja) | 2021-07-13 | 2022-07-08 | 銅-銅積層体の分離方法及び銅-銅積層体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023286711A1 JPWO2023286711A1 (https=) | 2023-01-19 |
| JPWO2023286711A5 JPWO2023286711A5 (https=) | 2023-12-06 |
| JP7597418B2 true JP7597418B2 (ja) | 2024-12-10 |
Family
ID=84919416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023534776A Active JP7597418B2 (ja) | 2021-07-13 | 2022-07-08 | 銅-銅積層体の分離方法及び銅-銅積層体 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP4371678A4 (https=) |
| JP (1) | JP7597418B2 (https=) |
| KR (1) | KR102918834B1 (https=) |
| WO (1) | WO2023286711A1 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101092663A (zh) | 2007-04-13 | 2007-12-26 | 浙江理工大学 | 一种从镀金废料中回收黄金的方法 |
| WO2016116980A1 (ja) | 2015-01-19 | 2016-07-28 | 凸版印刷株式会社 | 配線基板積層体及びこれを用いた半導体装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0885830A (ja) * | 1994-09-16 | 1996-04-02 | Kobe Steel Ltd | 銅または銅合金表面のめっき剥離法 |
| JP6251935B2 (ja) * | 2013-09-05 | 2017-12-27 | 国立研究開発法人物質・材料研究機構 | 接合方法 |
| JP7018223B2 (ja) | 2018-05-18 | 2022-02-10 | 国立研究開発法人物質・材料研究機構 | 積層体の製造方法、積層体、及び、暖房便座装置 |
-
2022
- 2022-07-08 WO PCT/JP2022/027099 patent/WO2023286711A1/ja not_active Ceased
- 2022-07-08 JP JP2023534776A patent/JP7597418B2/ja active Active
- 2022-07-08 KR KR1020237038023A patent/KR102918834B1/ko active Active
- 2022-07-08 EP EP22842055.0A patent/EP4371678A4/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101092663A (zh) | 2007-04-13 | 2007-12-26 | 浙江理工大学 | 一种从镀金废料中回收黄金的方法 |
| WO2016116980A1 (ja) | 2015-01-19 | 2016-07-28 | 凸版印刷株式会社 | 配線基板積層体及びこれを用いた半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023286711A1 (ja) | 2023-01-19 |
| KR20230165328A (ko) | 2023-12-05 |
| KR102918834B1 (ko) | 2026-01-27 |
| JPWO2023286711A1 (https=) | 2023-01-19 |
| EP4371678A4 (en) | 2025-08-06 |
| EP4371678A1 (en) | 2024-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI482198B (zh) | And a wide-band gap semiconductor is used for manufacturing a composite substrate | |
| KR102658526B1 (ko) | 산화물 단결정 박막을 구비한 복합 웨이퍼의 제조 방법 | |
| KR101453135B1 (ko) | 직접 접합 방법에서의 질소-플라즈마 표면 처리 | |
| KR102599962B1 (ko) | 산화물 단결정 박막을 구비한 복합 웨이퍼의 제조 방법 | |
| JP6388272B1 (ja) | 基板接合方法、基板接合システムおよび親水化処理装置の制御方法 | |
| CN107615448B (zh) | 具备氧化物单晶薄膜的复合晶片的制造方法 | |
| KR101526245B1 (ko) | 임시 접합을 채용하는 반도체 구조를 제조하기 위한 방법 | |
| JP2009220151A (ja) | 接合方法およびこの方法により作成されるデバイス、接合装置並びにこの方法により接合される基板 | |
| JP2010161359A (ja) | 貼り合わせウェーハの製造方法 | |
| CN102210007A (zh) | 制造soi基板的方法 | |
| CN107636802A (zh) | 具备氧化物单晶薄膜的复合晶片的制造方法 | |
| JP7512641B2 (ja) | 接合基板の製造方法 | |
| WO2015025777A1 (ja) | デスミア処理方法およびデスミア処理装置 | |
| JP7597418B2 (ja) | 銅-銅積層体の分離方法及び銅-銅積層体 | |
| JP6643873B2 (ja) | 2枚の基板を積層する方法 | |
| JP6117134B2 (ja) | 複合基板の製造方法 | |
| JP3124508B2 (ja) | 窒化物表面の改質方法及びその方法により表面改質された窒化物 | |
| JP2013251404A (ja) | チップの表面処理方法、接合方法、及び表面処理装置 | |
| JP2011192764A (ja) | 膜の除去方法及び膜除去用装置 | |
| KR102843010B1 (ko) | 두 개의 반도체 기판을 접합하기 위한 방법 | |
| JP2006258958A (ja) | 基板接着方法及び基板接着装置 | |
| Shih et al. | Hybrid Surface Treatment for Copper-to-Copper Thermal Compression Bonding Thermal Compression Bonding | |
| Dy et al. | Study of thin film metallization adhesion in ceramic multichip module | |
| JP2004054170A (ja) | イオンビームエッチングを用いたレーザー光学結晶の接合法 | |
| Fu et al. | Low Temperature Flip Chip Bonding Using Squeegee-Embedded Au Nanoporous Bump Activated by VUV/O3 Treatment: Fu, Kaneda, Okada, Matsunaga, Shoji, Saito, Nishikawa, and Mizuno |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230907 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230907 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20241112 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20241121 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7597418 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |