JPWO2022137380A1 - - Google Patents

Info

Publication number
JPWO2022137380A1
JPWO2022137380A1 JP2021520236A JP2021520236A JPWO2022137380A1 JP WO2022137380 A1 JPWO2022137380 A1 JP WO2022137380A1 JP 2021520236 A JP2021520236 A JP 2021520236A JP 2021520236 A JP2021520236 A JP 2021520236A JP WO2022137380 A1 JPWO2022137380 A1 JP WO2022137380A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021520236A
Other versions
JP6911220B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP6911220B1 publication Critical patent/JP6911220B1/ja
Publication of JPWO2022137380A1 publication Critical patent/JPWO2022137380A1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/002—Cell separation, e.g. membranes, diaphragms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
JP2021520236A 2020-12-23 2020-12-23 めっき装置、およびめっき処理方法 Active JP6911220B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/048113 WO2022137380A1 (ja) 2020-12-23 2020-12-23 めっき装置、およびめっき処理方法

Publications (2)

Publication Number Publication Date
JP6911220B1 JP6911220B1 (ja) 2021-07-28
JPWO2022137380A1 true JPWO2022137380A1 (ja) 2022-06-30

Family

ID=76967986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021520236A Active JP6911220B1 (ja) 2020-12-23 2020-12-23 めっき装置、およびめっき処理方法

Country Status (5)

Country Link
US (1) US20220396895A1 (ja)
JP (1) JP6911220B1 (ja)
KR (1) KR102404458B1 (ja)
CN (1) CN114981484B (ja)
WO (1) WO2022137380A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102456153B1 (ko) * 2022-07-22 2022-10-19 주식회사 에이치테크놀로지 도금 장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5982132A (en) * 1997-10-09 1999-11-09 Electroglas, Inc. Rotary wafer positioning system and method
KR100804714B1 (ko) * 2000-03-17 2008-02-18 가부시키가이샤 에바라 세이사꾸쇼 도금장치 및 방법
JP4664320B2 (ja) * 2000-03-17 2011-04-06 株式会社荏原製作所 めっき方法
JP2001316890A (ja) * 2000-05-08 2001-11-16 Tokyo Electron Ltd メッキ処理方法及びメッキ処理装置
JP2002212784A (ja) * 2001-01-12 2002-07-31 Tokyo Electron Ltd 電解メッキ装置及び電解メッキ方法
JP2003221700A (ja) * 2002-01-31 2003-08-08 Toppan Printing Co Ltd 電気めっき装置及びめっき膜の形成方法
US20050040049A1 (en) * 2002-09-20 2005-02-24 Rimma Volodarsky Anode assembly for plating and planarizing a conductive layer
JP4423359B2 (ja) * 2004-01-30 2010-03-03 株式会社荏原製作所 めっき方法
JP2007046092A (ja) * 2005-08-09 2007-02-22 Hyomen Shori System:Kk シート状ワークの銅めっき装置および方法
JP2008019496A (ja) * 2006-07-14 2008-01-31 Matsushita Electric Ind Co Ltd 電解めっき装置および電解めっき方法
KR20100063248A (ko) * 2008-12-03 2010-06-11 주식회사 케이씨텍 기판도금장치 및 그 방법
KR101242348B1 (ko) * 2010-11-30 2013-03-14 주식회사 케이씨텍 기판 도금 장치
JP2014051697A (ja) 2012-09-05 2014-03-20 Mitomo Semicon Engineering Kk カップ式めっき装置及びこれを用いるめっき方法
US20140262028A1 (en) * 2013-03-13 2014-09-18 Intermolecular, Inc. Non-Contact Wet-Process Cell Confining Liquid to a Region of a Solid Surface by Differential Pressure
WO2016082093A1 (en) * 2014-11-25 2016-06-02 Acm Research (Shanghai) Inc. Apparatus and method for uniform metallization on substrate
JP6847691B2 (ja) * 2017-02-08 2021-03-24 株式会社荏原製作所 めっき装置およびめっき装置とともに使用される基板ホルダ
KR102158908B1 (ko) * 2018-07-18 2020-09-22 오성종 반도체 웨이퍼의 도금장치

Also Published As

Publication number Publication date
WO2022137380A1 (ja) 2022-06-30
CN114981484A (zh) 2022-08-30
CN114981484B (zh) 2023-06-13
KR102404458B1 (ko) 2022-06-07
JP6911220B1 (ja) 2021-07-28
US20220396895A1 (en) 2022-12-15

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