JPWO2022046448A5 - - Google Patents
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- Publication number
- JPWO2022046448A5 JPWO2022046448A5 JP2021560930A JP2021560930A JPWO2022046448A5 JP WO2022046448 A5 JPWO2022046448 A5 JP WO2022046448A5 JP 2021560930 A JP2021560930 A JP 2021560930A JP 2021560930 A JP2021560930 A JP 2021560930A JP WO2022046448 A5 JPWO2022046448 A5 JP WO2022046448A5
- Authority
- JP
- Japan
- Prior art keywords
- processing method
- nanocrystalline diamond
- depositing
- diamond layer
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 19
- 239000010432 diamond Substances 0.000 claims description 19
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 12
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 239000001569 carbon dioxide Substances 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 17
- 238000003672 processing method Methods 0.000 claims 14
- 230000008021 deposition Effects 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 230000003213 activating effect Effects 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023161812A JP2024012282A (ja) | 2020-08-31 | 2023-09-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
| JP2025086973A JP2025138631A (ja) | 2020-08-31 | 2025-05-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/007,441 US11594416B2 (en) | 2020-08-31 | 2020-08-31 | Tribological properties of diamond films |
| US17/007,441 | 2020-08-31 | ||
| PCT/US2021/046095 WO2022046448A1 (en) | 2020-08-31 | 2021-08-16 | Improving tribological properties of diamond films |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023161812A Division JP2024012282A (ja) | 2020-08-31 | 2023-09-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022549044A JP2022549044A (ja) | 2022-11-24 |
| JP2022549044A5 JP2022549044A5 (https=) | 2023-04-14 |
| JPWO2022046448A5 true JPWO2022046448A5 (https=) | 2023-04-14 |
| JP7417627B2 JP7417627B2 (ja) | 2024-01-18 |
Family
ID=80353808
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021560930A Active JP7417627B2 (ja) | 2020-08-31 | 2021-08-16 | ダイヤモンドフィルムのトライボロジー特性の改善 |
| JP2023161812A Pending JP2024012282A (ja) | 2020-08-31 | 2023-09-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
| JP2025086973A Pending JP2025138631A (ja) | 2020-08-31 | 2025-05-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023161812A Pending JP2024012282A (ja) | 2020-08-31 | 2023-09-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
| JP2025086973A Pending JP2025138631A (ja) | 2020-08-31 | 2025-05-26 | ダイヤモンドフィルムのトライボロジー特性の改善 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US11594416B2 (https=) |
| JP (3) | JP7417627B2 (https=) |
| CN (1) | CN114503241B (https=) |
| WO (1) | WO2022046448A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11594416B2 (en) * | 2020-08-31 | 2023-02-28 | Applied Materials, Inc. | Tribological properties of diamond films |
| US12148617B2 (en) * | 2021-11-01 | 2024-11-19 | International Business Machines Corporation | Structure and method to pattern pitch lines |
| US12442104B2 (en) | 2023-04-20 | 2025-10-14 | Applied Materials, Inc. | Nanocrystalline diamond with amorphous interfacial layer |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2554100B2 (ja) * | 1987-09-10 | 1996-11-13 | 三菱重工業株式会社 | ダイヤモンド皮膜の研磨方法 |
| JP4018856B2 (ja) * | 1999-11-22 | 2007-12-05 | 京セラ株式会社 | 真空チャンバー構成部材 |
| US7079740B2 (en) | 2004-03-12 | 2006-07-18 | Applied Materials, Inc. | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides |
| DE102004025669A1 (de) * | 2004-05-21 | 2005-12-15 | Diaccon Gmbh | Funktionelle CVD-Diamantschichten auf großflächigen Substraten |
| JP5341774B2 (ja) * | 2007-01-22 | 2013-11-13 | エレメント シックス リミテッド | ダイヤモンド表面のプラズマエッチング |
| US20090017258A1 (en) | 2007-07-10 | 2009-01-15 | Carlisle John A | Diamond film deposition |
| US8007910B2 (en) | 2007-07-19 | 2011-08-30 | City University Of Hong Kong | Ultrahard multilayer coating comprising nanocrystalline diamond and nanocrystalline cubic boron nitride |
| CN100575545C (zh) * | 2008-05-19 | 2009-12-30 | 牡丹江师范学院 | 低成本生长高品质纳米金刚石膜的方法 |
| US8460464B2 (en) * | 2009-03-31 | 2013-06-11 | Rajneesh Bhandari | Method for producing single crystalline diamonds |
| US9449982B2 (en) * | 2013-03-12 | 2016-09-20 | Sandisk Technologies Llc | Method of making a vertical NAND device using a sacrificial layer with air gap and sequential etching of multilayer stacks |
| EP2832899A1 (fr) | 2013-08-02 | 2015-02-04 | The Swatch Group Research and Development Ltd. | Revêtement de diamant et procédé de dépôt d'un tel revêtement |
| US9382625B2 (en) * | 2014-05-01 | 2016-07-05 | Applied Materials, Inc. | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition |
| US9695503B2 (en) | 2014-08-22 | 2017-07-04 | Applied Materials, Inc. | High power impulse magnetron sputtering process to achieve a high density high SP3 containing layer |
| TWI656575B (zh) * | 2014-09-03 | 2019-04-11 | 美商應用材料股份有限公司 | 用於三維nand硬遮罩應用的奈米結晶鑽石碳膜 |
| US10662523B2 (en) * | 2015-05-27 | 2020-05-26 | John Crane Inc. | Extreme durability composite diamond film |
| US10584412B2 (en) | 2016-03-08 | 2020-03-10 | Ii-Vi Delaware, Inc. | Substrate comprising a layer of silicon and a layer of diamond having an optically finished (or a dense) silicon-diamond interface |
| US10254445B2 (en) | 2016-03-16 | 2019-04-09 | Adam Khan | Diamond coated antireflective window system and method |
| KR101865476B1 (ko) * | 2016-10-28 | 2018-06-07 | 고려대학교 산학협력단 | 나노 다이아몬드를 계면 층으로 적용한 다이아몬드상 탄소막의 제조방법 및 이에 의해 제조된 다이아몬드상 탄소막 |
| CN108060407B (zh) * | 2017-11-09 | 2021-08-06 | 上海交通大学 | 一种微纳多层复合金刚石薄膜的制备方法 |
| US11594416B2 (en) * | 2020-08-31 | 2023-02-28 | Applied Materials, Inc. | Tribological properties of diamond films |
-
2020
- 2020-08-31 US US17/007,441 patent/US11594416B2/en active Active
-
2021
- 2021-08-16 CN CN202180002988.3A patent/CN114503241B/zh active Active
- 2021-08-16 WO PCT/US2021/046095 patent/WO2022046448A1/en not_active Ceased
- 2021-08-16 JP JP2021560930A patent/JP7417627B2/ja active Active
-
2023
- 2023-01-25 US US18/101,317 patent/US11894230B2/en active Active
- 2023-09-26 JP JP2023161812A patent/JP2024012282A/ja active Pending
-
2025
- 2025-05-26 JP JP2025086973A patent/JP2025138631A/ja active Pending
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