JPWO2023199419A5 - - Google Patents

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Publication number
JPWO2023199419A5
JPWO2023199419A5 JP2024515226A JP2024515226A JPWO2023199419A5 JP WO2023199419 A5 JPWO2023199419 A5 JP WO2023199419A5 JP 2024515226 A JP2024515226 A JP 2024515226A JP 2024515226 A JP2024515226 A JP 2024515226A JP WO2023199419 A5 JPWO2023199419 A5 JP WO2023199419A5
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JP
Japan
Prior art keywords
insulating film
film
superconducting
opening
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024515226A
Other languages
English (en)
Japanese (ja)
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JPWO2023199419A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/017665 external-priority patent/WO2023199419A1/ja
Publication of JPWO2023199419A1 publication Critical patent/JPWO2023199419A1/ja
Publication of JPWO2023199419A5 publication Critical patent/JPWO2023199419A5/ja
Pending legal-status Critical Current

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JP2024515226A 2022-04-13 2022-04-13 Pending JPWO2023199419A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/017665 WO2023199419A1 (ja) 2022-04-13 2022-04-13 ジョセフソン接合素子、量子デバイス及びジョセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023199419A1 JPWO2023199419A1 (https=) 2023-10-19
JPWO2023199419A5 true JPWO2023199419A5 (https=) 2024-12-27

Family

ID=88329252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024515226A Pending JPWO2023199419A1 (https=) 2022-04-13 2022-04-13

Country Status (3)

Country Link
EP (1) EP4510170A4 (https=)
JP (1) JPWO2023199419A1 (https=)
WO (1) WO2023199419A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213287A (ja) 1986-03-14 1987-09-19 Agency Of Ind Science & Technol ジヨセフソン素子の製造方法
JPS6396973A (ja) * 1986-10-14 1988-04-27 Fujitsu Ltd ジヨセフソン接合素子の製造方法
EP0476844A1 (en) 1990-09-21 1992-03-25 Trw Inc. Method for fabricating Josephson tunnel junctions with accurate junction area control
JPH04188683A (ja) * 1990-11-19 1992-07-07 Sanyo Electric Co Ltd プレーナ型トンネルジョセフソン素子及びその製造方法
US5625290A (en) * 1994-02-23 1997-04-29 Micontech, Inc. Complex superconducting quantum interference device and circuit
JP2003218413A (ja) * 2002-01-22 2003-07-31 National Institute Of Advanced Industrial & Technology 超伝導放射線検出器およびその作製方法
US7060508B2 (en) * 2003-02-12 2006-06-13 Northrop Grumman Corporation Self-aligned junction passivation for superconductor integrated circuit
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
JP5207271B2 (ja) * 2007-09-05 2013-06-12 独立行政法人物質・材料研究機構 高温超伝導単結晶上での面内型ジョセフソン接合形成法
JP5801676B2 (ja) * 2011-10-04 2015-10-28 東京エレクトロン株式会社 半導体装置の製造方法
US9355362B2 (en) 2011-11-11 2016-05-31 Northrop Grumman Systems Corporation Quantum bits and method of forming the same
US9634224B2 (en) * 2014-02-14 2017-04-25 D-Wave Systems Inc. Systems and methods for fabrication of superconducting circuits

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