JPWO2021193915A1 - - Google Patents

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Publication number
JPWO2021193915A1
JPWO2021193915A1 JP2022510734A JP2022510734A JPWO2021193915A1 JP WO2021193915 A1 JPWO2021193915 A1 JP WO2021193915A1 JP 2022510734 A JP2022510734 A JP 2022510734A JP 2022510734 A JP2022510734 A JP 2022510734A JP WO2021193915 A1 JPWO2021193915 A1 JP WO2021193915A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2022510734A
Other languages
Japanese (ja)
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JP7736670B2 (ja
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Publication of JPWO2021193915A1 publication Critical patent/JPWO2021193915A1/ja
Priority to JP2025141884A priority Critical patent/JP2025172868A/ja
Application granted granted Critical
Publication of JP7736670B2 publication Critical patent/JP7736670B2/ja
Active legal-status Critical Current
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/703SSIS architectures incorporating pixels for producing signals other than image signals
    • H04N25/704Pixels specially adapted for focusing, e.g. phase difference pixel sets
JP2022510734A 2020-03-27 2021-03-26 撮像装置及び電子機器 Active JP7736670B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025141884A JP2025172868A (ja) 2020-03-27 2025-08-28 撮像装置及び電子機器

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020058752 2020-03-27
JP2020058752 2020-03-27
JP2020217344 2020-12-25
JP2020217344 2020-12-25
PCT/JP2021/012841 WO2021193915A1 (ja) 2020-03-27 2021-03-26 撮像装置及び電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025141884A Division JP2025172868A (ja) 2020-03-27 2025-08-28 撮像装置及び電子機器

Publications (2)

Publication Number Publication Date
JPWO2021193915A1 true JPWO2021193915A1 (https=) 2021-09-30
JP7736670B2 JP7736670B2 (ja) 2025-09-09

Family

ID=77891971

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022510734A Active JP7736670B2 (ja) 2020-03-27 2021-03-26 撮像装置及び電子機器
JP2025141884A Pending JP2025172868A (ja) 2020-03-27 2025-08-28 撮像装置及び電子機器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025141884A Pending JP2025172868A (ja) 2020-03-27 2025-08-28 撮像装置及び電子機器

Country Status (8)

Country Link
US (1) US20230143387A1 (https=)
EP (1) EP4131429A4 (https=)
JP (2) JP7736670B2 (https=)
KR (1) KR102920128B1 (https=)
CN (1) CN115152022A (https=)
DE (1) DE112021001917T5 (https=)
TW (1) TWI910139B (https=)
WO (1) WO2021193915A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021193254A1 (ja) * 2020-03-27 2021-09-30 ソニーセミコンダクタソリューションズ株式会社 撮像装置及び電子機器
US20250120210A1 (en) * 2022-02-08 2025-04-10 Sony Semiconductor Solutions Corporation Solid state imaging device and electronic apparatus
US20230268366A1 (en) * 2022-02-24 2023-08-24 Samsung Electronics Co., Ltd. Image sensor
WO2023234069A1 (ja) * 2022-05-30 2023-12-07 ソニーセミコンダクタソリューションズ株式会社 撮像装置および電子機器
JP2024014424A (ja) * 2022-07-22 2024-02-01 ソニーセミコンダクタソリューションズ株式会社 撮像装置
JP2024041483A (ja) * 2022-09-14 2024-03-27 ソニーセミコンダクタソリューションズ株式会社 光検出装置、光検出装置の製造方法、及び電子機器
TW202433740A (zh) * 2023-01-20 2024-08-16 日商索尼半導體解決方案公司 半導體裝置
JP2024127099A (ja) * 2023-03-08 2024-09-20 ソニーセミコンダクタソリューションズ株式会社 撮像素子及び撮像装置
JP2025024416A (ja) * 2023-08-07 2025-02-20 ソニーセミコンダクタソリューションズ株式会社 光検出装置及び電子機器
WO2025169614A1 (ja) * 2024-02-09 2025-08-14 ソニーセミコンダクタソリューションズ株式会社 光検出装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158800A (ja) * 2007-12-27 2009-07-16 Nikon Corp 固体撮像素子及びこれを用いた撮像装置
JP2013084742A (ja) * 2011-10-07 2013-05-09 Canon Inc 光電変換装置および撮像システム
JP2017212351A (ja) * 2016-05-26 2017-11-30 キヤノン株式会社 撮像装置
JP2018201015A (ja) * 2017-05-29 2018-12-20 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置、及び電子機器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4077577B2 (ja) 1999-04-01 2008-04-16 オリンパス株式会社 撮像素子
JP6299058B2 (ja) * 2011-03-02 2018-03-28 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
WO2014097899A1 (ja) * 2012-12-21 2014-06-26 富士フイルム株式会社 固体撮像装置
US9807294B2 (en) * 2015-08-05 2017-10-31 Omnivision Technologies, Inc. Image sensor with symmetric multi-pixel phase-difference detectors, and associated methods
TWI875555B (zh) * 2016-01-27 2025-03-01 日商新力股份有限公司 固體攝像元件
KR102661391B1 (ko) * 2016-10-12 2024-04-26 삼성전자주식회사 이미지 센서
WO2018150902A1 (ja) * 2017-02-17 2018-08-23 ソニーセミコンダクタソリューションズ株式会社 撮像素子および電子機器
US10461109B2 (en) * 2017-11-27 2019-10-29 Taiwan Semiconductor Manufacturing Co., Ltd. Multiple deep trench isolation (MDTI) structure for CMOS image sensor
US10998365B2 (en) * 2019-01-30 2021-05-04 Samsung Electronics Co., Ltd. Image sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158800A (ja) * 2007-12-27 2009-07-16 Nikon Corp 固体撮像素子及びこれを用いた撮像装置
JP2013084742A (ja) * 2011-10-07 2013-05-09 Canon Inc 光電変換装置および撮像システム
JP2017212351A (ja) * 2016-05-26 2017-11-30 キヤノン株式会社 撮像装置
JP2018201015A (ja) * 2017-05-29 2018-12-20 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置、及び電子機器

Also Published As

Publication number Publication date
KR102920128B1 (ko) 2026-01-30
US20230143387A1 (en) 2023-05-11
CN115152022A (zh) 2022-10-04
DE112021001917T5 (de) 2023-02-23
EP4131429A1 (en) 2023-02-08
EP4131429A4 (en) 2023-10-11
KR20220159374A (ko) 2022-12-02
JP7736670B2 (ja) 2025-09-09
TWI910139B (zh) 2026-01-01
WO2021193915A1 (ja) 2021-09-30
TW202207484A (zh) 2022-02-16
JP2025172868A (ja) 2025-11-26

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