JPWO2022044632A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2022044632A5
JPWO2022044632A5 JP2022545545A JP2022545545A JPWO2022044632A5 JP WO2022044632 A5 JPWO2022044632 A5 JP WO2022044632A5 JP 2022545545 A JP2022545545 A JP 2022545545A JP 2022545545 A JP2022545545 A JP 2022545545A JP WO2022044632 A5 JPWO2022044632 A5 JP WO2022044632A5
Authority
JP
Japan
Prior art keywords
electrode
capacitance
casing member
electrically insulating
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022545545A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022044632A1 (https=
JP7388568B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2021/027282 external-priority patent/WO2022044632A1/ja
Publication of JPWO2022044632A1 publication Critical patent/JPWO2022044632A1/ja
Publication of JPWO2022044632A5 publication Critical patent/JPWO2022044632A5/ja
Application granted granted Critical
Publication of JP7388568B2 publication Critical patent/JP7388568B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022545545A 2020-08-28 2021-07-21 センサ装置 Active JP7388568B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020144621 2020-08-28
JP2020144621 2020-08-28
PCT/JP2021/027282 WO2022044632A1 (ja) 2020-08-28 2021-07-21 センサ装置

Publications (3)

Publication Number Publication Date
JPWO2022044632A1 JPWO2022044632A1 (https=) 2022-03-03
JPWO2022044632A5 true JPWO2022044632A5 (https=) 2023-04-26
JP7388568B2 JP7388568B2 (ja) 2023-11-29

Family

ID=80353232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022545545A Active JP7388568B2 (ja) 2020-08-28 2021-07-21 センサ装置

Country Status (4)

Country Link
US (1) US20230194375A1 (https=)
JP (1) JP7388568B2 (https=)
CN (1) CN115989398B (https=)
WO (1) WO2022044632A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240085258A1 (en) * 2022-09-09 2024-03-14 Apple Inc. Active aggressor detection in pressure sensor port
CN119414475B (zh) * 2025-01-07 2025-10-03 江苏帝奥微电子股份有限公司 一种Type-C接口异物检测装置及其检测方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0712669A (ja) * 1993-06-29 1995-01-17 Nec Yamaguchi Ltd 真空スイッチ
JP2001141592A (ja) 1999-11-16 2001-05-25 Nec Yamaguchi Ltd ダイヤフラム式圧力計及びその誤差測定方法
JP2005227225A (ja) * 2004-02-16 2005-08-25 Honda Motor Co Ltd 静電容量型センサ及び挟み込み防止装置
JP4678752B2 (ja) * 2004-05-27 2011-04-27 東京エレクトロン株式会社 圧力計の製造方法及びガス処理装置の製造方法
JP2006078422A (ja) * 2004-09-13 2006-03-23 Mitsuba Corp 近接センサ及びそれを用いた挟み込み検出装置
JP2010249531A (ja) * 2009-04-10 2010-11-04 Fujikura Ltd 雨滴検知装置およびワイパー動作制御装置
JP4888743B2 (ja) * 2009-07-09 2012-02-29 アイシン精機株式会社 静電容量検出装置
JP2012145407A (ja) * 2011-01-11 2012-08-02 Hitachi Cable Ltd 感圧センサ
CN103529092B (zh) * 2012-07-05 2016-05-25 北斗电子工业株式会社 静电电容式水分检测装置
FI126999B (en) * 2014-01-17 2017-09-15 Murata Manufacturing Co Improved pressure sensor
JP2015165222A (ja) * 2014-03-03 2015-09-17 株式会社デンソー 圧力センサ
CN106574828A (zh) * 2014-08-22 2017-04-19 株式会社村田制作所 压电传感器以及检测装置
DE202016008703U1 (de) * 2016-12-24 2019-02-27 Wlka Alexander Wiegand Se & Co. Kg Druckmittleraufbau mit evakuierter Doppelmembran und Vakuumüberwachung und kombiniertem Alarmsignal
US10976278B2 (en) * 2017-08-31 2021-04-13 Apple Inc. Modifying functionality of an electronic device during a moisture exposure event
JP6824430B2 (ja) * 2017-10-04 2021-02-03 アルプスアルパイン株式会社 静電センサ及びドアハンドル
US10739221B2 (en) * 2018-06-15 2020-08-11 Apple Inc. Water detecting pressure sensors
US11422104B2 (en) * 2019-09-06 2022-08-23 Apple Inc. Exposed wire-bonding for sensing liquid and water in electronic devices
CN210839520U (zh) * 2019-11-06 2020-06-23 苏州宝时得电动工具有限公司 电动工具

Similar Documents

Publication Publication Date Title
KR101905241B1 (ko) 동적 압력 센서
KR101807146B1 (ko) 고감도 마이크로폰 및 그 제조 방법
CN108419189B (zh) 压电传感器
KR101736633B1 (ko) 절연된 전도판을 포함하는 용량성 마이크로폰
GB2554470A (en) MEMS device and process
US10425743B2 (en) Capacitive transducer and acoustic sensor
CN110987159B (zh) 声压传感器
CN105722002B (zh) 扩音器及制造扩音器的方法
US10469957B2 (en) Capacitive transducer and acoustic sensor
JPWO2022044632A5 (https=)
US20130070942A1 (en) Acoustic transducer, and microphone using the acoustic transducer
TW201808783A (zh) Mems裝置與製程
GB2467848A (en) MEMS transducer
CN115900924B (zh) 一种水听器离散梁膜融合声敏感芯片的过载或干扰信号释放及离散电容的增敏设计方法
CN108037183B (zh) 一种基于电容式电桥结构的超声阵列气体传感器
CN115989398B (zh) 传感器装置
CN113923572B (zh) 微机电系统装置和麦克风
JP7499020B2 (ja) Mems素子
CN111263282B (zh) 电容式传声器及其制作方法
KR20090029362A (ko) 커패시터형 실리콘 멤스 마이크로폰
JP4737535B2 (ja) コンデンサマイクロホン
JP2009098022A (ja) 半導体装置
KR20240071167A (ko) 음향 감응용 박막 및 이를 포함하는 마이크로폰
CN107963608A (zh) 一种采用mems电容阵列的电压比较法放大电路及其制作方法
JP4737720B2 (ja) ダイヤフラム及びその製造方法並びにそのダイヤフラムを有するコンデンサマイクロホン及びその製造方法