CN117280206A - 缺陷检查装置及缺陷检查方法 - Google Patents

缺陷检查装置及缺陷检查方法 Download PDF

Info

Publication number
CN117280206A
CN117280206A CN202280032443.1A CN202280032443A CN117280206A CN 117280206 A CN117280206 A CN 117280206A CN 202280032443 A CN202280032443 A CN 202280032443A CN 117280206 A CN117280206 A CN 117280206A
Authority
CN
China
Prior art keywords
interference
optical path
inspection object
laser light
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280032443.1A
Other languages
English (en)
Chinese (zh)
Inventor
堀川浩司
田窪健二
畠堀贵秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN117280206A publication Critical patent/CN117280206A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202280032443.1A 2021-05-14 2022-03-25 缺陷检查装置及缺陷检查方法 Pending CN117280206A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021082490 2021-05-14
JP2021-082490 2021-05-14
PCT/JP2022/014263 WO2022239522A1 (ja) 2021-05-14 2022-03-25 欠陥検査装置および欠陥検査方法

Publications (1)

Publication Number Publication Date
CN117280206A true CN117280206A (zh) 2023-12-22

Family

ID=84029550

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280032443.1A Pending CN117280206A (zh) 2021-05-14 2022-03-25 缺陷检查装置及缺陷检查方法

Country Status (4)

Country Link
US (1) US12596105B2 (https=)
JP (1) JP7480915B2 (https=)
CN (1) CN117280206A (https=)
WO (1) WO2022239522A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7725037B1 (ja) * 2025-02-05 2025-08-19 株式会社日本エー・エム・シー 表面検査装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5760904A (en) 1996-07-26 1998-06-02 General Electric Company Method and system for inspecting a surface of an object with laser ultrasound
KR100551570B1 (ko) 1999-10-14 2006-02-13 주식회사 사무코 반도체 웨이퍼표면의 검사방법
JP3955513B2 (ja) * 2002-09-04 2007-08-08 株式会社日立製作所 欠陥検査装置及び欠陥検査方法
JP5951332B2 (ja) 2012-04-13 2016-07-13 株式会社東芝 レーザ超音波検査装置及び方法
JP6451695B2 (ja) * 2016-06-02 2019-01-16 株式会社島津製作所 欠陥検査方法及び欠陥検査装置
CN111316093A (zh) 2018-12-14 2020-06-19 合刃科技（深圳）有限公司 结构缺陷检测系统及结构缺陷检测方法
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法
JP7283324B2 (ja) 2019-09-18 2023-05-30 株式会社島津製作所 欠陥検査装置

Also Published As

Publication number Publication date
WO2022239522A1 (ja) 2022-11-17
JPWO2022239522A1 (https=) 2022-11-17
JP7480915B2 (ja) 2024-05-10
US20240230601A1 (en) 2024-07-11
US12596105B2 (en) 2026-04-07

Similar Documents

Publication Publication Date Title
US10267618B2 (en) Defect detection method and defect detection apparatus
CN113646627B (zh) 缺陷检查装置和缺陷检查方法
JP2011191118A (ja) 光干渉測定装置
JP7803369B2 (ja) 欠陥検査装置
CN113167767B (zh) 缺陷检查装置和缺陷检查方法
JP2019179028A (ja) 光干渉測定装置
JP7667930B2 (ja) 走査範囲決定方法
JP2010528314A (ja) 立体形状測定装置
US11187648B2 (en) Two-stage photo-acoustic excitation sensing systems and methods
CN117280206A (zh) 缺陷检查装置及缺陷检查方法
CN114981652B (zh) 缺陷检查装置及缺陷检查方法
JP2007322162A (ja) ３次元形状測定装置及び３次元形状測定方法
JP6273109B2 (ja) 光干渉測定装置
JP6508763B2 (ja) 表面検査装置
JP2009098044A (ja) 形状測定装置
JP4275661B2 (ja) 変位測定装置
JP4255586B2 (ja) 試料検査装置
JP4258401B2 (ja) 凹凸面の表面欠陥検査装置
JP2015040742A (ja) 光学ユニット
JP4011205B2 (ja) 試料検査装置
KR101388239B1 (ko) 카메라와 가변파장 레이저를 이용한 다층막 두께 측정 검사장치
JP2021012042A (ja) 撮像システム
JP2009244052A (ja) 表面検査装置および表面検査方法
JP2010134036A (ja) 微分干渉型検査装置
KR101391837B1 (ko) 웨이퍼의 워프(Ｗａｒｐ) 인스펙션 장치

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination