JPWO2023048062A1 - - Google Patents
Info
- Publication number
- JPWO2023048062A1 JPWO2023048062A1 JP2022557106A JP2022557106A JPWO2023048062A1 JP WO2023048062 A1 JPWO2023048062 A1 JP WO2023048062A1 JP 2022557106 A JP2022557106 A JP 2022557106A JP 2022557106 A JP2022557106 A JP 2022557106A JP WO2023048062 A1 JPWO2023048062 A1 JP WO2023048062A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/36—Sulfur-, selenium-, or tellurium-containing compounds
- C08K5/41—Compounds containing sulfur bound to oxygen
- C08K5/42—Sulfonic acids; Derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/06—Preparatory processes
- C08G77/08—Preparatory processes characterised by the catalysts used
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/80—Siloxanes having aromatic substituents, e.g. phenyl side groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/07—Aldehydes; Ketones
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
- C08K5/19—Quaternary ammonium compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3432—Six-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/49—Phosphorus-containing compounds
- C08K5/51—Phosphorus bound to oxygen
- C08K5/52—Phosphorus bound to oxygen only
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
- C09D183/06—Polysiloxanes containing silicon bound to oxygen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/20—Diluents or solvents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/63—Additives non-macromolecular organic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Silicon Polymers (AREA)
- Epoxy Resins (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024004281A JP2024027180A (ja) | 2021-09-24 | 2024-01-16 | 硬化膜形成用シロキサン樹脂組成物、硬化膜およびポリシロキサンの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021155227 | 2021-09-24 | ||
| JP2021155227 | 2021-09-24 | ||
| PCT/JP2022/034553 WO2023048062A1 (ja) | 2021-09-24 | 2022-09-15 | 硬化膜形成用シロキサン樹脂組成物、硬化膜およびポリシロキサンの製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024004281A Division JP2024027180A (ja) | 2021-09-24 | 2024-01-16 | 硬化膜形成用シロキサン樹脂組成物、硬化膜およびポリシロキサンの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023048062A1 true JPWO2023048062A1 (https=) | 2023-03-30 |
| JPWO2023048062A5 JPWO2023048062A5 (https=) | 2023-09-20 |
| JP7428269B2 JP7428269B2 (ja) | 2024-02-06 |
Family
ID=85720689
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022557106A Active JP7428269B2 (ja) | 2021-09-24 | 2022-09-15 | 硬化膜形成用シロキサン樹脂組成物および硬化膜 |
| JP2024004281A Pending JP2024027180A (ja) | 2021-09-24 | 2024-01-16 | 硬化膜形成用シロキサン樹脂組成物、硬化膜およびポリシロキサンの製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024004281A Pending JP2024027180A (ja) | 2021-09-24 | 2024-01-16 | 硬化膜形成用シロキサン樹脂組成物、硬化膜およびポリシロキサンの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240384065A1 (https=) |
| JP (2) | JP7428269B2 (https=) |
| KR (1) | KR20240065082A (https=) |
| CN (1) | CN117858927A (https=) |
| TW (1) | TW202313789A (https=) |
| WO (1) | WO2023048062A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20250159001A (ko) * | 2023-03-07 | 2025-11-07 | 도레이 카부시키가이샤 | 수지 조성물, 경화막, 경화막의 패턴 형성 기판의 제조 방법, 광학 소자, 및 폴리실록산의 제조 방법 |
| WO2025150226A1 (ja) * | 2024-01-10 | 2025-07-17 | 株式会社レゾナック | ハードコート材、ハードコート及び構造体 |
| WO2025150227A1 (ja) * | 2024-01-10 | 2025-07-17 | 株式会社レゾナック | ハードコート材、ハードコート及び構造体 |
| WO2025150225A1 (ja) * | 2024-01-10 | 2025-07-17 | 株式会社レゾナック | ハードコート材、ハードコート及び構造体 |
| WO2026018782A1 (ja) * | 2024-07-18 | 2026-01-22 | Jsr株式会社 | 保護膜形成用組成物及び半導体基板の製造方法 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000212376A (ja) * | 1999-01-21 | 2000-08-02 | Nof Corp | 生体適合性重合体/シリカゲルハイブリッド体およびその製造方法 |
| JP2002069374A (ja) * | 2000-08-24 | 2002-03-08 | Nippon Yushi Basf Coatings Kk | 耐汚染性塗料組成物、塗装仕上げ方法及び塗装物品 |
| JP2002069442A (ja) * | 2000-09-01 | 2002-03-08 | Showa Denko Kk | シリカ被膜発光体粒子 |
| JP2002129103A (ja) * | 2000-10-23 | 2002-05-09 | Jsr Corp | 膜形成用組成物および絶縁膜形成用材料 |
