JPWO2022118464A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2022118464A5
JPWO2022118464A5 JP2022566738A JP2022566738A JPWO2022118464A5 JP WO2022118464 A5 JPWO2022118464 A5 JP WO2022118464A5 JP 2022566738 A JP2022566738 A JP 2022566738A JP 2022566738 A JP2022566738 A JP 2022566738A JP WO2022118464 A5 JPWO2022118464 A5 JP WO2022118464A5
Authority
JP
Japan
Prior art keywords
conductor
josephson junction
conductors
conductor layer
quantum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022566738A
Other languages
English (en)
Japanese (ja)
Other versions
JP7567934B2 (ja
JPWO2022118464A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2020/045248 external-priority patent/WO2022118464A1/ja
Publication of JPWO2022118464A1 publication Critical patent/JPWO2022118464A1/ja
Publication of JPWO2022118464A5 publication Critical patent/JPWO2022118464A5/ja
Application granted granted Critical
Publication of JP7567934B2 publication Critical patent/JP7567934B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022566738A 2020-12-04 2020-12-04 量子デバイス及びその製造方法 Active JP7567934B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/045248 WO2022118464A1 (ja) 2020-12-04 2020-12-04 量子デバイス及びその製造方法

Publications (3)

Publication Number Publication Date
JPWO2022118464A1 JPWO2022118464A1 (https=) 2022-06-09
JPWO2022118464A5 true JPWO2022118464A5 (https=) 2023-08-16
JP7567934B2 JP7567934B2 (ja) 2024-10-16

Family

ID=81854075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022566738A Active JP7567934B2 (ja) 2020-12-04 2020-12-04 量子デバイス及びその製造方法

Country Status (3)

Country Link
US (1) US20230422636A1 (https=)
JP (1) JP7567934B2 (https=)
WO (1) WO2022118464A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115312656B (zh) * 2022-09-02 2025-02-25 量子科技长三角产业创新中心 一种超导量子约瑟夫森结及其制备方法
WO2025052597A1 (ja) * 2023-09-06 2025-03-13 富士通株式会社 量子デバイス、量子デバイスの製造方法及び量子デバイスの検査方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59135783A (ja) * 1983-01-24 1984-08-04 Agency Of Ind Science & Technol ジヨセフソン記憶装置
JPS6474777A (en) * 1987-09-17 1989-03-20 Sanyo Electric Co Manufacture of micro-bridge type josephson device
JP2727773B2 (ja) * 1991-02-25 1998-03-18 日本電気株式会社 ジョセフソン集積回路の製造方法
WO2017015432A1 (en) 2015-07-23 2017-01-26 Massachusetts Institute Of Technology Superconducting integrated circuit
WO2017217961A1 (en) 2016-06-13 2017-12-21 Intel Corporation Josephson junctions made from refractory and noble metals
WO2019032115A1 (en) * 2017-08-11 2019-02-14 Intel Corporation QUANTIC BIT DEVICES WITH JOSEPHSON JUNCTION CONNECTED BELOW SUPPORT CIRCUITS

Similar Documents

Publication Publication Date Title
KR101225601B1 (ko) 대면적 나노스케일 패턴형성방법
JPWO2022118463A5 (https=)
CN108539004B (zh) 亚微米约瑟夫森隧道结及其制备方法
JPWO2022118464A5 (https=)
CN105633268A (zh) 一种超导电路结构及其制备方法
JP3247729B2 (ja) 半導体装置の製造方法
CN114497344B (zh) 深亚微米约瑟夫森隧道结及其制备方法
JPH01108748A (ja) 多層配線構造を有する半導体装置
JPS63260054A (ja) 半導体集積回路装置
JPH0228923A (ja) 半導体装置の製造方法
CN115915908B (zh) 一种超导集成电路器件的制备方法
JPH0612789B2 (ja) 半導体装置
JPH0630352B2 (ja) パタ−ン化層形成法
JPS5935165B2 (ja) 多層薄膜コイルの製法
JP5481928B2 (ja) 配線層レイアウト方法及び半導体装置
JPH02161755A (ja) 半導体装置
JPS6156476A (ja) ジヨセフソン接合素子
JPWO2023199181A5 (ja) 積層体の作製方法
JPH0563250A (ja) 薄膜素子製造方法
JP2959439B2 (ja) 多層高温超伝導集積回路の形成方法
JPS63200578A (ja) 超伝導回路装置
JP2843401B2 (ja) 多層構造配線基板
JPS63216361A (ja) 多層配線構造
JPH04186750A (ja) 半導体装置の製造方法
JPH0438830A (ja) 半導体装置