JPWO2023032721A5 - - Google Patents

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Publication number
JPWO2023032721A5
JPWO2023032721A5 JP2023545456A JP2023545456A JPWO2023032721A5 JP WO2023032721 A5 JPWO2023032721 A5 JP WO2023032721A5 JP 2023545456 A JP2023545456 A JP 2023545456A JP 2023545456 A JP2023545456 A JP 2023545456A JP WO2023032721 A5 JPWO2023032721 A5 JP WO2023032721A5
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JP
Japan
Prior art keywords
substrate
contact
outer edge
mask member
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023545456A
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English (en)
Japanese (ja)
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JPWO2023032721A1 (https=
JP7513215B2 (ja
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Priority claimed from PCT/JP2022/031468 external-priority patent/WO2023032721A1/ja
Publication of JPWO2023032721A1 publication Critical patent/JPWO2023032721A1/ja
Publication of JPWO2023032721A5 publication Critical patent/JPWO2023032721A5/ja
Application granted granted Critical
Publication of JP7513215B2 publication Critical patent/JP7513215B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023545456A 2021-08-30 2022-08-19 基板保持装置、及び導電膜付き基板の製造方法 Active JP7513215B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021139521 2021-08-30
JP2021139521 2021-08-30
PCT/JP2022/031468 WO2023032721A1 (ja) 2021-08-30 2022-08-19 基板保持装置、及び導電膜付き基板の製造方法

Publications (3)

Publication Number Publication Date
JPWO2023032721A1 JPWO2023032721A1 (https=) 2023-03-09
JPWO2023032721A5 true JPWO2023032721A5 (https=) 2023-12-04
JP7513215B2 JP7513215B2 (ja) 2024-07-09

Family

ID=85412512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023545456A Active JP7513215B2 (ja) 2021-08-30 2022-08-19 基板保持装置、及び導電膜付き基板の製造方法

Country Status (2)

Country Link
JP (1) JP7513215B2 (https=)
WO (1) WO2023032721A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08313856A (ja) * 1995-05-18 1996-11-29 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP4601932B2 (ja) * 2003-09-16 2010-12-22 大日本印刷株式会社 基板収納ケース
JP2006328518A (ja) * 2005-05-30 2006-12-07 Optrex Corp スパッタ成膜装置
JP4417397B2 (ja) * 2007-03-16 2010-02-17 シノン電気産業株式会社 半導体集積回路用トレー
JP2011214034A (ja) * 2010-03-31 2011-10-27 Seiko Epson Corp スパッタ装置
US20140272684A1 (en) * 2013-03-12 2014-09-18 Applied Materials, Inc. Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
JP2015175865A (ja) * 2014-03-13 2015-10-05 セイコーエプソン株式会社 光学部品、光学部品の製造方法、電子機器、および移動体
JP2016092025A (ja) * 2014-10-29 2016-05-23 東レエンジニアリング株式会社 基板保持装置および方法ならびに基板検査装置

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