JP7388568B2 - センサ装置 - Google Patents

センサ装置 Download PDF

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Publication number
JP7388568B2
JP7388568B2 JP2022545545A JP2022545545A JP7388568B2 JP 7388568 B2 JP7388568 B2 JP 7388568B2 JP 2022545545 A JP2022545545 A JP 2022545545A JP 2022545545 A JP2022545545 A JP 2022545545A JP 7388568 B2 JP7388568 B2 JP 7388568B2
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Japan
Prior art keywords
circuit
electrode
capacitance
sensor device
signal
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JP2022545545A
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English (en)
Japanese (ja)
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JPWO2022044632A1 (https=
JPWO2022044632A5 (https=
Inventor
英明 杉林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022044632A1 publication Critical patent/JPWO2022044632A1/ja
Publication of JPWO2022044632A5 publication Critical patent/JPWO2022044632A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/08—Means for indicating or recording, e.g. for remote indication
    • G01L19/12—Alarms or signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Measuring Fluid Pressure (AREA)
JP2022545545A 2020-08-28 2021-07-21 センサ装置 Active JP7388568B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020144621 2020-08-28
JP2020144621 2020-08-28
PCT/JP2021/027282 WO2022044632A1 (ja) 2020-08-28 2021-07-21 センサ装置

Publications (3)

Publication Number Publication Date
JPWO2022044632A1 JPWO2022044632A1 (https=) 2022-03-03
JPWO2022044632A5 JPWO2022044632A5 (https=) 2023-04-26
JP7388568B2 true JP7388568B2 (ja) 2023-11-29

Family

ID=80353232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022545545A Active JP7388568B2 (ja) 2020-08-28 2021-07-21 センサ装置

Country Status (4)

Country Link
US (1) US20230194375A1 (https=)
JP (1) JP7388568B2 (https=)
CN (1) CN115989398B (https=)
WO (1) WO2022044632A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240085258A1 (en) * 2022-09-09 2024-03-14 Apple Inc. Active aggressor detection in pressure sensor port
CN119414475B (zh) * 2025-01-07 2025-10-03 江苏帝奥微电子股份有限公司 一种Type-C接口异物检测装置及其检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001141592A (ja) 1999-11-16 2001-05-25 Nec Yamaguchi Ltd ダイヤフラム式圧力計及びその誤差測定方法
JP2005337924A (ja) 2004-05-27 2005-12-08 Tokyo Electron Ltd 圧力計の製造方法、ガス処理装置の製造方法、圧力計、及び、ガス処理装置
JP2015165222A (ja) 2014-03-03 2015-09-17 株式会社デンソー 圧力センサ
US20180180505A1 (en) 2016-12-24 2018-06-28 Wika Alexander Wiegand Se & Co. Kg Diaphragm seal assembly with evacuated double diaphragm and vacuum monitoring

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0712669A (ja) * 1993-06-29 1995-01-17 Nec Yamaguchi Ltd 真空スイッチ
JP2005227225A (ja) * 2004-02-16 2005-08-25 Honda Motor Co Ltd 静電容量型センサ及び挟み込み防止装置
JP2006078422A (ja) * 2004-09-13 2006-03-23 Mitsuba Corp 近接センサ及びそれを用いた挟み込み検出装置
JP2010249531A (ja) * 2009-04-10 2010-11-04 Fujikura Ltd 雨滴検知装置およびワイパー動作制御装置
JP4888743B2 (ja) * 2009-07-09 2012-02-29 アイシン精機株式会社 静電容量検出装置
JP2012145407A (ja) * 2011-01-11 2012-08-02 Hitachi Cable Ltd 感圧センサ
CN103529092B (zh) * 2012-07-05 2016-05-25 北斗电子工业株式会社 静电电容式水分检测装置
FI126999B (en) * 2014-01-17 2017-09-15 Murata Manufacturing Co Improved pressure sensor
CN106574828A (zh) * 2014-08-22 2017-04-19 株式会社村田制作所 压电传感器以及检测装置
US10976278B2 (en) * 2017-08-31 2021-04-13 Apple Inc. Modifying functionality of an electronic device during a moisture exposure event
JP6824430B2 (ja) * 2017-10-04 2021-02-03 アルプスアルパイン株式会社 静電センサ及びドアハンドル
US10739221B2 (en) * 2018-06-15 2020-08-11 Apple Inc. Water detecting pressure sensors
US11422104B2 (en) * 2019-09-06 2022-08-23 Apple Inc. Exposed wire-bonding for sensing liquid and water in electronic devices
CN210839520U (zh) * 2019-11-06 2020-06-23 苏州宝时得电动工具有限公司 电动工具

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001141592A (ja) 1999-11-16 2001-05-25 Nec Yamaguchi Ltd ダイヤフラム式圧力計及びその誤差測定方法
JP2005337924A (ja) 2004-05-27 2005-12-08 Tokyo Electron Ltd 圧力計の製造方法、ガス処理装置の製造方法、圧力計、及び、ガス処理装置
JP2015165222A (ja) 2014-03-03 2015-09-17 株式会社デンソー 圧力センサ
US20180180505A1 (en) 2016-12-24 2018-06-28 Wika Alexander Wiegand Se & Co. Kg Diaphragm seal assembly with evacuated double diaphragm and vacuum monitoring

Also Published As

Publication number Publication date
JPWO2022044632A1 (https=) 2022-03-03
CN115989398A (zh) 2023-04-18
US20230194375A1 (en) 2023-06-22
CN115989398B (zh) 2025-05-09
WO2022044632A1 (ja) 2022-03-03

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