JPWO2022190174A5 - - Google Patents
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- Publication number
- JPWO2022190174A5 JPWO2022190174A5 JP2023504891A JP2023504891A JPWO2022190174A5 JP WO2022190174 A5 JPWO2022190174 A5 JP WO2022190174A5 JP 2023504891 A JP2023504891 A JP 2023504891A JP 2023504891 A JP2023504891 A JP 2023504891A JP WO2022190174 A5 JPWO2022190174 A5 JP WO2022190174A5
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic transducers
- workpiece
- ultrasonic
- chuck
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/009036 WO2022190174A1 (ja) | 2021-03-08 | 2021-03-08 | 搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022190174A1 JPWO2022190174A1 (https=) | 2022-09-15 |
| JPWO2022190174A5 true JPWO2022190174A5 (https=) | 2023-04-19 |
| JP7366479B2 JP7366479B2 (ja) | 2023-10-23 |
Family
ID=83227503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023504891A Active JP7366479B2 (ja) | 2021-03-08 | 2021-03-08 | 搬送装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US12519003B2 (https=) |
| EP (1) | EP4306461A4 (https=) |
| JP (1) | JP7366479B2 (https=) |
| KR (1) | KR102633298B1 (https=) |
| CN (1) | CN115315796A (https=) |
| TW (1) | TWI832169B (https=) |
| WO (1) | WO2022190174A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112023005089T5 (de) * | 2022-12-06 | 2025-10-23 | Panasonic Intellectual Property Management Co., Ltd. | Aufnahmesystem und Aufnahmeverfahren |
| KR20250153244A (ko) * | 2023-03-17 | 2025-10-24 | 야마하 로보틱스 가부시키가이샤 | 칩 유지 도구, 칩 유지 장치, 및 반도체 장치의 제조 장치 |
| JP2025064294A (ja) * | 2023-10-05 | 2025-04-17 | ヤマハロボティクスホールディングス株式会社 | ハンドリング装置 |
| TW202520412A (zh) * | 2023-10-12 | 2025-05-16 | 日商松下知識產權經營股份有限公司 | 拾取系統、接合裝置、分類裝置及控制方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5890580A (en) * | 1993-07-12 | 1999-04-06 | Kaijo Corporation | Object levitating apparatus, object transporting apparatus, and object levitating bearing along with an object levitating process and object transporting process |
| US5979475A (en) * | 1994-04-28 | 1999-11-09 | Hitachi, Ltd. | Specimen holding method and fluid treatment method of specimen surface and systems therefor |
| DE10121742A1 (de) | 2001-05-04 | 2003-01-23 | Bosch Gmbh Robert | Vorrichtung zum berührungslosen Greifen und Halten eines Gegenstandes |
| JP4376737B2 (ja) * | 2004-08-31 | 2009-12-02 | 学校法人東京理科大学 | 非接触チャック |
| US20070141114A1 (en) | 2005-12-15 | 2007-06-21 | Essilor International Compagnie Generale D'optique | Article coated with an ultra high hydrophobic film and process for obtaining same |
| JP4877658B2 (ja) | 2007-02-14 | 2012-02-15 | 独立行政法人国立高等専門学校機構 | 非接触保持装置および非接触搬送装置 |
| JP5099435B2 (ja) * | 2008-03-05 | 2012-12-19 | 独立行政法人国立高等専門学校機構 | 非接触搬送装置 |
| JP5752119B2 (ja) * | 2009-07-22 | 2015-07-22 | ツィンマーマン ウント シルプ ハンドハーブングステヒニーク ゲゼルシャフト ミット ベシュレンクテル ハフツングＺｉｍｍｅｒｍａｎｎ ＆ Ｓｃｈｉｌｐ Ｈａｎｄｈａｂｕｎｇｓｔｅｃｈｎｉｋ ＧｍｂＨ | 真空グリッパー |
| JP5402542B2 (ja) * | 2009-11-06 | 2014-01-29 | 村田機械株式会社 | 非接触保持装置及び移載装置 |
| US9360772B2 (en) * | 2011-12-29 | 2016-06-07 | Nikon Corporation | Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method |
| JP5830440B2 (ja) | 2012-06-20 | 2015-12-09 | 東京エレクトロン株式会社 | 剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体 |
| JP5553254B2 (ja) * | 2013-08-20 | 2014-07-16 | 村田機械株式会社 | 非接触保持装置及び移載装置 |
| KR101600382B1 (ko) | 2014-05-12 | 2016-03-08 | 제트에스-핸들링 게엠베하 | 비접촉식 기판 그립핑 장치 |
| TWI747225B (zh) * | 2019-04-15 | 2021-11-21 | 日商新川股份有限公司 | 搬送裝置 |
| KR102284457B1 (ko) * | 2019-08-27 | 2021-07-30 | 세메스 주식회사 | 다이 픽업 모듈 및 이를 포함하는 다이 본딩 장치 |
| KR102365660B1 (ko) * | 2019-08-27 | 2022-02-18 | 세메스 주식회사 | 다이 픽업 모듈 및 이를 포함하는 다이 본딩 장치 |
-
2021
- 2021-03-08 WO PCT/JP2021/009036 patent/WO2022190174A1/ja not_active Ceased
- 2021-03-08 JP JP2023504891A patent/JP7366479B2/ja active Active
- 2021-03-08 US US17/640,827 patent/US12519003B2/en active Active
- 2021-03-08 CN CN202180005176.4A patent/CN115315796A/zh active Pending
- 2021-03-08 EP EP21930033.2A patent/EP4306461A4/en not_active Withdrawn
- 2021-03-08 KR KR1020227001893A patent/KR102633298B1/ko active Active
-
2022
- 2022-03-03 TW TW111107800A patent/TWI832169B/zh active
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