JPWO2023013468A5 - - Google Patents
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- JPWO2023013468A5 JPWO2023013468A5 JP2023540271A JP2023540271A JPWO2023013468A5 JP WO2023013468 A5 JPWO2023013468 A5 JP WO2023013468A5 JP 2023540271 A JP2023540271 A JP 2023540271A JP 2023540271 A JP2023540271 A JP 2023540271A JP WO2023013468 A5 JPWO2023013468 A5 JP WO2023013468A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing apparatus
- substrate processing
- laser irradiation
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024197369A JP2025013658A (ja) | 2021-08-06 | 2024-11-12 | 基板処理装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021130301 | 2021-08-06 | ||
| JP2021130301 | 2021-08-06 | ||
| PCT/JP2022/028734 WO2023013468A1 (ja) | 2021-08-06 | 2022-07-26 | 基板処理装置及び基板処理方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024197369A Division JP2025013658A (ja) | 2021-08-06 | 2024-11-12 | 基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023013468A1 JPWO2023013468A1 (https=) | 2023-02-09 |
| JPWO2023013468A5 true JPWO2023013468A5 (https=) | 2024-04-17 |
| JP7588725B2 JP7588725B2 (ja) | 2024-11-22 |
Family
ID=85154479
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023540271A Active JP7588725B2 (ja) | 2021-08-06 | 2022-07-26 | 基板処理装置及び基板処理方法 |
| JP2024197369A Pending JP2025013658A (ja) | 2021-08-06 | 2024-11-12 | 基板処理装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024197369A Pending JP2025013658A (ja) | 2021-08-06 | 2024-11-12 | 基板処理装置 |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP7588725B2 (https=) |
| KR (1) | KR20240038071A (https=) |
| CN (1) | CN117769473A (https=) |
| TW (1) | TW202326839A (https=) |
| WO (1) | WO2023013468A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102903522B1 (ko) * | 2020-04-02 | 2025-12-23 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법 및 기판 처리 장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3630972B2 (ja) * | 1998-03-11 | 2005-03-23 | 三菱電機株式会社 | レーザ加工装置 |
| JP2001321979A (ja) | 2000-05-12 | 2001-11-20 | Matsushita Electric Ind Co Ltd | レーザー穴加工機の加工粉集塵装置 |
| JP4993886B2 (ja) | 2005-09-07 | 2012-08-08 | 株式会社ディスコ | レーザー加工装置 |
| JP4682872B2 (ja) * | 2006-02-27 | 2011-05-11 | 株式会社デンソー | レーザ加工における飛散物の除去装置 |
| JP7304433B2 (ja) | 2019-12-26 | 2023-07-06 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
-
2022
- 2022-07-26 WO PCT/JP2022/028734 patent/WO2023013468A1/ja not_active Ceased
- 2022-07-26 CN CN202280053193.XA patent/CN117769473A/zh active Pending
- 2022-07-26 KR KR1020247006512A patent/KR20240038071A/ko active Pending
- 2022-07-26 JP JP2023540271A patent/JP7588725B2/ja active Active
- 2022-07-26 TW TW111127890A patent/TW202326839A/zh unknown
-
2024
- 2024-11-12 JP JP2024197369A patent/JP2025013658A/ja active Pending
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