JPWO2023190386A5 - - Google Patents

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Publication number
JPWO2023190386A5
JPWO2023190386A5 JP2024512483A JP2024512483A JPWO2023190386A5 JP WO2023190386 A5 JPWO2023190386 A5 JP WO2023190386A5 JP 2024512483 A JP2024512483 A JP 2024512483A JP 2024512483 A JP2024512483 A JP 2024512483A JP WO2023190386 A5 JPWO2023190386 A5 JP WO2023190386A5
Authority
JP
Japan
Prior art keywords
formula
sulfur
siloxane
hydrogen atom
independently represent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024512483A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023190386A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/012290 external-priority patent/WO2023190386A1/ja
Publication of JPWO2023190386A1 publication Critical patent/JPWO2023190386A1/ja
Publication of JPWO2023190386A5 publication Critical patent/JPWO2023190386A5/ja
Pending legal-status Critical Current

Links

JP2024512483A 2022-03-29 2023-03-27 Pending JPWO2023190386A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022054385 2022-03-29
PCT/JP2023/012290 WO2023190386A1 (ja) 2022-03-29 2023-03-27 硫黄含有シロキサン、前記硫黄含有シロキサンを含むシリコン含有膜形成用の組成物、硫黄含有シロキサンの製造方法、シリコン含有膜、及びシリコン含有膜の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023190386A1 JPWO2023190386A1 (https=) 2023-10-05
JPWO2023190386A5 true JPWO2023190386A5 (https=) 2026-01-29

Family

ID=88202308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024512483A Pending JPWO2023190386A1 (https=) 2022-03-29 2023-03-27

Country Status (5)

Country Link
JP (1) JPWO2023190386A1 (https=)
KR (1) KR20240167001A (https=)
CN (1) CN118946570A (https=)
TW (1) TW202402888A (https=)
WO (1) WO2023190386A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2867606A (en) * 1954-05-11 1959-01-06 Gen Electric Polymerizable organopolysiloxane solutions and the process of preparing gels from these solutions
JP2006261434A (ja) 2005-03-17 2006-09-28 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude シリコン酸化膜の形成方法
US9460912B2 (en) 2012-04-12 2016-10-04 Air Products And Chemicals, Inc. High temperature atomic layer deposition of silicon oxide thin films
US10822458B2 (en) 2017-02-08 2020-11-03 Versum Materials Us, Llc Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
FR3103489B1 (fr) * 2019-11-21 2021-11-05 Bostik Sa Composition réticulable à l’humidité à base de polymère silylé

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