JPWO2022239719A5 - - Google Patents
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- Publication number
- JPWO2022239719A5 JPWO2022239719A5 JP2023521006A JP2023521006A JPWO2022239719A5 JP WO2022239719 A5 JPWO2022239719 A5 JP WO2022239719A5 JP 2023521006 A JP2023521006 A JP 2023521006A JP 2023521006 A JP2023521006 A JP 2023521006A JP WO2022239719 A5 JPWO2022239719 A5 JP WO2022239719A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- type
- support substrate
- layer
- substrate according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 34
- 239000000758 substrate Substances 0.000 claims 31
- 239000004065 semiconductor Substances 0.000 claims 13
- 239000000470 constituent Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 238000003763 carbonization Methods 0.000 claims 1
- 229910052681 coesite Inorganic materials 0.000 claims 1
- 229910052906 cristobalite Inorganic materials 0.000 claims 1
- 238000003682 fluorination reaction Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052682 stishovite Inorganic materials 0.000 claims 1
- 229910052905 tridymite Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021079850 | 2021-05-10 | ||
| JP2021079850 | 2021-05-10 | ||
| PCT/JP2022/019621 WO2022239719A1 (ja) | 2021-05-10 | 2022-05-09 | 受動電子部品用の支持基板、受動電子部品、半導体装置、マッチング回路及びフィルタ回路 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022239719A1 JPWO2022239719A1 (https=) | 2022-11-17 |
| JPWO2022239719A5 true JPWO2022239719A5 (https=) | 2024-02-13 |
| JP7635834B2 JP7635834B2 (ja) | 2025-02-26 |
Family
ID=84029622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023521006A Active JP7635834B2 (ja) | 2021-05-10 | 2022-05-09 | 受動電子部品用の支持基板、受動電子部品、半導体装置、マッチング回路及びフィルタ回路 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240063224A1 (https=) |
| JP (1) | JP7635834B2 (https=) |
| CN (1) | CN117397030A (https=) |
| WO (1) | WO2022239719A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024252872A1 (ja) * | 2023-06-07 | 2024-12-12 | 株式会社村田製作所 | 半導体装置、マッチング回路及びフィルタ回路 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE513116C2 (sv) * | 1998-11-13 | 2000-07-10 | Ericsson Telefon Ab L M | Polykiselresistor och sätt att framställa sådan |
| US7936043B2 (en) * | 2006-03-17 | 2011-05-03 | Sychip Inc. | Integrated passive device substrates |
| JP7318279B2 (ja) * | 2019-04-03 | 2023-08-01 | 株式会社村田製作所 | キャパシタ |
| JP7439392B2 (ja) * | 2019-05-13 | 2024-02-28 | 株式会社村田製作所 | キャパシタ |
-
2022
- 2022-05-09 CN CN202280033513.5A patent/CN117397030A/zh active Pending
- 2022-05-09 WO PCT/JP2022/019621 patent/WO2022239719A1/ja not_active Ceased
- 2022-05-09 JP JP2023521006A patent/JP7635834B2/ja active Active
-
2023
- 2023-10-30 US US18/497,020 patent/US20240063224A1/en active Pending
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