JPWO2021235439A5 - - Google Patents
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- Publication number
- JPWO2021235439A5 JPWO2021235439A5 JP2022524490A JP2022524490A JPWO2021235439A5 JP WO2021235439 A5 JPWO2021235439 A5 JP WO2021235439A5 JP 2022524490 A JP2022524490 A JP 2022524490A JP 2022524490 A JP2022524490 A JP 2022524490A JP WO2021235439 A5 JPWO2021235439 A5 JP WO2021235439A5
- Authority
- JP
- Japan
- Prior art keywords
- pattern forming
- forming apparatus
- light
- light source
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 16
- 238000005286 illumination Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 9
- 210000001747 pupil Anatomy 0.000 claims description 7
- 239000013307 optical fiber Substances 0.000 claims 5
- 238000003384 imaging method Methods 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 1
- 230000002194 synthesizing effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023191770A JP7563555B2 (ja) | 2020-05-19 | 2023-11-09 | パターン形成装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020087094 | 2020-05-19 | ||
| JP2020087094 | 2020-05-19 | ||
| PCT/JP2021/018802 WO2021235439A1 (ja) | 2020-05-19 | 2021-05-18 | パターン形成装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023191770A Division JP7563555B2 (ja) | 2020-05-19 | 2023-11-09 | パターン形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021235439A1 JPWO2021235439A1 (https=) | 2021-11-25 |
| JPWO2021235439A5 true JPWO2021235439A5 (https=) | 2022-11-15 |
| JP7384283B2 JP7384283B2 (ja) | 2023-11-21 |
Family
ID=78708549
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022524490A Active JP7384283B2 (ja) | 2020-05-19 | 2021-05-18 | パターン形成装置 |
| JP2023191770A Active JP7563555B2 (ja) | 2020-05-19 | 2023-11-09 | パターン形成装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023191770A Active JP7563555B2 (ja) | 2020-05-19 | 2023-11-09 | パターン形成装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JP7384283B2 (https=) |
| KR (1) | KR102883047B1 (https=) |
| CN (1) | CN115668066A (https=) |
| WO (1) | WO2021235439A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755964B (zh) * | 2022-11-15 | 2025-05-13 | 电子科技大学 | 基于反向学习蛇算法的无人机任务分配方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04348018A (ja) * | 1991-01-14 | 1992-12-03 | Topcon Corp | 位置合わせ光学装置 |
| JPH0677116A (ja) * | 1992-08-27 | 1994-03-18 | Nikon Corp | 位置検出装置 |
| JPH06267822A (ja) * | 1993-03-17 | 1994-09-22 | Toshiba Corp | 微細パタン形成方法 |
| JPH07161611A (ja) * | 1993-12-07 | 1995-06-23 | Nikon Corp | 位置検出装置 |
| JP4027080B2 (ja) * | 2001-11-02 | 2007-12-26 | キヤノン株式会社 | 位置検出装置およびそれを用いた露光装置 |
| JP2004356193A (ja) * | 2003-05-27 | 2004-12-16 | Canon Inc | 露光装置及び露光方法 |
| JP4314082B2 (ja) * | 2003-08-19 | 2009-08-12 | キヤノン株式会社 | アライメント方法 |
| JP4491311B2 (ja) | 2004-09-30 | 2010-06-30 | 富士フイルム株式会社 | 画像記録装置及び画像記録方法 |
| JP2015125424A (ja) * | 2013-12-27 | 2015-07-06 | キヤノン株式会社 | 光学装置、リソグラフィ装置、及び物品の製造方法 |
| JP2015152649A (ja) * | 2014-02-12 | 2015-08-24 | 株式会社ニコン | 位相差顕微鏡 |
| CN110083018A (zh) * | 2014-04-01 | 2019-08-02 | 株式会社尼康 | 基板处理装置的调整方法 |
| JP6494259B2 (ja) * | 2014-11-21 | 2019-04-03 | キヤノン株式会社 | 照明光学装置、およびデバイス製造方法 |
-
2021
- 2021-05-18 JP JP2022524490A patent/JP7384283B2/ja active Active
- 2021-05-18 KR KR1020227040776A patent/KR102883047B1/ko active Active
- 2021-05-18 CN CN202180036026.XA patent/CN115668066A/zh active Pending
- 2021-05-18 WO PCT/JP2021/018802 patent/WO2021235439A1/ja not_active Ceased
-
2023
- 2023-11-09 JP JP2023191770A patent/JP7563555B2/ja active Active
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