JPWO2021199681A1 - - Google Patents
Info
- Publication number
- JPWO2021199681A1 JPWO2021199681A1 JP2022511608A JP2022511608A JPWO2021199681A1 JP WO2021199681 A1 JPWO2021199681 A1 JP WO2021199681A1 JP 2022511608 A JP2022511608 A JP 2022511608A JP 2022511608 A JP2022511608 A JP 2022511608A JP WO2021199681 A1 JPWO2021199681 A1 JP WO2021199681A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/807—Pixel isolation structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/811—Interconnections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/812—Arrangements for transferring the charges in the image sensor perpendicular to the imaging plane, e.g. buried regions used to transfer generated charges to circuitry under the photosensitive region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/199—Back-illuminated image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/809—Constructional details of image sensors of hybrid image sensors
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020065335 | 2020-03-31 | ||
| PCT/JP2021/004523 WO2021199681A1 (ja) | 2020-03-31 | 2021-02-08 | 受光素子および電子機器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2021199681A1 true JPWO2021199681A1 (https=) | 2021-10-07 |
Family
ID=77928496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022511608A Ceased JPWO2021199681A1 (https=) | 2020-03-31 | 2021-02-08 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20230178576A1 (https=) |
| EP (1) | EP4131430A4 (https=) |
| JP (1) | JPWO2021199681A1 (https=) |
| CN (1) | CN115191034A (https=) |
| WO (1) | WO2021199681A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12218165B2 (en) * | 2021-06-18 | 2025-02-04 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor image sensor and method of manufacturing the same |
| US12563852B2 (en) * | 2022-01-20 | 2026-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Uniform trenches in semiconductor devices and manufacturing method thereof |
| CN114500868B (zh) * | 2022-04-18 | 2022-07-12 | 深圳锐视智芯科技有限公司 | 一种evs像素工作方法及相关装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006190891A (ja) * | 2005-01-07 | 2006-07-20 | Sony Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| WO2018150902A1 (ja) * | 2017-02-17 | 2018-08-23 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および電子機器 |
| JP2018201005A (ja) * | 2016-10-18 | 2018-12-20 | ソニーセミコンダクタソリューションズ株式会社 | 光検出器 |
| WO2019138923A1 (ja) * | 2018-01-11 | 2019-07-18 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、電子機器 |
| WO2019146527A1 (ja) * | 2018-01-23 | 2019-08-01 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子、撮像装置、および、固体撮像素子の制御方法 |
| WO2019155782A1 (ja) * | 2018-02-09 | 2019-08-15 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置および半導体装置の製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004319784A (ja) * | 2003-04-16 | 2004-11-11 | Sanyo Electric Co Ltd | 固体撮像素子及びその製造方法 |
| KR101232282B1 (ko) * | 2011-04-27 | 2013-02-12 | 에스케이하이닉스 주식회사 | 이미지 센서 및 그 제조방법 |
| US9484376B2 (en) * | 2014-05-30 | 2016-11-01 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor isolation structure and manufacturing method thereof |
| CN107949913B (zh) * | 2015-09-09 | 2019-04-19 | 松下知识产权经营株式会社 | 固体摄像元件 |
| US10418407B2 (en) * | 2015-11-06 | 2019-09-17 | Artilux, Inc. | High-speed light sensing apparatus III |
| KR102430496B1 (ko) * | 2017-09-29 | 2022-08-08 | 삼성전자주식회사 | 이미지 센싱 장치 및 그 제조 방법 |
| JP7250427B2 (ja) * | 2018-02-09 | 2023-04-03 | キヤノン株式会社 | 光電変換装置、撮像システム、および移動体 |
| KR102553314B1 (ko) * | 2018-08-29 | 2023-07-10 | 삼성전자주식회사 | 이미지 센서 |
| KR102646903B1 (ko) * | 2018-09-04 | 2024-03-12 | 삼성전자주식회사 | 이미지 센서 |
-
2021
- 2021-02-08 EP EP21781024.1A patent/EP4131430A4/en not_active Withdrawn
- 2021-02-08 WO PCT/JP2021/004523 patent/WO2021199681A1/ja not_active Ceased
- 2021-02-08 CN CN202180016543.0A patent/CN115191034A/zh not_active Withdrawn
- 2021-02-08 US US17/910,920 patent/US20230178576A1/en active Pending
- 2021-02-08 JP JP2022511608A patent/JPWO2021199681A1/ja not_active Ceased
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006190891A (ja) * | 2005-01-07 | 2006-07-20 | Sony Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| JP2018201005A (ja) * | 2016-10-18 | 2018-12-20 | ソニーセミコンダクタソリューションズ株式会社 | 光検出器 |
| WO2018150902A1 (ja) * | 2017-02-17 | 2018-08-23 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および電子機器 |
| WO2019138923A1 (ja) * | 2018-01-11 | 2019-07-18 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、電子機器 |
| WO2019146527A1 (ja) * | 2018-01-23 | 2019-08-01 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子、撮像装置、および、固体撮像素子の制御方法 |
| WO2019155782A1 (ja) * | 2018-02-09 | 2019-08-15 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置および半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021199681A1 (ja) | 2021-10-07 |
| CN115191034A (zh) | 2022-10-14 |
| EP4131430A4 (en) | 2023-08-09 |
| US20230178576A1 (en) | 2023-06-08 |
| EP4131430A1 (en) | 2023-02-08 |
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