JPWO2023013637A5 - - Google Patents

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Publication number
JPWO2023013637A5
JPWO2023013637A5 JP2023540362A JP2023540362A JPWO2023013637A5 JP WO2023013637 A5 JPWO2023013637 A5 JP WO2023013637A5 JP 2023540362 A JP2023540362 A JP 2023540362A JP 2023540362 A JP2023540362 A JP 2023540362A JP WO2023013637 A5 JPWO2023013637 A5 JP WO2023013637A5
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JP
Japan
Prior art keywords
temperature
wafer
cooler
operation amount
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023540362A
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English (en)
Japanese (ja)
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JPWO2023013637A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/029650 external-priority patent/WO2023013637A1/ja
Publication of JPWO2023013637A1 publication Critical patent/JPWO2023013637A1/ja
Publication of JPWO2023013637A5 publication Critical patent/JPWO2023013637A5/ja
Pending legal-status Critical Current

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JP2023540362A 2021-08-06 2022-08-02 Pending JPWO2023013637A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021130031 2021-08-06
PCT/JP2022/029650 WO2023013637A1 (ja) 2021-08-06 2022-08-02 ウエハ温度制御装置、ウエハ温度制御装置用制御方法、及び、ウエハ温度制御装置用プログラム

Publications (2)

Publication Number Publication Date
JPWO2023013637A1 JPWO2023013637A1 (https=) 2023-02-09
JPWO2023013637A5 true JPWO2023013637A5 (https=) 2025-03-06

Family

ID=85155628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023540362A Pending JPWO2023013637A1 (https=) 2021-08-06 2022-08-02

Country Status (6)

Country Link
US (1) US20250372417A1 (https=)
JP (1) JPWO2023013637A1 (https=)
KR (1) KR20240045237A (https=)
CN (1) CN117730292A (https=)
TW (1) TW202314429A (https=)
WO (1) WO2023013637A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117311184B (zh) * 2023-10-31 2025-01-07 深圳市华翌科技有限公司 一种基于物联网的智能家居调控系统
CN120937120A (zh) * 2024-03-11 2025-11-11 株式会社日立高新技术 等离子处理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001318720A (ja) * 2000-05-08 2001-11-16 Komatsu Ltd 温度制御方法及び装置
JP2004119630A (ja) * 2002-09-25 2004-04-15 Komatsu Ltd ウェハ温調装置
JP6047411B2 (ja) * 2012-09-28 2016-12-21 東京エレクトロン株式会社 温度測定機構及び温度測定方法
JP7266481B2 (ja) 2019-07-19 2023-04-28 東京エレクトロン株式会社 温度制御装置、温度制御方法、および検査装置

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