JPWO2022239522A5 - - Google Patents
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- Publication number
- JPWO2022239522A5 JPWO2022239522A5 JP2023520898A JP2023520898A JPWO2022239522A5 JP WO2022239522 A5 JPWO2022239522 A5 JP WO2022239522A5 JP 2023520898 A JP2023520898 A JP 2023520898A JP 2023520898 A JP2023520898 A JP 2023520898A JP WO2022239522 A5 JPWO2022239522 A5 JP WO2022239522A5
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- light
- interference
- laser beam
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 50
- 238000007689 inspection Methods 0.000 claims 36
- 238000005259 measurement Methods 0.000 claims 34
- 230000007547 defect Effects 0.000 claims 18
- 238000003384 imaging method Methods 0.000 claims 8
- 230000005284 excitation Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021082490 | 2021-05-14 | ||
| JP2021082490 | 2021-05-14 | ||
| PCT/JP2022/014263 WO2022239522A1 (ja) | 2021-05-14 | 2022-03-25 | 欠陥検査装置および欠陥検査方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022239522A1 JPWO2022239522A1 (https=) | 2022-11-17 |
| JPWO2022239522A5 true JPWO2022239522A5 (https=) | 2023-11-28 |
| JP7480915B2 JP7480915B2 (ja) | 2024-05-10 |
Family
ID=84029550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023520898A Active JP7480915B2 (ja) | 2021-05-14 | 2022-03-25 | 欠陥検査装置および欠陥検査方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12596105B2 (https=) |
| JP (1) | JP7480915B2 (https=) |
| CN (1) | CN117280206A (https=) |
| WO (1) | WO2022239522A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7725037B1 (ja) * | 2025-02-05 | 2025-08-19 | 株式会社日本エー・エム・シー | 表面検査装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5760904A (en) | 1996-07-26 | 1998-06-02 | General Electric Company | Method and system for inspecting a surface of an object with laser ultrasound |
| KR100551570B1 (ko) | 1999-10-14 | 2006-02-13 | 주식회사 사무코 | 반도체 웨이퍼표면의 검사방법 |
| JP3955513B2 (ja) * | 2002-09-04 | 2007-08-08 | 株式会社日立製作所 | 欠陥検査装置及び欠陥検査方法 |
| JP5951332B2 (ja) | 2012-04-13 | 2016-07-13 | 株式会社東芝 | レーザ超音波検査装置及び方法 |
| JP6451695B2 (ja) * | 2016-06-02 | 2019-01-16 | 株式会社島津製作所 | 欠陥検査方法及び欠陥検査装置 |
| CN111316093A (zh) | 2018-12-14 | 2020-06-19 | 合刃科技（深圳）有限公司 | 结构缺陷检测系统及结构缺陷检测方法 |
| WO2020129209A1 (ja) * | 2018-12-20 | 2020-06-25 | 株式会社島津製作所 | 欠陥検査装置および欠陥検査方法 |
| JP7283324B2 (ja) | 2019-09-18 | 2023-05-30 | 株式会社島津製作所 | 欠陥検査装置 |
-
2022
- 2022-03-25 US US18/290,270 patent/US12596105B2/en active Active
- 2022-03-25 CN CN202280032443.1A patent/CN117280206A/zh active Pending
- 2022-03-25 WO PCT/JP2022/014263 patent/WO2022239522A1/ja not_active Ceased
- 2022-03-25 JP JP2023520898A patent/JP7480915B2/ja active Active
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