KR102918834B1 - 구리-구리 적층체의 분리 방법 및 구리-구리 적층체 - Google Patents

구리-구리 적층체의 분리 방법 및 구리-구리 적층체

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Publication number
KR102918834B1
KR102918834B1 KR1020237038023A KR20237038023A KR102918834B1 KR 102918834 B1 KR102918834 B1 KR 102918834B1 KR 1020237038023 A KR1020237038023 A KR 1020237038023A KR 20237038023 A KR20237038023 A KR 20237038023A KR 102918834 B1 KR102918834 B1 KR 102918834B1
Authority
KR
South Korea
Prior art keywords
copper
cross
conductor film
laminate
separating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020237038023A
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English (en)
Korean (ko)
Other versions
KR20230165328A (ko
Inventor
아키츠 시게토우
Original Assignee
코쿠리츠켄큐카이하츠호징 붓시쯔 자이료 켄큐키코
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Application filed by 코쿠리츠켄큐카이하츠호징 붓시쯔 자이료 켄큐키코 filed Critical 코쿠리츠켄큐카이하츠호징 붓시쯔 자이료 켄큐키코
Publication of KR20230165328A publication Critical patent/KR20230165328A/ko
Application granted granted Critical
Publication of KR102918834B1 publication Critical patent/KR102918834B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
    • B09B3/70—Chemical treatment, e.g. pH adjustment or oxidation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B15/00—Obtaining copper
    • C22B15/0002—Preliminary treatment
    • C22B15/0004—Preliminary treatment without modification of the copper constituent
    • C22B15/0006—Preliminary treatment without modification of the copper constituent by dry processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B2101/00—Type of solid waste
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B2101/00—Type of solid waste
    • B09B2101/15—Electronic waste
    • B09B2101/17—Printed circuit boards [PCB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
KR1020237038023A 2021-07-13 2022-07-08 구리-구리 적층체의 분리 방법 및 구리-구리 적층체 Active KR102918834B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021115527 2021-07-13
JPJP-P-2021-115527 2021-07-13
PCT/JP2022/027099 WO2023286711A1 (ja) 2021-07-13 2022-07-08 銅－銅積層体の分離方法及び銅－銅積層体

Publications (2)

Publication Number Publication Date
KR20230165328A KR20230165328A (ko) 2023-12-05
KR102918834B1 true KR102918834B1 (ko) 2026-01-27

Family

ID=84919416

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237038023A Active KR102918834B1 (ko) 2021-07-13 2022-07-08 구리-구리 적층체의 분리 방법 및 구리-구리 적층체

Country Status (4)

Country Link
EP (1) EP4371678A4 (https=)
JP (1) JP7597418B2 (https=)
KR (1) KR102918834B1 (https=)
WO (1) WO2023286711A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015051542A (ja) 2013-09-05 2015-03-19 独立行政法人物質・材料研究機構 接合方法、及び接合装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0885830A (ja) * 1994-09-16 1996-04-02 Kobe Steel Ltd 銅または銅合金表面のめっき剥離法
CN100447264C (zh) * 2007-04-13 2008-12-31 浙江理工大学 一种从镀金废料中回收黄金的方法
JP2016134497A (ja) * 2015-01-19 2016-07-25 凸版印刷株式会社 配線基板積層体及びこれを用いた半導体装置の製造方法
JP7018223B2 (ja) 2018-05-18 2022-02-10 国立研究開発法人物質・材料研究機構 積層体の製造方法、積層体、及び、暖房便座装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015051542A (ja) 2013-09-05 2015-03-19 独立行政法人物質・材料研究機構 接合方法、及び接合装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
A, Akitsu Shigetou et al. "VUV-Assisted Low Temperature Bonding For Organic/Inorganic Hybrid Integration at Atmospheric Pressure". 2013 3rd IEEE CPMT Symposium Japan.
Akitsu Shigetou et al. "Hybrid Bonding of Organic/Inorganic Substrates in Ambient Air for Eco-Friendly 3D Integration of Microelectronics". 2012 Electronics Goes Green 2012+.
Akitsu Shigetou et al. "Modified Diffusion Bonding of Chemical Mechanical Polishing Cu at 150 ℃ at Ambient Prssure". Applied Physics Express.

Also Published As

Publication number Publication date
WO2023286711A1 (ja) 2023-01-19
JP7597418B2 (ja) 2024-12-10
KR20230165328A (ko) 2023-12-05
JPWO2023286711A1 (https=) 2023-01-19
EP4371678A4 (en) 2025-08-06
EP4371678A1 (en) 2024-05-22

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