| KR100901759B1 (ko) * | 2007-09-12 | 2009-06-11 | 제일모직주식회사 | 레지스트 하층막용 하드마스크 조성물, 이를 이용한반도체 집적회로 디바이스의 제조방법 및 반도체 집적회로디바이스 |
| JP2010528453A (ja) * | 2007-05-04 | 2010-08-19 | チェイル インダストリーズ インコーポレイテッド | 半導体素子のギャップ充填用化合物及び前記化合物を用いたコーティング組成物 |
| WO2011093323A1 (ja) * | 2010-01-26 | 2011-08-04 | 日立化成工業株式会社 | 調光材料用(メタ)アクロイル基含有ポリシロキサン樹脂の製造方法、それにより得られる調光材料用(メタ)アクロイル基含有ポリシロキサン樹脂、それを用いた調光材料並びに調光フィルム |
| JP2012066478A (ja) * | 2010-09-24 | 2012-04-05 | Kobe Steel Ltd | プレコートアルミニウム板およびその製造方法 |
| JP2018512487A (ja) * | 2015-03-20 | 2018-05-17 | インクロン オサケユキチュアInkron Oy | 高屈折率シロキサンモノマー、それらの重合及び用途 |
| WO2019124514A1 (ja) * | 2017-12-20 | 2019-06-27 | 日産化学株式会社 | 光硬化性シリコン含有被覆膜形成組成物 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4508887A (en) * | 1983-08-01 | 1985-04-02 | Dow Corning Corporation | Method and novel catalyst compositions for preparing polyorganosiloxanes |
| JPH0645892A (ja) | 1992-08-24 | 1994-02-18 | Yamaha Corp | 信号遅延回路 |
| JP3474007B2 (ja) | 1993-11-05 | 2003-12-08 | 信越化学工業株式会社 | 有機官能基含有オルガノポリシロキサンの製造方法 |
| US20050032357A1 (en) * | 2002-01-17 | 2005-02-10 | Rantala Juha T. | Dielectric materials and methods for integrated circuit applications |
| JP2004107562A (ja) | 2002-09-20 | 2004-04-08 | Jsr Corp | 液晶表示素子の層間絶縁膜を形成するための感放射線性組成物、それから形成された層間絶縁膜、および液晶表示素子 |
| JP2006106311A (ja) | 2004-10-05 | 2006-04-20 | Shin Etsu Chem Co Ltd | ケイ素含有レジスト組成物並びにこれを用いたパターン形成方法 |
| JP4556639B2 (ja) | 2004-11-26 | 2010-10-06 | 東レ株式会社 | ネガ型感光性樹脂組成物、それから形成された透明硬化膜、および硬化膜を有する素子 |
| KR100930672B1 (ko) * | 2008-01-11 | 2009-12-09 | 제일모직주식회사 | 실리콘계 하드마스크 조성물 및 이를 이용한 반도체집적회로 디바이스의 제조방법 |
| US8864894B2 (en) * | 2008-08-18 | 2014-10-21 | Nissan Chemical Industries, Ltd. | Resist underlayer film forming composition containing silicone having onium group |
| KR101288572B1 (ko) * | 2008-12-17 | 2013-07-22 | 제일모직주식회사 | 보관안정성이 우수한 레지스트 하층막용 하드마스크 조성물 |
| KR101344795B1 (ko) * | 2009-12-31 | 2013-12-26 | 제일모직주식회사 | 레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로 디바이스의 제조방법 |
| JP6853668B2 (ja) | 2014-12-16 | 2021-03-31 | 株式会社カネカ | 光及び熱硬化性樹脂組成物、硬化物、並びに積層体 |
| JP7080732B2 (ja) * | 2018-06-01 | 2022-06-06 | 三菱マテリアル電子化成株式会社 | 含フッ素スルホニルイミド塩基含有シリコーン化合物とそれを含有する導電性シリコーン組成物 |
| JPWO2021166701A1 (https=) * | 2020-02-17 | 2021-08-26 | ||
| CN112375087A (zh) * | 2020-11-27 | 2021-02-19 | 浙江天宇药业股份有限公司 | 一种脯氨酸恒格列净的合成方法 |
-
2022
- 2022-09-15 CN CN202280057280.2A patent/CN117858927A/zh active Pending
- 2022-09-15 JP JP2022557106A patent/JP7428269B2/ja active Active
- 2022-09-15 US US18/691,307 patent/US20240384065A1/en active Pending
- 2022-09-15 WO PCT/JP2022/034553 patent/WO2023048062A1/ja not_active Ceased
- 2022-09-15 KR KR1020247008751A patent/KR20240065082A/ko active Pending
- 2022-09-20 TW TW111135537A patent/TW202313789A/zh unknown
-
2024
- 2024-01-16 JP JP2024004281A patent/JP2024027180A/ja active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000212376A (ja) * | 1999-01-21 | 2000-08-02 | Nof Corp | 生体適合性重合体/シリカゲルハイブリッド体およびその製造方法 |
| JP2002069374A (ja) * | 2000-08-24 | 2002-03-08 | Nippon Yushi Basf Coatings Kk | 耐汚染性塗料組成物、塗装仕上げ方法及び塗装物品 |
| JP2002069442A (ja) * | 2000-09-01 | 2002-03-08 | Showa Denko Kk | シリカ被膜発光体粒子 |
| JP2002129103A (ja) * | 2000-10-23 | 2002-05-09 | Jsr Corp | 膜形成用組成物および絶縁膜形成用材料 |
| JP2010528453A (ja) * | 2007-05-04 | 2010-08-19 | チェイル インダストリーズ インコーポレイテッド | 半導体素子のギャップ充填用化合物及び前記化合物を用いたコーティング組成物 |
| KR100901759B1 (ko) * | 2007-09-12 | 2009-06-11 | 제일모직주식회사 | 레지스트 하층막용 하드마스크 조성물, 이를 이용한반도체 집적회로 디바이스의 제조방법 및 반도체 집적회로디바이스 |
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| JP2024027180A (ja) | 2024-02-29 |
| KR20240065082A (ko) | 2024-05-14 |
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| TW202313789A (zh) | 2023-04-01 |
| WO2023048062A1 (ja) | 2023-03-30 |
| US20240384065A1 (en) | 2024-11-21 |
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